Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

LX Series Compact Electric Actuators

Acaution 3:"l"1l"Jl'ffi':':::fflffi:*' "" the max tishrenins depth to How To Operate The LXF The standard LXF series actuator uses a s-phase uni-polar DC stepper motor, (0.74lo). The motor requires a driver to move lhe molor based on the input commands. The LXF can be operated with either the LC6D-5O7AD basic stepper driver or other compatible driver.

3 Port Solenoid Valve Series SYJ300/500/700

Electrical entry G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector Without connector cable V100-49-1L plug connector Cable length 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm M plug connector M8 connector 4 For connector cable of M8 connector, refer to page 67.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Refer to P/A's "High Purity Fluoropolymer Fitting & Tubings" ES70-17 catalogue for more details. 1 Series SRF30 Specifications Pressure Characteristics Proof pressure Maximum operating pressure Regulating pressure range Maximum pilot pressure Ambient and fluid temperature 1.0MPa Inlet pressure 0.3MPa Outlet pressure 0.1MPa Set pressure Flow rate 1l/min Fluid water 0.5MPa 0.12 0.02 to 0.4MPa

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

14.2 Cv 10.2 P l/min VCB 3 Cv = 0.35 3 4 Formula based on effective area (Smm) 1.0 Q = 0.8 S 10.2 P l/min VCB23 Cv = 0.33 VCB25 Cv = 0.65 Q: Flow rate (l/min) P:Pressure differential (P P) P: Upstream pressure (MPa) P: Downstream pressure (MPa) S: Effective area (mm) Cv: Cv factor VCB34 Cv = 0.54 VCB24 Cv = 0.51 0.1 0.001 0.01 0.1 1 10 Pressure differential P = (P P) MPa Note: 1l

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Note) In case of a viscous fluid, there may be a difference between the flow rate found with the above formulas and the actual flow rate, depending on the viscosity. 1l/min = 0.035SCFM 1MPa = 145psi 1in = 25.4mm 7

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, 1L, SS5Y3 OTHER SIZE RATING, .55115 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, 1L, SS5Y3 OTHER SIZE RATING, .44782 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, 1L, SS5Y3 OTHER SIZE RATING, .44782 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, 1L, SS5Y3 OTHER SIZE RATING, .88184 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, 1L, SS5Y3 OTHER SIZE RATING, .88184 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, 1L, SS5Y3 OTHER SIZE RATING, .63099 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, 1L, SS5Y3 OTHER SIZE RATING, .73730 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, 1L, SS5Y3 OTHER SIZE RATING, .71937 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, 1L, SS5Y3 OTHER SIZE RATING, .59358 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, 1L, SS5Y3 OTHER SIZE RATING, .66138 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in metal base (IP20) , Manifold for EX510 Gateway-type serial transmission system , Side or bottom ported , Side ported available with external pilot , Available with one-touch fittings, MFLD, DIN RAIL MT, SY5000, VALVE, SS5Y5 MANIFOLD SY5000, 1L, SS5Y5 OTHER SIZE RATING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in metal base (IP20) , Manifold for EX510 Gateway-type serial transmission system , Side or bottom ported , Side ported available with external pilot , Available with one-touch fittings, MFLD, DIN RAIL MT, SY5000, VALVE, SS5Y5 MANIFOLD SY5000, 1L, SS5Y5 OTHER SIZE RATING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in metal base (IP20) , Manifold for EX510 Gateway-type serial transmission system , Side or bottom ported , Side ported available with external pilot , Available with one-touch fittings, MFLD, DIN RAIL MT, SY5000, VALVE, SS5Y5 MANIFOLD SY5000, 1L, SS5Y5 OTHER SIZE RATING