ASR

Note3) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Instantaneous flow: L/min cfm Accumulated flow: L ft3 L3 IO-Link/ NPN/PNP Analog 1 to 5 V Analog 0 to 10 V*3 ZS-33-D ZS-33-F L4 IO-Link/ NPN/PNP Analog 4 to 20 mA + ZS-33-D *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

VZ5000

-L-01 M plug connector (M) VZ5220-M-01 (Lead wire length) 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ5220-D-01 Built-in One-touch fittings VZ5220--C6 C8 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-58 5 Port Solenoid Valve Body Ported Series VZ5000 3 Position

3 Port Solenoid Valve Series VQ100

Enter in order starting from the first station on the D side.

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

Clamp Cylinder with Magnetic Field Resistant Auto Switch (Rod Mounting Type) ø 40, ø 50, ø 63 CKG1/CKP1 Series

Type Applicable cylinder series Auto switch model Applicable magnetic field Electrical entry Wiring (Pin no. in use) Lead wire length Indicator light Load voltage Applicable load D-P3DWASC D-P3DWASE D-P3DWA D-P3DWAL D-P3DWAZ D-P4DWSC D-P4DWSE D-P4DWL D-P4DWZ D-P79WSE D-P74L D-P74Z 2-wire (34) Pre-wired connector 0.3 m 2-wire (14) 0.5 m AC magnetic field (Single-phase AC welding magnetic field

Compact Cylinder Type Pin Clamp Cylinder C(L)KQG32 Series ø 32

(Unclamping side) With lock Bore size Nil Without lock L With lock 32 32 mm Auto switch type Nil Without auto switch (Built-in magnet) C D-P3DWASC E D-P3DWASE N D-P3DWA L D-P3DWAL Z D-P3DWAZ Guide pin diameter Mounting surface position (viewed from top) For guide pin diameter, refer to Table 1 below.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.

Digital Flow Switch (Integrated display type)

(example: If the flow switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) x1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V).

Compact Manifold Regulator Series ARM5

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

KA

(mm) Applicable fitting size d 3.2 L Weight (g) D A M Model Urethane Soft nylon Applicable tubing KAR23-04 9.6 4 33.5 34.5 36.5 18.5 18.5 17.5 18 15.5 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 KAR04-10 39.5 37 39.5 10 3.3 2.5 KAR06-08 8 18.5 KAR06-10 6 12.8 KAR06-12 42 4.7 12 20 17 10 3.0 13.1 13.1 Applicable fitting size d 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2

MHx-OMY0001

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

A Input/output specifications 22 30 62 70 NPN open collector 2 output + Analog output Bracket D NPN open collector 2 output + Auto shift input Refer to the dimensions for the difference between brackets A and D. D PNP open collector 2 output + Analog output PNP open collector 2 output + Auto shift input Optional Note) Auto shift input is used for the auto shift function.

Rotary Table

Recommended tightening torque Auto switch model Recommended tightening torque [Nm] D-M9 0.05 to 0.15 D-M9A (Water resistant) 0.05 to 0.10 D-A9 0.10 to 0.20 Fig. 12 Set screw Auto switch -38- Auto switch proper mounting position at rotation end Table 16. Auto Switch Operation range / Hysteresis / most sensitive position B Adjustment bolt Adjustment bolt A B Table 15.

Servo Motor Controller (24 VDC)

Nil Mountable D Caution The controller and actuator are factory set Confirm the combination of the controller and the actuator is correct. (1) Check the actuator lable for model number.

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4 sec.)

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BA Bore size (mm) A C 16.5 (15) 23.5 (22) 34 (32.5) 46 (44.5) 46 (44.5) 56 (54.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 18 25 35.5 48 48 58 D 2 5 2 4.5 6.5 6.5 C 10.5 17.5 28 40 40 50 D