Series 12-REA Sine rodless cylinder

, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke will be available upon request as special product.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

mm 1000 mm 1500 mm 2000 mm 3000 mm 10 mm (Semi-standard) 52-SY9000 Manual override Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nil D E L type has 300 mm and 600 mm only. 3 C ATEX Compliant 5 Port Solenoid Valve Series 52-SY Safety Instructions Specifications 1) This product is not suitable for Zone 0.

Series AP3100

Code Knob Multi turn round knob 1/4 turn lever knob 4) Indication of opened/closed status. 600 625 Connections (Inlet, Outlet) Code Installation option 1/4 turn round knob with open/close indication window 650 Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld Code Installation Bottom

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VEF VEP Flow rate (L/min (ANR)) Inlet pressure (MPa) VER ARP40(K) ARP40(K) Rc 1/2 VEA 0.50 0.25 VY1 0.45 VBA VBAT 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point AP100 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 705 Series ARP20/30/40 Construction ARP20(K)

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

PVQ Flow rate (L/min (ANR)) Inlet pressure (MPa) VY1 ARP40(K) ARP40(K) VBA VBAT Rc 1/2 0.50 0.25 AP100 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 763 ARP20/30/40 Series Construction ARP20(K)/30(K)/40(K)

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (l/min (ANR)) Inlet pressure (MPa) ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600

Regulator for 2 MPa Series ARX20

700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 AU Flow rate (/min (ANR)) Flow rate (/min (ANR)) AF AR ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Maximum operating pressure Pv (MPa) 1 5 0.3 Model Allowable load mass mv (kg) Model Cushion Stroke Stroke (mm) CYV15 CYV32 CYV15 CYV32 25 30 8-18-6 Rodless Cylinder for Vacuum Series CYV 15, 32 How to Order MX CYV 15 200 MTS MY CY Standard stroke Bore size MG 15 32 15 mm 32 mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) 15, 32 CX DSpecifications

76

Wall Front side Installation space of the conventional type Installation space of the IDF100FS (Example of heat exhausting direction from right side) Leave at least 1.97 ft (600 mm) on the sides indicated with . Note) Leave a space of at least 1.97 ft (600 mm) between the heat exhausting face and the wall.

reduces flow setting time

Connection thread size Wrench tightening angle after hand-tightening [deg] Proper tightening torque [Nm] G1/8 10 to 20 3 to 4 G1/4 15 to 35 4 to 5 G3/8 15 to 35 8 to 9 G1/2 15 to 35 14 to 15 600 AS-FS Series Specific Product Precautions 3 Be sure to read this before handling the products.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Connection thread size Wrench tightening angle after hand-tightening [deg] Proper tightening torque [Nm] G1/8 10 to 20 3 to 4 G1/4 15 to 35 4 to 5 G3/8 15 to 35 8 to 9 G1/2 15 to 35 14 to 15 600 AS-FS Series Specific Product Precautions 3 Be sure to read this before handling the products.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Connection thread size Wrench tightening angle after hand-tightening [deg] Proper tightening torque [Nm] G1/8 10 to 20 3 to 4 G1/4 15 to 35 4 to 5 G3/8 15 to 35 8 to 9 G1/2 15 to 35 14 to 15 600 AS-FS Series Specific Product Precautions 3 Be sure to read this before handling the products.

Speed Controller with One-touch Fitting

Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X214 Restrictor (Without check valve) 10Clean Series 555 A AS Series Needle Valve/Flow Rate Characteristics AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 600 300 Inlet pressure

Power Clamp Cylinder

Recommended shim thickness) Arm length L: 8 in 0.08 0.04 0.12 For Asia For North America For Europe For France Special 800 Clamping force (lbf) 0.7 MPa 600 0.5 MPa 0.3 MPa 400 200 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Shim thickness (in) 80 Arm length L: 250 mm 7000 6000 5000 4000 3000 2000 1000 0 Clamping force (N) 0.7MPa 0.5 MPa 0.3 MPa 0 1 2 2.5 3.5 3 4 5 6 7 8 9 Shim thickness (mm) (Ex.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 Pressure Control Equipment 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-REA63 63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

Rotary Actuator

With surge voltage suppressor Note) Grommet L-type plug connector M-type plug connector DIN terminal DIN (EN175301-803) terminal Conduit terminal MRQ [IP65 compatible] [IP65 compatible] [IP65 compatible] Z With light/surge voltage suppressor R With surge voltage suppressor (Non-polar) U With light/surge voltage suppressor (Non-polar) G: Lead wire length 300 mm H: Lead wire length 600

Possible to transfer a workpiece at low-speed.

Symmetric type Weight Connection port Connection port (g) 10 20 30 50 Size 600 570 1150 1090 1460 1390 2390 2280 90 spec. 180 spec. Values not including the auto switch weight. Dimensions GE (Arm operating range) EB Note) EB (Max. EA) 22.5 (Max. EE) GA ND GB EC ED EF 2 x K Hexagon socket head set screw GD GC 0.5 NA NC NB Note) This component does not exist for 180 type.

5 Port Solenoid Valve

VQC5000 Bore size MB, CA1 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm CS1 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm Average speed [mm/s] 50 63 80 100 125 140 160 180 200 250 1100 Vertically upward Horizontal 1000 900 800 700 600 500 400 300 200 100 0 Values at extension of a directly coupled cylinder when meter-out speed controllers are used with the needle full open

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.