Water-cooledThermo-chiller

min) 1.1 gpm (4 L/min) 10.6 gpm (40 L/min) 10.6 gpm (40 L/min) Circulating fluid rated flow 5.3 gpm (20 L/min) 2.6 gpm (10 L/min) 6.6 gpm (25 L/min) 10.6 gpm (40 L/min) Facility water required flow rate Temperature stability Note 3) 0.54F (0.3C) Pump capacity Note 4) (50/60 Hz)(MPa) 0.45/0.65 (at 30 L/min) 0.40/0.60 (at 4 L/min) 0.40/0.60 (at 40 L/min) 0.40/0.60 (at 40 L/min) Circulating

CL

MNB h + l Z + l + Stroke ZZ + l + Stroke ZZ +Stroke Z +Stroke S +Stroke CNA CNS 125 to 160 CLS CLQ With rod boot A Rc BP lock-up port Unlocked when pressurized CD hole H10 Axis d9 B Rc BP lock-up port 2-Rc P MLGP Width across flats KA RLQ MLU EA D e ML1C Plug cap 2 positions l Dh + l Z + l + Stroke Z + Stroke S + Stroke ZZ + l + Stroke ZZ + Stroke -X 20Data Stroke range (mm) Bore size (

Digital Flow Monitor

(Custom range) Relationship between analogue input and digital display Set value A B 200 0 L/min 200 L/min 500 0 L/min 500 L/min 1000 0 L/min 1000 L/min 2000 0 L/min 2000 L/min 3000(Default) 0 L/min 3000 L/min 6000 0 L/min 6000 L/min 12000 0 L/min 12000 L/min 16000 0 L/min 16000 L/min 20 0 L/min 20 L/min USEr Input value (setting) Input value (setting) -31No.PF-OMU0007-D Press

Thermo-chiller/Rack Mount Type

or less Ionic state silica (SiO2) [mg/L] 50 or less Iron (Fe) [mg/L] 1.0 or less Copper (Cu) [mg/L] 0.3 or less Sulfide ion (S2) [mg/L] Should not be detected Ammonium ion (NH4+) [mg/L] 1.0 or less Residual chlorine (Cl) [mg/L] 0.3 or less Free carbon (CO2) [mg/L] 4.0 or less Reference item 6.

Combination Cylinder

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

MHZ2/MHZJ2

limits, this will have an adverse effect on the life of the air gripper. 60 0.7MPa 0.6MPa 0.5MPa 0.3MPa 60 0.7MPa 0.4MPa 0.5MPa 0.6MPa 0.3MPa 0.4MPa 40 40 20 20 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point L mm 36 Series MHZ2/MHZJ2 Model Selection Confirmation of external force on fingers: Series MHZ 2 Step 3 L L My Mr Mp Fv L L: Distance to the point at which

JIS Standard Hydraulic Cylinder

J H MM D E e 10 f l CX 0.1 0.4 NB Air release Air release C NA T B SS + Q + l + Stroke U ZZ + Q + l + Stroke S + Stroke K F L MA Width across flats G A RR SS + Stroke ZZ + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) e CX J B C F GA GB NA NB P R S T CD RR SS U L l f Q B-rod C-rod B-rod C-rod 32 21.5 15 52 25 to 1400 M10 x 1.25 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209

CL

l Applicable bore size (mm) Part no.

Digital Flow Switch (Remote type monitor unit)

Dry air, N2, Ar 0.2 to 10.5 L/min 1 0.5 to 26.3 L/min 1 to 52.5 L/min 2 to 105 L/min 2 Display flow range Instantaneous CO2 0.2 to 5.2 L/min 0.5 to 13.1 L/min 1 to 26.2 L/min 2 to 52 L/min flow Dry air, N2, Ar 0 to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min 0 to 26.2 L/min 0 to 52 L/min Min. setting/display unit 0.01 L/

CL

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

Table of Contents

h Model b (h9) h (h9) l ***!

Applicable Auto Switch Model

J Dimensions D D-A3lC D-A44C -X 20Technical Data Operation Range ( l Dimension) Dimensions (mm) Bore size (mm) Bore size (mm) 40 Switch part No.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

h Model b (h9) h (h9) l ***!

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

h Model b (h9) h (h9) l ***!

Tie-rod Type Hydraulic Cylinder

0 0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) a CX B C d D CDH9 E F GB GA G J MA L K NB P NA RR S R MM A +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 12 10 21 18 25 14 9.5 M8 x 1.25

ZQ

type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above

Compact Vacuum Ejector Series ZQ

type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1

CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

EX120/121/122

32.3 28.3 47.3 45 l Terminal no.

CNG

m l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.