SMC Corporation of America
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Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Vacuum to 250 psig (1.7 MPa) Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 14 to 160F (10 to 71C) (No freezing) 1) 0.29 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in

Model (Hexagon width across flats) ASR ASQ (Hexagon width across flats) AS23 1FE-01-04SK 12.7 17.5 9.3 13.1 24.9 4 9.3 26 30.9 AS23 1FE-01-06SK 13.5 22.9 R 1/8 10.9 12 12 14 44.9 26.9 49.9 48 6 11.6 27 36.3 14.2 53 AS23 1FE-01-08SK 18.5 28.2 12.9 16.2 30.9 8 15.2 29 40.8 AS23 1FE-02-04SK 16 21.9 10.9 16.2 30.6 4 10.4 36 39.6 AS23 1FE-02-06SK 17 25.2 18.4 34 6 12.8 37 42.1 R 1/4 14 14 41.2

13 14 14 17 14 16 15 18 Reed switch Without indicator light RB 8 7 5.5 6.5 6.5 J 2-color indication 2-color indication Water resistant 3.5 3.5 5 5 5 Grommet (In-line) D-F5BAL DSolid state switch D-F5NTL D-G5NTL D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV With timer 4 4 4.5 4.5 4.5 -X Grommet (Perpendicular) 2-color indication 20With pre-wire connector is also available in solid state auto switches

Fittings & Tubing Air Cylinders Rotary Actuators 57 54 60 120 120 A C 45 14 14 3 x M4 x 0.7 thread depth 8 25 25 M5 x 0.8 M5 x 0.8 13 M5 x 0.8 Finger closing port P.C.D.36 (Mounting thread) Finger closing port Finger opening port M5 x 0.8 Finger opening port 44 14h9 0 -0.043 18 1.5 55.5 +0.02 +0 3 x 4 depth 8 9 2 (A, B, C common view) 28.5 37 12 (60) 10 21 M5 x 0.8 thread depth 5 Vacuum suction

Find the value of M1 max at 300 mm/s in Graph (1). 2a =M1/M1 max =1.47/14 =0.105 M1 L1 M3 = m x g x L2 = 3 x 9.8 x 0.04 = 1.176 [Nm] m x g Investigate M3. M3 Find the value of M3 max at 300 mm/s in Graph (3). 2b = M3/M3 max = 1.176/14 = 0.084 L2 m x g 3.

9 2A 2A 13 2 (Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2 x M5 x 0.8 24 21

Unused Lead wire assy U side 6 stations (14 stations) Pin Confirm an insertion of the lead wire assembly after the insertion of pin by light pulling of the lead wire. (n) 4. Mount the end plate !2 and !3 and tighten the bolt !1. 7 stations (15 stations) (2) (1) Stations Note 1) Be careful that the packing and the O-ring do not fall out of the groove.

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11-11-10 Reed switch Solid state switch CRA1 11-11-11 D-90/97 D-A90/A93/A96 D-A90V/A93V/A96V 11-11-12 CRQ2 Grommet D-90A/93A 11-11-13 Direct MSQ D-R731/R732 11-11-14 D-R801/R802 11-11-14 MRQ 11-11-15 D-R731C/R732C Connector 11-11-15 D-R801C/R802C DRail

13 14 14 17 14 16 15 18 Reed switch Without indicator light RB 8 7 5.5 6.5 6.5 J 2-color indication 2-color indication Water resistant 3.5 3.5 5 5 5 Grommet (In-line) D-F5BAL DSolid state switch D-F5NTL D-G5NTL D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV With timer 4 4 4.5 4.5 4.5 -X Grommet (Perpendicular) 2-color indication 20With pre-wire connector is also available in solid state auto switches

QW RW T W X Y Z Bore size (mm) S 140 32 60 33 19 157 33 10.5 7.5 40 84 35 180 21 187 39.5 11 8 Long Stroke X Y Z Bore size (mm) Stroke range (mm) 32 125, 150, 175, 200, 250, 300 45.5 12.5 12.5 40 125, 150, 175, 200, 250, 300 55 14 14 8-27-9 10 Series CXT Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Reed switch Solid state switch A B W D-A9 D-M9 D-F9BAL

14 Has it been ensured that any person intentionally starting hazardous movements can only do so with a directly view of the danger zone?

1: ON 3 Flow rate SW2 0: OFF 1: ON 4 Temperature SW1 0: OFF 1: ON 5 Temperature SW2 0: OFF 1: ON 6 Pressure SW1 0: OFF 1: ON 7 Pressure SW2 0: OFF 1: ON 8 Flow rate unit 0: L 1: ft3 9 Flow rate criteria 0: STD 1: nor 10 Flow diagnosis 0: Normal 1: HHH 11 Temperature diagnosis 0: Normal 1: HHH/LLL 12 Pressure diagnosis 0: Normal 1: HHH/LLL 13 Fixed output 0: Normal output 1: Fixed output 14

Normal output Reversed output Hysteresis mode Window comparator mode Accumulated output mode (Increment) Accumulated output mode (Decrement) Accumulated pulse output mode Error output mode OFF mode : Applicable errors are Er0, 1, 2, 4, 6 to 8, 14, and 40.

Parts Replacement Procedure 14 1 XL-OMS0001-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Period and Scope of Warranty 14 7. Parts Replacement Procedure 15 1 XL-OMV0007 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Parts Replacement Procedure 14 1 XL-OMV0017 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

signal power supply 24V 13 CAL 14 E-STOP *1 *1 When the air servo cylinder is operated, turn ON the E-STOP signal.