• /oC or less Max output flow rate *5 80 L/min(ANR) or more (SUP=0.14MPa) 200 L/min(ANR) or more (SUP=0.4MPa) Air consumption *5 2 L/min(ANR) or less (SUP=0.14MPa) 4 L/min(ANR) or less (SUP=0.4MPa) -20oC80oC(Non Explosion,IS Explosion:T4/T5)6,7 Ambient temperature and operating fluid temperature -2060(IS Explosion:T6) Explosion protected construction (Option, preparing) *8 ATEX Intrinsic safety
Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series.
DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock. O For the D-As'model (with indicator lamp), if used at less than the operating current range, LED will not tum on, but switch will operaie properly. a Never use load exceeding maximum conlact capacity of switch.
DJsBAL ON operarios f-l-l t u s e l t l l o r r Caution 6 When handling, please avoid dropping, cylinder nicks, and excessive shock. O For the D-As'model (with indicator lamp), if used at less than the operating current range, LED will not tum on, but switch will operaie properly. a Never use load exceeding maximum conlact capacity of switch.
How to Order M ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction None Nil TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
How to Order M ISE60 A2 22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.
24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 50 118.5 96.5 16 35 64 37 14 12 M10 x 1.5 86 7 30 22 50 6.6 M8 x 1.25 11 Rc1/4 30 17 14 3 8 5.5 71 19 63 130 102 39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5 6.5 84 19 10-10-10 11 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS B L LD
[AF] auto drain Set pressure range 0.05 to 0.85 MPa [AR] Filtration rating [AF] 5 m Compressed air quality class Note 3) ISO8573-1:2010 [6:4:-] 45 cm3 Drain capacity [AF] 8 cm3 25 cm3 Port size 1/4: 30 Port size 1/4: 30 L/min(ANR) L/min(ANR) Port size 3/8: 40 Min. dripping flow rate Note 4) [AL] 15 L/min (ANR) 50 L/min(ANR) 190 L/min(ANR) 220 L/min(ANR) Port size 3/8: 40 L/min(ANR) L/min
Note 2) Pressure gauge G36-10-N01-L G46-10-N01-L NPT (Round type with color zone) G36-10-01-L G46-10-01-L G Square embedded type pressure gauge GC3-10AS-D (4) Note 3) GC3-P10AS-D-X30 NPT Z : Both in MPa and psi (5) Pressure gauge cover assembly 136150A
7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5
DCVX2 (2 )VX2 -37No.PS-OMR0001CN-J 3 ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 2.6 ISA-14 -38No.PS-OMR0001CN-J 3 () ISA-19ISA-12ZS-31-B ISA-16ZS-31-C ISA-15 ISA-20 ISA-20 E210-U01 2 ISA-17 2.6 2.6 Y200T-A -39No.PS-OMR0001CN-J 3 () 2 2 E210-U01 ZS-31-C ZS-31-C ZS-31-B Y200T-A Y200T-A ISA-18 2.6 ISA-15 ISA-16ISA-17 ISA-12-40No.PS-OMR0001CN-J 4 80 kPa220 kPa
7 L N S 6 7 8 R 6 7 8 2 T 9 B -9No.PS-OMT0001CN-E 2 1F 2GH 3ISO1179-1 4 5kPa 61 7 8M12 9 10 11 12ISO16030 -10No.PS-OMT0001CN-E 2 / (2 2 2 1 ) ((3x8)3 ) ISA-16 ISA-14 2 ISA-16-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 ZS-31-B ZS-31-C 4 6 DIN ISA-5L ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 ISA-12ISA-15 Rc1/8 ISA
(D NCDRB10W10.15.20.30 Dimensions Oside eorts: NcRBlowo-os Top ports: I{CFBIOWO-OSE Tt t F f l l . ' ,-t L 1 5 1 I I Oim. for NCFETOWIO l) : Dim tor NCnBtowl5 l Flans ("F') ,dl P4 ct F > 1 '. 111 '.I!.
(D NCDRB10W10.15.20.30 Dimensions Oside eorts: NcRBlowo-os Top ports: I{CFBIOWO-OSE Tt t F f l I l . ' ,-t L 1 5 1 I Oim. for NCFETOWIO l) : Dim tor NCnBtowl5 l Flans ("F') ,dl P4 ct F > 1 '. 111 '.I!.
2006h 00h DXD, IN 0 15 (Slot 2) RO : : : 2020h 00h RO *1: RO means Read Only data.
MHC2/MHCA2/MHCM2 F L F MHC2-6D/MHCA2-6D MHC2-6S/MHCA2-6S MHCM2-7S Pressure 0.6MPa 4 4 2 Pressure 0.6MPa 0.5 Pressure 0.6MPa Gripping force N Gripping force N Gripping force N 3 3 0.4 0.5 0.5 2 2 1 0.3 MHZ 0.4 0.4 0.2 MHF 1 1 0.3 MHL MHR 0 30 20 10 0 30 20 10 0 30 20 10 MHK Gripping point L mm Gripping point L mm Gripping point L mm MHS MHC MHT MHY MHW -X MRHQ MA D619 Series MHC2/MHCA2/MHCM2
(Red) (Black) Single solenoid SJ3000-46-S-l Double solenoid, 3 position type, 4 position type SJ3000-46-D-l (White) (Red) (Black) N C C N Lead wire length For single solenoid : SJ3000-46-SC-l (Red) (Black) Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm (White) (Red) For double solenoid For 3 position type : SJ3000-46-DC-l For 4 position type (Black)