Fieldbus system EtherCAT compatible SI Unit

No.EX-OMA1023 PRODUCT NAME Fieldbus system EtherCAT compatible SI Unit MODEL / Series / Product Number EX600-SEC3/SEC4 EX600-ED# Table of Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 11 Mounting and Installation 13 Installation 13 SI Unit Model Indication and How to Order 16 Summary of Product parts 16 Mounting and Installation 17 Wiring 17 Setting

SI Unit

For your safety . 13 1.1.General safety notes . 13 1.2. Electrical safety . 14 1.3. Safety of the machine or system . 15 1.4. Directive and standards . 15 1.5. Documentation . 16 1.6. Abbreviations used . 16 2. Product Summary . 17 2.1. Features . 17 2.2. Parts and description . 18 2.3. Safe power supply (output). 19 2.4. Block diagram . 19 3. Installation . 20 3.1. Mounting . 20 3.2.

Multi Channel Pressure Sensor Controller

No.PS-OMH0006-F PRODUCT NAME Multi Channel Pressure Sensor Controller MODEL / Series / Product Number PSE200 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Mounting and Installation 13 Installation 13 Wiring 15 Internal circuit and wiring example 17 Setting of Function 18 Pressure Setting 22 Setting of Special

PS-OMH0005CN

No.PS-OMH0005CN-D // PSE200 2 8 9 10 13 13 15 17 18 22 24 27 28 29 36 36 37 -1No.PS-OMH0005CN-D (ISO/IEC)(JIS) 1 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

Sensor Monitor

No.PS-OMW0014-B PRODUCT NAME Sensor Monitor MODEL / Series / Product Number PSE3##A Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Mounting and Installation 13 Installation 13 Wiring 15 Pressure Setting 19 Outline of Settings 20 Initial Setting 21 3 Step Setting Mode 24 Simple Setting Mode 26 Function Selection

Sensor Monitor

No.PS-OMU0012-C PRODUCT NAME Sensor Monitor MODEL / Series / Product Number PSE3#0AC Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Mounting and Installation 13 Installation 13 Wiring 14 Pressure Setting 16 Outline of Settings 17 Initial Setting 18 3 Step Setting Mode 21 Simple Setting Mode 23 Function Selection

Digital Flow Switch ( compatible)

No.PF-OMZ0002-A PRODUCT NAME Digital Flow Switch ( compatible) MODEL / Series / Product Number PF2MC7## Contents Safety Instructions 3 Model Indication and How to Order 11 Summary of Product parts 13 Definition and terminology 15 Mounting and Installation 17 Installation 18 Piping 20 Wiring 21 Outline of Settings [Measurement mode] 29 Flow Setting (set value only) of OUT1 OUT2 [3 step setting

Digital Flow Switch (Integrated display type) ( compatible)

Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Erroe Reservation Temp. Flow Reservation OUT2 OUT1 Diagnosis Diagnosis Switch output The process data of this product is Big-Endian type. When the transmission method of the upper communication is Little-Endian, the byte order will be changed. Refer to the table below for the Endian type of the major upper communication.

ZVB20_E_

Ionizer Functions -13- 3. Ionizer Functions 3.1 Functions 1. Name and description of indication LEDs PWR ION / HV NDL Symbol Color Description Contents PWR Green Power supply indicator LED is ON when the power supply is ON; LED flashes when the power supply or CPU is abnormal.

ZVB40_E_

Ionizer Functions -13- 3. Ionizer Functions 3.1 Functions 1. Name and description of indication LEDs PWR ION / HV NDL Symbol Color Description Contents PWR Green Power supply indicator LED is ON when the power supply is ON; LED flashes when the power supply or CPU is abnormal.

High Vacuum L Type Valve

Period and Scope of Warranty 13 7. Parts Replacement Procedure 14 1 XL-OMV0017 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

Caution 13 - Rotary Actuator How to Use the Air-hydro Type Caution on Design Do not use a rotary actuator of the air-hydro type near flames, or in equipment or machinery that exceeds an ambient temperatures of 60 . There is a danger of causing a fire because the rotary actuator of the air-hydro type uses a flammable hydraulic fluid.

Rotary Table

If the products kinetic energy of the load exceeds the allowable value, it could damage the product, and cause a hazard to humans and damage the machinery and equipment. 13. Provide a shock absorber if the kinetic energy that is applied to the product exceeds the allowable value.

MHx-OMY0005

MHF2-8D1 MHF2-8D2 GR-S-010(10g) MHF8-PS MHF8-PS MHF8-PS-2 122021 GR-L-005(5g) 122021 P.13 16 3-4. /2 MHF2-12D20D 1 12: 16 2 1620: 3 17 4 12:R 18 5 1620:C 6 19 7 20 NBR 8 A 21 NBR 9 B 22 NBR 10 C 11 12 13 14 15 MHF2-12D MHF2-12D1 MHF2-12D2 MHF12-PS MHF12-PS MHF12-PS 202122 MHF2-D,D1(12,16,20)GR-S-010(10g) () MHF2-D2(12) GR-L-005(5g) () GR-S-010(10g) () MHF2-D2(16,20

Electric Actuator / Slider Type 《 AC Servo Motor 》

. * For LECSS, please set the electronic gear with PC, PLC etc. in your application. 13 - LECSB-T LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Initial Parameter *1,*2 Para value Recommended Value No Number of command input pulses per revolution *3. PA05 10 10 Electronic gear numerator *3.

SI unit for DeviceNet ®

Installation example Nm L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 (mm) : L1 shows the dimensions of the VQC1000 series solenoid valve.

Fieldbus system (CC-Link compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Fieldbus system (DeviceNet compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

CEx-OMB0060

Output terminals Bank No. 1 2 3 4 5 1 1 2 3 4 5 2 6 7 8 9 10 3 11 12 13 14 15 4 16 17 18 19 20 [ For binary output ] The table below shows correspondence of preset numbers (1 to 31) and output terminals (OUT 1 to 5) in binary output. A smaller preset number is outputted when outputs are overlapped.

Fieldbus system (PROFIBUS DP compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .