MXU

Lateral Mounting (Body through-hole) MX MTS l1 Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 12.7 MY M4 x 0.7 2.5 15.6 M4 x 0.7 2.5 20.6 CY When tightening the work on the table with bolts, it should be done while holding the table. If holding the body, it may cause more than allowable moment to the guide, leading to decrease in accuracy.

P

Description Material 1 Body SCS14A (SUS 316) 2 Needle SUS316 L4 3 Lock nut SUS316 4 Valve SUS316 5 Valve guide SUS316, NBR for low temperature L2 L3 6 Spring SUS316 7 Bolt SUS316 8 O-ring NBR for low temperature L5 9 O-ring NBR for low temperature Model Port size D H L1 L2 L3 L4 Note) L5 Mass g MAX. MIN.

IS3000

(When using switch with neon light: 1000 VAC for 1 min.) 50/60 IS3110 (Gasket piping) IS3010-02 (Rc 1/4 thread) How to Order JIS Symbol IS3 0 02 L1 0 0 Pressure display with scale plate Piping method Rc 1/4 thread Gasket piping 0 1 MPa Both MPa and psi Note) Nil P Micro switch load type Indicator light 0 1 Standard Micro load Nil L1 L2 L5 None With neon light/110 VAC With neon light/220 VAC

MHL2

Model/Stroke Width at closing (mm) Width at opening (mm) Max. operating frequency Opening/Closing stroke (mm) Mass (g) Bore size (mm) Model (L1) (L2) (L2-L1) c.p.m MHL2-10D MHL2-10D1 MHL2-10D2 MHL2-16D MHL2-16D1 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 60 20 56 76 280 40 78 118 345 10 40 60 96 156 425 30

Vacuum Regulator

Straight Elbow Size 6 8 1/4" 5/16" Symbol C6 C8 N7 N9 One-touch fitting for IRV20(A) Bottom Bracket Assembly VVQ2000 C6 51A For IRV10(A) P601010-14 For IRV20(A) P601020-14 Fitting type Fitting size Nil L1 Straight Elbow Symbol C6 C8 C10 N7 N9 N11 Size 6 8 10 1/4" 5/16" 3/8" Included Parts No. 1 2 3 Description Bottom bracket Square nut x 4 Phillips screw x 4 Note) No. 1 to 3 are shipped

KS/KX

(mm) Connection thread R Effective area (mm2) Min. port size Weight (g) M D1 D2 L1 L2 A Model Nylon Urethane M5 x 0.8 M6 x 1 KSL04-M5 KSL04-M6 KSL04-01S KSL06-M5 KSL06-M6 KSL06-01S KSL06-02S KSL08-01S KSL08-02S KSL08-03S KSL10-02S KSL10-03S KSL10-04S KSL12-03S KSL12-04S 20.5 21 22 8 9 4 12 10.4 21 16 2.5 3.5 3.5 23.5 23.5 1 8 M5 x 0.8 M6 x 1 12 14 22 21 21.5 23 2.5 3 3.5

17

L1 [Side mounting] Bore size (mm) Non-rotating accuracy MGPM MGPL MGPA Pin hole 12 16 20 25 32 40 50 63 80 100 0.07 0.05 A 0.06 0.04 0.01 A = Catalog dimension (0.1 + L1 x 0.0008) [mm] 0.05 0.03 : To be 0.15 for 80, 100 Note) Displacement by load and self-weight deflection by plate and guide rod are not included. 0.04 0.03 0.03 0.03 [Bottom mounting] B Pin hole L2 Pin hole B = (0.045

, HEAD COVER, RC (PT), ACTUATOR, MY1M GUIDED CYLINDER, L1, 32MM MY1M PART, .75240 lb

Slide Tables MX Series

Lateral Mounting (Through Holes) Lateral Mounting (Tapped Holes) l1 12.7 15.6 20.6 24.0 l1 12.7 15.6 20.6 24.0 l 9.4 11.2 16.2 16.0 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Max. fastening torque in lb (N m) Bolts M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 Model MXH6 MXH10 MXH16 MXH20 22 (25) 45

Compact Electro-pneumatic Regulator Series ITV0000

(mm) 10 9 8 7 6 5 4 3 Manifold stations n L1 L2 2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 8

MGG GUIDED CYLINDER, L1, 32MM MGG PART

2.0

D L1 L2 LPV21/22-mm-T3(A)-m 3.5 2.2 6.8 LPV21/22-mm-T4(A)-m 4.5 2.8 6.6 LPV21/22-mm-T6(A)-m 6.5 3.5 6 4 LPV Series Specific Product Precautions 1 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Stations L1 L2 2 stations 33.5 27.5 11 128 122 12 138.5 132.5 13 149 143 14 159.5 153.5 15 170 164 16 180.5 174.5 17 191 185 18 201.5 195.5 19 212 206 20 stations 222.5 216.5 3 44 38 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 111.5 645 Series 10-V100 Specific Product Precautions 1 Be sure to read before handling.

Flame Resistant

Dimensions L5 D4 Applicable tubing O.D. d H (Width across flats) A L4 D1 L3 D3 L1 M D2 T L2 [mm] Model T H D1 D2 D3 D4 L1 L2 L3 L4 L5 A M Weight [g] AS221F-G01-06W2D G1/8 12 13.2 14.2 14 7.2 23 31 17.6 39.2 1.2 34.7 17 26 AS221F-G01-08W2D 15.2 25.3 32.4 18.5 28 AS221F-G01-10W2D 18.5 32.1 39.2 21 30 AS221F-G02-06W2D G1/4 17 13.2 18.5 17 7.2 25.2 34.4 20.2 42.8 1.2 36.8 17 46 AS221F-G02-08W2D

Pin Clamp Cylinders

Height: 30 mm (LOW type), 100 mm (HIGH type) W H L2 T L1 [mm] Model C(L)KQG32 Compact cylinder type (Guide pin diameter: 12) C(L)KU32 Plate cylinder type (Guide pin diameter: 12) C(L)KQG50 (Guide pin diameter: 13) Clamping height LOW type HIGH type LOW type HIGH type LOW type HIGH type Clamping height H 30 100 30 100 24 54 Body thickness T 50 29 66 Body width W 50 70 66 Body length L1 127

NCQ8

A A1 E1 L1 MM RR1 U1 NZ L NDH10 NX +0.002 0 0.25 -0.004 -0.012 -0.008 -0.016 -0.012 -0.020 -0.012 -0.020 -0.012 -0.020 +0.002 0 0.26 +0.008 +0 056 (9/16") 056 (9/16") 0.24 0.24 0.63 0.63 0.71 0.47 0.63 0.87 0.87 1.10 0.98 0.98 1.18 1.18 1.57 #8-32UNC 0.47 0.41 0.47 0.47 0.63 0.55 0.45 0.55 0.55 0.79 1.10 1.34 1.65 1.65 2.20 0.24 0.24 0.63 0.63 0.79 0.47 0.63 0.87 0.87 1.10 0.83 0.98 1.18

MG

L1 Bore size (mm) Non-rotating accuracy Pin hole 12 16 20 25 32 40 50 63 80 100 + A 0.01 A = Catalog dimension (0.1 + L1 x 0.0008) [mm] : To be 0.15 for 80, 100. Note) Displacement by load and self-weight deflection by plate and guide rod are not included. [Bottom mounting] B Pin hole Dimensions and the related things about auto switch are the same as standard type MGPL series.

Mounting Method: 1 (Gasket Mounting), Load Capacity: 0 (Standard), Port Size: For Gasket Mounting, Indicator Light: L1 (Neon Lamp/110VAC)

Cooling Capacity: 2kW, Temperature Set Range: -20°C to 40°C, Option: -

Cooling Capacity: 1kW, Temperature Set Range: -20°C to 40°C, Option: -