Compact Cylinder with Lock Series CLQ

80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

Plate Cylinder with Lock Series MLU

depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 MLUB25 MLUB32 MLUB40 MLUB50 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 KA H2

Table of Contents

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Process Gas Diaphragm Valve

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Boron11 Trifluoride Chlorine 11BF3 Cl2 Argon Chlorine Trifluoride Ar ClF3 Arsine Carbon Monoxide AsH3 CO Boron Trichloride Carbon Dioxide CO2 BCl3 Boron Trifluoride Germane BF3 GeH4 Halocarbon114 Hydrogen C2ClF4 H2 Halocarbon115 Hydrogen Sulfide C2ClF5 H2S Halocarbon116 Hydrogen Selenide H2Se C2F6 Acetylene Hydrogen

Shuttle Valve/AND Valve with One-Touch Fittings

Dimensions(mm) 1in = 25.4mm Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 10 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 SMC Pneumatics, Inc. 6 SMC Pneumatics, Inc. 7 World Wide Support...

SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

Wiring specifications Grommet type (Lead wire: 0.6 m) Nil Grommet type (Lead wire: 3 m) L Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Without connector CN Analog output is only available in a grommet type.

LFE-OMZ0013

Use the accumulated pulses to obtain the accumulated flow based on the accumulated volume per pulse (page 62). -28No.LFE*-OMZ0013 Hysteresis H_1 (H_2) Hysteresis mode Instantaneous flow n_1 (n_2) Window comparator mode Hysteresis H1(H2) Hysteresis H1(H2) n1H n1L Instantaneous flow (n2H) (n2L) Accumulated increment output mode Count up from "0".

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Applicable bore size SNJ-016C SNKJ-016C 10 16 C1 d C2 d B1 B2 H1 H2 14 17 16.2 19.6 4 4 7 8 8.1 9.2 3.2 4 M10 x 1.0 M12 x 1.0 M4 x 0.7 M5 x 0.8 The applicable mounting nuts are different from those for standard cylinders. 7 B CJ2W-Z Series 10-/1121-/22Double Rod Cylinder 10, 16 How to Order Clean series 10 11 Relief type Vacuum suction type M9BW Z 60 16 L W 2 J D C 10 B M9BW Z 60 16 L

PF-OMM0004_C

P2dH n2dH P2dL n2dL P2AH n2AH P2AL n2AL P2L/n2L P2H/n2H H2 (38 ) tnL/tPL tnH/tPH Ht (40 ) P_2/n_2 H_2 (38 ) tn/tP H_t (40 ) (39 ) 4. [F 2] OUT2 -36No.PF-OMM0004-D 1. [F 2] [oUt2] OUT2 [-] 2. ON-OFF -37No.PF-OMM0004-D 3. a. ([n_2]) 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. [F 2] OUT2 -38No.PF-OMM0004-D c.

IZE11.eng

The descriptions for OUT2 are the same as those for OUT1, under the conditions that [P_1] should be replaced by [P_2], [P1H] should be replaced by [P2H], [n_1] should be replaced by [n_2], [n1H] should be replaced by [n2H], [H_1] should be replaced by [H_2] and [H1] should be replaced by [H2]. Absolute setting is assigned when window comparator is set.

KB

Weight (g) H2 (Hex.) H1 (Hex.) D L A2 A1 M Part No.

ZR

ZR1--CN . 1 pc.

CP95

R H SR (max) d1 I1 (min) 32 5 5.5 30 10.5 6.6 11 14 34 3.3 3 22 10 17 45 10 32.5 40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2

Rotary Table Series MSU

MSUA 1 MSUA 3 MSUA 7 MSUA 20 1 3 7 20 Electrical entry/Lead wire length Grommet/lead wire 0.5m Grommet/lead wire 3m Connector/lead wire 0.5m Connector/lead wire 3m Connector/without lead wire Nil L C CL CN Rotation Symbol Application Rotation Available only with R73, R80 and T79 type connectors Lead wire with connector part nos.

ZSE3/ISE3

Wiring specifications Grommet type (Lead wire: 0.6 m) Nil Grommet type (Lead wire: 3 m) L Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Without connector CN Analog output is only available in a grommet type. Please refer to page 16-4-5 for figure.

ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nozzle diameter C C CN Lead wire length 0.6 m Lead wire length 3 m No lead wire 05 0.5 mm 07 0.7 mm 10 1.0 mm 13 1.3 mm 15 1.5 mm ZL Refer to Table (2) for lead wire with 4-wire connecor.

SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.

CLQ

L1 X C1 H2 Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators d C2 C1 B2 H2 B1 H1 Material: Carbon steel (mm) Material: Carbon steel (mm) Part no. Applicable bore size Part no.