High Vacuum L Type Valve

H4 Initial power / 100 VAC 200/40 200/50 400/100 600/150 Power Symbol 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

HRX-OM-W032

Refer to 1.4 Product Label" and check the part number of the product. 200 S A 46 HRS Cooling capacity Option 2 200 20kW None Nill Fixed SI unit W*2 Cooling method A Air-cooled refrigeration *2Unit: MPa/ oC (degree Celsius) Option 1 Piping thread type None Nill Nil Rc Caster-adjuster foot installed A F G (Rc-G thread adapter set is included) Fluid fill port K*1 N NPT (Rc-NPT thread adapter

CEx-OMQ0010

200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES YES NO NO 14.5m T YES YES NO NO YES YES (C EU 1 C EU 5) NO YES A 12 A NO YES NO YES NO NO YES () () NO YES YES NO YES NO 5m m+ 5m m+ YES 3 0m m 3 0mm NO YES NO NO YES NO YES YES C EU 2 13 4 4-1 40 50 63 80 100 1.5MPa

CEx-OMQ0011

(ON ON ON (LED)No.10() Err9 (P3)(P2) () Err9 Err9 ON ON ON ()5mm Err5 5mm 1 Err10: Err11 CPU Err12 ON 13-2 () 200 200 ( 6) 57 *200.0 PRG STEP P6 200.0 200 200 300mm/sec 50% 35% 58 141 No. No.

LEC-T1_C

I/O LEC-CN5-* 1 1 PLC 3 DC24V CN5 CN4 CN3 1 2 LE-C*-*-* LE-C*-*-S 120.3 120.3 mm mm CN2 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 CN1 50 200 50 200 3 3 <> AWG20 (0.5mm 2) 3 DC24V USB (A-miniB type) USB LEC-W2 3m :LEC-T1-3JG* 1 2 1.2 http://www.smcworld.com/ 3 UL,UL1310Class2 7 USB LAN 16 - 5. 1 2 CN4 5.1 3 ,5.2 4 LECPA 5.3(1) 5.3(2)

JXCx-OMT0062

Controller CN3 Actuator cable Electric Actuator Motor CN2 5.3 CN4: Serial I/O connector (1) Connection with the teaching box Controller CN4 Teaching box (The 3m cable is provided.) 26 - (2) Connection with a PC Controller setting kit Controller Conversion unit 120.3 120.3 mm mm 200 200 mm/s mm/s USB cable (A-miniB type connector) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200

LEC-OM038xx

200 mm/s mm/s USB cable A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 Communication cable PC PC is prepared by customer) Refer to 8CN2 TB/PC Power supply connector(P.23) for usage.

JXCx-OMT0034CN

CN1IF (CONT) 19 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SW OFF RWw(n+1)b0 ON(1) (LEC) (LEC)(LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.CN2TB/PC () 20 - .CN4 6.1 1 EMG+ EMG 2 EMGEMG 3 24V 5 4 3 2 1 () 4 0V 5 FG FG (LEC)(0V)

LEC-OM036xx

200 mm/s mm/s USB cable A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2CN Communication cable PC PC is prepared by customer) Refer to 9.

JXCx-OMT0032CN

CN1IF(CONT) 18 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SWOFF(LEC)(LEC) (LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.

LEC-OM034xx

200 mm/s mm/s USB cable A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2CN Communication cable PC PC is prepared by customer) Refer to 9.CN2TB/PC Power supply connector for usage.

A_HEC-OM-I009

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig

Air Combination

Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Caution Lubricator (1) Avoid rising piping and piping branches on the outlet piping.

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point

MU

Possible to install auto switches Series Variations Standard stroke (mm) Rod end configuration Applicable auto switch Action Type Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Single rod 32 Reed switch D-A7 D-A8 (2-color) D-A79W Double acting 40 50 Double rod Male thread, Female thread 63 Solid state switch D-A7 D-J79 (2-color) D-F7W D-J79W 25 32 Spring return

240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

CLQ

200 100 100 1.