AC Servo Motor Driver LECYM/LECYU Series Compatible LEF Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500
Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials
L (mm) Refer to page 304 for deflection data. 226 2 Phase Stepper Motor/With Motor Brake Series LXP Dimensions/LXPB2BC Scale: 30% The dimension inside [ ] shows the location at which the home position switch operates. 9 4-M6 x 1 depth 10 Section C 10 [16.5] 7.5 21.5 10 Section F 40.5 4.5 4-M6 x 1 B 4-9.5 4-5.6 +0.1 0 1 30.5 34 10 47.5 5.4 8.4 34 0.02 50 78 91 94 64 26 B 30 D 4H9 +0.030
water flow rate [L/min] Facility water flow rate [L/min] HRR030-W 25 15 HRR024-W 20 15 10 10 HRR018-W 5 5 HRR012-W 0 0 0 10 20 30 40 0 10 20 30 40 50 Facility water inlet temperature [C] Facility water inlet temperature [C] * This is the required facility water flow rate at the circulating fluid rated flow and the cooling capacity listed in the Cooling Capacity specifications.
R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.
Construction 0 P1 = 0.3 MPa Outlet air atmospheric pressure dew point (C) 10 Refer to pages 14-19-30 to 31.
(10V/10pulse) CCW CCW 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] 10[V] 10[V] CW CW A (124) (10V/1Mpulse) B (124) (10V/10Mpulse) CCW CCW 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] 10[V] 10[V] CW CW 5 25 5 C (124) (10V/100Mpulse) D (3) CCW 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 10[V] CW E 2(45) CCW 8[V] 0 8[V] CW 1. 2. () 3. 400V8V/800V 4. 5.
0.25 to 0.7 Ambient and fluid temperature (C) 10 to 50 (No freezing.
(M) NC(D)Q8WA-(C)(M) NC(D)Q8A-S(M) NC(D)Q8A-T(M) Both Ends Tapped (Inch) O1 R Bore size Remarks R R O1-Thread 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2") 250 (2-1/2") #4-40UNC 0.34 Through tap for NCQ8A056-012(C) #6-32UNC 0.34 Through tap for NCQ8A075-012(C) #6-32UNC 0.50 Through tap for NCQ8A106-012(C) #10-24UNC 0.50 Through tap for NCQ8A150-012(C) #10-24UNC 0.53 Through tap
[dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Weight (kg) Plug-in Non plug-in VF 2.6 2.8 2.6 2.8 2.5 2.7 2.6 2.9 2.7 2.9 2.8 3.1 2.8 3.1 2.3 2.6 2.3 2.4 2.7 2.8 3 8 0.20 0.22 0.20 0.22 0.14 0.22 0.15 0.15 0.22 0.22 VFS4110 11 12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000
MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.
MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.
8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting
Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max
across flats B1 ZZ + 2 Stroke S + Stroke NA C 8 x J Female rod end thread depth A1 MM ZZ + Stroke H (mm) Bore size Stroke range A AL B1 C D E F GA GB H H1 I J K KA MM NA P 20 Up to 125 18 15.5 13 14 8 12 2 12 10 35 5 26 M4 0.7 depth 7 5 6 M8 x 1.25 24 1/8 25 Up to 200 22 19.5 17 16.5 10 14 2 12 10 40 6 31 M5 0.8 depth 7.5 5.5 8 M10 x 1.25 29 1/8 32 Up to 200 22 19.5 17 20 12 18 2 12 10
pressure differential [MPa] Cv JSXD31-Am02 410 3/8 9.2 2.4 JSXD31-Am03 410 1/2 9.2 2.4 JSXD31-Am04 410 Aluminum 1/4 8.5 0.35 2.0 30 10 1/4 8.5 0.35 2.0 1.6 1.9 JSXD31-C Sm02 500 3/8 9.2 2.4 2.0 2.4 JSXD31-C Sm03 500 1/2 9.2 2.4 2.0 2.4 JSXD31-C Sm04 500 Brass Stainless steel 0.02 1.0 Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts 40 Brass Stainless
Valve Leakage Rate Fluid and Ambient Temperature Internal Leakage 20 to 60 Ambient temperature (C) Fluid temperature (C) 10 Note) to 60 Seal material Leakage rate (Air) Note 1) VXD23 to 26 (8A to 25A) VXD27 to 29 (32A to 50A) 15 cm3/min or less (AIuminum body type) 15 cm3/min or less (Resin body type) 2 cm3/min or less (Metal body type) 10 cm3/min or less Note) Dew point temperature: 10C
S and Z types 24VDC: 7% to +10% 12VDC: 4% to +10% T type 24VDC: 8% to +10% 12VDC: 6% to +10% 659 10-SYJ300 3 port / Pilot operated solenoid valve Flow characteristics / Weight C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv 12(PA) 23(AR) Valve model Flow characteristics Weight (g) Note) Type of actuation Port size Effective area (mm 2) L/M plug connector M8 connector Grommet 10-SYJ312 10-SYJ322 10
[mm] Size A B C D E (g7) F (h9) G1 G2 J K L M N P Q R S T V1 V2 W X Y Q1 Q2 Q3 10 29 15 8 14 40.004 0.016 9 0 0.036 3 1 5 9 0.5 9.5 9.5 24 M3 x 0.5 depth 6 6 M3 x 0.5 14 3.6 30 37 19.8 8.5 14.5 15 34 20 9 18 50.004 0.016 12 0 0.043 4 1.5 6 10 0.5 14 10 29 M3 x 0.5 depth 10 6 M3 x 0.5 depth 5 M3 x 0.5 19 7.6 39.5 47 21 11 17 20 42 29 10 20 60.004 0.016 14 0 0.043 4.5 1.5 7 10 0.5 20 13
Red ON Remote malfunction OFF The US1 (for control / input) power supply is OFF Supply 24 VDC +/-10% for US1 (for control / input) power source. -67No.EX-OMZ0016-C LED status Problem No.