High Vacuum L Type Valve Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.
Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100
MHR MHK q MHS r MHC Mounting is possible from 4 directions.
H4 Initial power / 100 VAC 200/40 200/50 400/100 600/150 Power Symbol 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.
100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series AMF Dimensions AMF450 to AMF850 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080
Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100
R Resolution-switch function 0.0 to 101.0 kPa 0.100 to 1.000 MPa 100.0 to 100.0 kPa It reduces the monitor to flicker. 1 MPa 100 kPa Rated pressure range 0 0 0 (Accuracy is not changed, only the displayed values.) 1/1000 1/100 0.1 MPa (100 kPa) 100 kPa 101 kPa R MPa/kPa switch function Set pressure range 0.105 to 1.050 MPa 105.0 to 105.0 kPa 10.0 to 105.0 kPa Vacuum, compound and/or positive
Series CQ2 Compact Cylinder: Long Stroke Type Double Acting, Single Rod 32, 40, 50, 63, 80, 100. How to Order . Precautions. Specifications. Construction. Dimensions . Series RQ Compact Cylinder with Air Cushion 20, 25, 32, 40, 50, 63, 80, 100. Features. Series Variations. Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod 20, 25, 32, 40, 50, 63, 80, 100 .
9 wyu e r i MH-A1006 MHKL2-J25 MHKL2-J25F MHKL2-J25S Order 2 pieces per one finger unit.
9 wyu e r i MH-A1006 MHKL2-J25 MHKL2-J25F MHKL2-J25S Order 2 pieces per one finger unit.
0.04 0.10 0.09 Front end lock (R) 0.08 0.09 0.09 0.23 0.24 Double end lock (W) Calculation example: CBA2L40-100-HN Basic weight . 1.08kg (40 foot type) Additional weight ... 0.22/50 st Lock weight . 0.02 kg (Rear end lock, Manual release, Non-lock) 1.08 + 0.22 x 100/50 + 0.02 = 1.54 kg Cylinder stroke . 100 st The minimum stroke for auto switch mounting, proper auto switch mounting position
Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.
Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.
MADE IN G IDF100150F i-2 i-6 IDX-OM-U021 i i-3 HFC IDF100150F i-3 i-7 IDX-OM-U021 i i-4 / 1 1.5 () IDF100150F i-4 / i-8 IDX-OM-U021 1 1 1-1 i.2.9 1 2 IDF100F-30 C.RV IDF100F-30-CRV1 IDF 100 F 30 C 1 2 G 3 K 100 125 150 ) 100kW 125kW P 150kW ) R V 30 AC200V(50Hz) AC200/220V(60Hz) 1 C 1 G 2 K 3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K
Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 NPTF VP4 VZS Type 40: Base mounted (A, B port bottom ported) Applicable solenoid valve VK3140 VK334 How to Order VV5K3 40 05 M5 Type VK334 Type VK3140 VFS Thread type R port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Applicable blanking plate assembly VK3000-7-1A Valve stations VS4 Nil F N T Rc 01 1 station G NPT VQ7 20 20 stations NPTF A port: M5 x 0.8 EVS
Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.
A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.
Be certain that the gasket and filter element R of the supply valve are properly mounted as well. (Filter element R is installed in the supply valve only.) B 4) Tighten the mounting screw of the solenoid valve to the specified torque below.
Ol5 (M5) o.z 0r5 -oz -Body ported {wjth bracket} NVKF332Y {Low watlaqe: 2WDC) NVKF332V {Vacuum) l Ton-100 PSI (-100 KPa-o.7 MPa) NVKF332W tLow wattaoe + Vacuuml 0.181 lbs (80 s0 NVKF333 0-100 PSI {0-0.7 MPa) NVKF333Y ilow waltaqe: 2WDC) NVKF333V (Vacuum) 1 Torr"100 PSI (-100 KPa-0.7 MPa) NVKF333W ilow wattaoe + Vacuuml 2 position srngre solenoid (for maniiold) 0r5 NVKF334 0 ' 1 0 0 P S I
Ol5 (M5) o.z 0r5 -oz -Body ported {wjth bracket} NVKF332Y {Low watlaqe: 2WDC) NVKF332V {Vacuum) l Ton-100 PSI (-100 KPa-o.7 MPa) NVKF332W tLow wattaoe + Vacuuml 0.181 lbs (80 s0 NVKF333 0-100 PSI {0-0.7 MPa) NVKF333Y ilow waltaqe: 2WDC) NVKF333V (Vacuum) 1 Torr"100 PSI (-100 KPa-0.7 MPa) NVKF333W ilow wattaoe + Vacuuml 2 position srngre solenoid (for maniiold) 0r5 NVKF334 0 ' 1 0 0 P S I