Compact Cylinder with Air Cushion Series RQ

Hs A B A B 32 to 50 D-A73C D-A80C D-J79C D-A79W D-F7W D-F7V Approx. Hs Approx.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

(Note 3) 0 0. b JOG operation, positioning operation, programmed operation, DO forced output. (Note 1) # #. b (Note 3) Test operation mode Motor-less operation # #. d # #.

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I r F I l f f i r ] Pilot valve specifications I I il*d*drffir -.-'l I lgh pr;iirr" lype, 15W coil I I at"hirg ly,pe I ),t.rra o tor. lW coil I o\,, walr rype 0 5W;o I a a ' t I o " o o c i o d o u b l e ' o l F n o ' o o v d a I 6 B v o n d o o l p d . " o I ' o' 1 .'|o-c I Coil voltages EtrT 'Consull SMC for available volages.

MB1

D D D D B B B Specifications and dimensions other than the above are the same as the standard type.

MHZ

MHZ MHF MHL MHR Hysteresis Hysteresis Switch operating position (ON) Switch operating position (ON) MHK Switch reset position (OFF) Switch reset position (OFF) MHS Hysteresis (mm) D-F9W(V) D-F9BAL D-Y7W(V) D-Y59A/B D-Y69A/B D-Y7P(V) MHC D-M9(V) D-F8 ON position set when red light is turned on ON position set when green light is turned on ON position set when red light is turned on ON position

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

CNS

D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160

Compact Cylinder/Guide Rod Type Series CQM

Hs A B (mm) Proper Auto Switch Mounting Position D-A72/A7H/A80H D-A73C/A80C/F7 D-J79/F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL/F7BAVL Auto switch model D-A73 D-A80 D-F7NTL D-A79W D-P4DWL A A 9.5 13.5 11.5 14 18 21.5 B B 6.5 9 12 15 18.5 24.5 A 14.5 18.5 16.5 15 19 22.5 B 11.5 14 17 16 19.5 25.5 A 6.5 10.5 12 11 15 18.5 B 3.5 6 8.5 12 15.5 21.5 A 9 7 9.5 13.5 17 B 4.5 7.5 10.5 14 20 Bore size

CL

MLU 40 50 63 80 100 125 140 160 Bore size (mm) Bore size (mm) Auto switch model CA-L06 CA-L05 CA-L10 CA-L04 CA-L08 Foot style Rod side 40 50 63 80 100 125 140 160 ML1C CS1-L12 CS1-L14 CS1-L16 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6/B59W D-G5/K59/G5BAL D-G5W/K59W D-G59F/G5NTL D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL CA1

Air Slide Table Series MXQ

Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E Model A 10 20 30 40 75 100 125 150 10 20 30 125 75 100 40 50 150 50 B MXQ6 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 10 MXQ8 26 2 2 6 10 25 12 12 16 20 36 35 11.5 MXQ12 34.5 34.5 18.5 8.5 8.5 15.5 15.5 28.5 18.5 18.5 25.5 44.5 44.5 25.5 15.5 MXQ16 27.5 45.5 45.5 24.5 14.5 14.5 14.5 20.5 34.5 24.5 24.5

21

. 6.8 to 11.5) D-C73C/C80C D-H7C Auto switch Hs Auto switch Hs B A B A 13 Series CM3 Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height Auto Switch Proper Mounting Position (mm) Auto switch model D-A3lA D-A44A D-G39A Note 2) D-K39A Note 2) D-M9l D-M9lW D-A9l D-B59W D-H7C D-H7BAL D-H7NF D-G5NTL D-B54 D-B64 D-C73C D-C80C A A B A B B B A B A B A B A B Bore

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Series Size Rotating angle Vane type Applicable auto switch Angle adjustment screws 1 D-9, D-T99 D-9A, D-S99, S9P 90 High precision type MSUA 3 Single vane 7 Table unit D-R73, D-T79 D-R80, D-S79, S7P 180 Auto switch capable 20 1 D-9, D-T99 D-9A, D-S99, S9P Single vane Since switches can be moved anywhere on the circumference, they can be mounted at positions which accommodate the specifications

VZ5000

(b) Lever B side coil Black White Connector terminal no. 1 station (11 stations) A side coil D-sub connector Black B side coil Black White (3) Remove the housing cover from the D-sub connector portion of the SUP/EXH block assembly.

High Power Cylinder:

D-B5 D-B6 D-A3l D-A44 D-G39 D-K39 D-B59W D-C7 D-C8 D-H7l D-H7lW D-H7lF D-H7BAL D-B5/B6 D-B59W D-G5NTL D-A3l D-G39 D-K39 D-A44 D-C73C D-C80C Bore size (mm) A B A B A B A B A B A B A B HS HS HS HS HS 20 20.6 9 14.6 8.5 14.1 14 10.5 16.1 12.5 18.1 11.9 17.5 19.6 15 24.5 27.3 62 69.7 27 25 20.6 9 14.6 8.5 14.1 14 19.6 10.5 16.1 12.5 18.1 11.9 17.5 15 27 29.8 64.5 72.2 29.5 32 22.6 8.9 16.6 8.4

Pin Clamp Cylinder Series CKQ/CLKQ

D-A73CD-A80C D-F7WV D-F7BAL D-F7BAVL D-F7WD-J79W D-F7NTL,D-F79F A 11.5 46.5 D-F7V D-J79C D-F7 D-J79 D-A9 D-A9V D-F9W D-F9WV D-M9V D-M9 D-A79W D-A72 D-A73 D-A80 D-F9BAL D-P5DWL D-P5DWSC Model A 8.5 43.5 A 11 46 A 13 48 B CKQ CLKQ B B B B B B A 14 49 B B A 14 49 B A 14 49 B A 7 42 A 10 45 A 11.5 46.5 A 11 46 19 or more 17 or more 33 or more 27 or more 28 or more 27 or more 22 or more 30 or

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

D 5 D 5 Individual SUP block assembly Individual EXH block assembly U side D side U side D side B A B A B A B A B A B A B A B A P P R R P R [When supplying different pressure only to an intermediate valve] Indicate the arrangement of the individual SUP block assembly and SUP blocking disk on a manifold specification sheet.

Electric Actuator

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Stroke (mm) Model 200 300 400 500 700 600 800 900 1000 1200 1500 2000 3000 LEJB40 LEJB63 D ) D D D ) ) D D D D ) ) D D ) ) D ) D D D D D 3: Strokes other than those shown above are produced as special order (1 mm increments). For auto switches, refer to pages 19, 20.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 34 7.5 13 2-M4 clamp screw 9 EXH outlet Release for switching connector direction Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) D side U side Stations 1 2 3 4 5 6 7 8 n 9 C8: 3(R) port C8: 1(P) port For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 P 1 2 2 2 2 2 2 2 29.5 13 P = 11.5 58 43.5 2n-C3

MK

D-A7lH, A80H D-A73C, A80C D-F7l, J79 D-F7lV, J79C D-A79W D-F9l D-F9lV D-F9lWV D-F9lW D-F9BAL D-P5DW D-A9l D-A9lV D-A7, A8 Model B 6.5 7 6 8.5 11.5 14.5 A 28.5 29 33 24 28.5 28.5 B 7 7.5 6.5 9 12 15 B 4 4.5 3.5 6 9 12 B 11 11.5 10.5 13 16 19 B 4.5 7.5 10.5 B 5 7.5 10.5 13.5 B 9 11.5 14.5 17.5 A 34.5 25.5 30 30 B 8 10.5 13.5 16.5 A 19.5 24 24 A 28 28.5 32.5 23.5 28 28 A 25.5 26 30 21