SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.
Body Class: 6 (Class 6, Orifice ø22), Valve Type: 0 (Normally Closed), Port Size: 10 (1), Thread: R, Rc, Material: C (Body: PFA, Endplate: PPS, Diaphragm: PTFE), Option: 4 (Indicator), Specification: V (Vacuum)
Body Class: 6 (Class 6, Orifice ø22), Valve Type: 0 (Normally Closed), Port Size: 10 (1), Thread: N (NPT), Material: A (Body: SUS, Endplate: PPS, Diaphragm: PTFE), Option: 1 (Flow Rate Adjustment), Specification: V (Vacuum)
Body Class: 6 (Class 6, Orifice ø22), Valve Type: 0 (Normally Closed), Port Size: 10 (1), Thread: N (NPT), Material: C (Body: PFA, Endplate: PPS, Diaphragm: PTFE), Option: None, Specification: V (Vacuum)
Body Class: 6 (Class 6, Orifice ø22), Valve Type: 0 (Normally Closed), Port Size: 10 (1), Thread: R, Rc, Material: A (Body: SUS, Endplate: PPS, Diaphragm: PTFE), Option: None, Specification: V (Vacuum)
Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: R, Rc, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Option: Indicator, Specification: Vacuum, Z: -
Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: NPT, Material: Body: SUS, Endplate: PPS, Diaphragm: PTFE, Option: Flow Rate Adjustment, Specification: Vacuum, Z: -
Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: NPT, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Option: None, Specification: Vacuum, Z: -
Body Class: Class 6, Orifice ø22, Valve Type: Normally Closed, Port Size: 1, Thread: R, Rc, Material: Body: SUS, Endplate: PPS, Diaphragm: PTFE, Option: None, Specification: Vacuum, Z: -
Type: Rotary Type, Pressure Gauge: None, Construction: No Terminal Box, Accessories: A+D, Connection: -
Type: Rotary Type, Pressure Gauge: None, Construction: w/Terminal Box, Accessories: A+D, Connection: -
Type: Rotary Type, Pressure Gauge: 0.2MPa, Construction: No Terminal Box, Accessories: A+D, Connection: -
Type: Rotary Type, Pressure Gauge: 0.3MPa, Construction: No Terminal Box, Accessories: A+D, Connection: -
Type: Rotary Type, Pressure Gauge: 0.3MPa, Construction: w/Terminal Box, Accessories: A+D, Connection: -
Type: Rotary Type, Pressure Gauge: 1.0MPa, Construction: No Terminal Box, Accessories: A+D, Connection: -
Type: Rotary Type, Pressure Gauge: 1.0MPa, Construction: w/Terminal Box, Accessories: A+D, Connection: -
Type: Rotary Type, Pressure Gauge: 0.2MPa, Construction: w/Terminal Box, Accessories: A+D, Connection: -
Body Class: Class 2, Orifice ø4, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 1/4, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: -, Option 2: -
Body Class: Class 2, Orifice ø4, Valve Type: Normally Closed, Fitting Type: Integrated Tubing, Applicable Tube Size: 1/4, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: -, Option 2: -
Body Class: Class 4, Orifice ø12, Valve Type: Normally Closed, Fitting Type: Integrated Tubing, Applicable Tube Size: 1/2, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: -, Option 2: -