modular-press-e

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6

Modular F.R.L. Pressure Control Equipment

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6

Cylinder with Lock Series CNS

180 290 1/2 3/8 144 144 40 90 63 43 14 19 20 236 118 275 18.5 215 to 1200 (mm) Bore size (mm) GB GL GR K KA M N P Q R S T V VA H ZZ J MA MM 125 140 160 23 25 30 15 31 19 35 1/2 85.5 25 303 87.5 20 23 110 427 M14 x 1.5 M12 x 1.75 M30 x 1.5 28 30 30 15 31 19 35 1/2 93.5 25 343 95 20 28 110 473 M14 x 1.5 M12 x 1.75 M30 x 1.5 35 35 35 17 36 22 39 3/4 104 25 396 109 25 35 120 536 M16 x 1.5 M12

Series VQ Base Mounted Metal Seal/Rubber Seal

64 Single Rubber seal VQ1 5.4 (0.3) 15 or less 20 or less Metal seal VQ1210 3.6 (0.2) 10 or less 13 or less Double Rubber seal VQ1211 5.4 (0.3) 15 or less 20 or less Metal seal VQ1310 3.6 (0.2) 20 or less 26 or less Closed center VQ1000 Rubber seal VQ1311 5.4 (0.3) 25 or less 33 or less 78 Metal seal VQ1410 3.6 (0.2) 20 or less 26 or less Exhaust center Rubber seal VQ1411 5.4 (0.3) 25 or

Fluoropolymer Piping Equipment

LQ1P41-R3 12 6 29 20 26 17 7 20.5 43.5 82.1 39 23 3.6 8 39 24 LQ1P51-R2 19 10 29 20 26 17 7 20.5 43.5 82.1 39 23 7.4 8 39 24 Inch Size Model A side B side E1 E2 H1 H2 J K L1 L2 M1 M2 Min. port size t W1 W2 Applicable tubing O.D.

LEC-OM02704CN

[] 2.5 1.2 (3) [] 20 1 [J] 5.6 22 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

CLS

FT FX 107 145 75 18 145 110 136 115 90 90 90 115 115 140 190 100 230 16 58 110 M14 x 1.5 50 50 56 63 63 71 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59 59 59 70 74 86 15 15 17 20 20 25 47 47 53 60 60 67 43 43 43 48 48 60 31 31 36 41 46 56 14 14 14 17 17 20 19 19 22 26 26 30 19 19 19 24 24 29 14 20 20 25 25 30 Up to 1000 3 5 30 46 114 M14 x 1.5 161 78 18 160 110 146 128 212 112 255 16 64

Modular Type Air Filter Series AF

3) Body size With bracket B AFM20 to 40 Port size C With bowl guard AFM20 Thread type Symbol 20 30 40 J Note 5) Float type auto drain (N.C.)

Refrigerated Air Dryers

, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15

39

300.025 250.03 1500.05 300.05 250.03 1000.05 300.05 3 12.5 4.4 12.5 P Q R P Q 45 R38 M8 x 1.25 120.8 R38 1 1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 NAAMS code ACA031M ACA032M ACA033M ACA034M ACA035M ACA036M NAAMS code ACA043M ACA044M ACA045M ACA046M ACA047M ACA048M A B C D E F G H I J A B C D E F G H I J Part no.

Cylinder with Lock Series MNB

40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6

Cylinder with Lock

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 20 MWBW Series Dimensions Basic: MWBWB (Rc, NPT, G) BP GD GB GB Unlocked when pressurized GC GD GB GD (Rc, NPT, G) P Rod side cylinder port GC GA (Rc, NPT, G) P Head side cylinder port GE W GE W GE W (Rc, NPT, G) BP GF GA Manual lock release bolt Width across flats KC Cushion valve 32 4 x J Width across flats KA Thread depth MC Width

SFOD-OMT0009CN

1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250 150 350 250 200 [mm/s] 20 10 20 10 () [mm/s] 25 13 27 14

Series MXP Precision Air Slide Table

10 J 6 Mounting base side B D 10 9.5 Across AA MXP10-20 Without magnet and switch rail 2-M30.5, 3.5 deep 2-M20.4, 3 deep For magnet mounting For rail mounting 8 2.5 4.7 6-M30.5 15 15 4 deep L (mm) Model G H J K L M N S V W Z MXP10-10 8 32 52.4 20 20 21 6.5 10 44 40 60 MXP10-20 20 50 82.4 36 36 39 7.5 20 74 65 90 168 168 Precision Air Slide Table Series MXP Dimensions 12 MXP12 Scale:55%

Prevents Micro-Bubbles

S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5

Vacuum System Peripherals:

Series ZM 13-14-20 4.

CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX

MXF

20 MXF8-10 0.01 0.02 0.01 MXF8-10 0 0 0 10 20 30 40 10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60

MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

70astamb1

with double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 M10 x 1.25 16 19 24 34 34 M10 x 1.25 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20 30 30 12 M14 x 1.5 M14 x 1.5 12.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M18 x 1.5