Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Applicable Stroke Table : Standard Model Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] LEFS16 50 to 500 LEFS25 50 to 600 LEFS32 50 to 800 LEFS40 150 to 1000 * Please consult with SMC for non-standard strokes as they are produced as special orders. The actuator and controller/driver are sold as a package.

AK1000

intermediate flow Series AK1000 High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: Stainless steel and Brass available Hastelloy internals available for corrosion resistance How to Order Port Number q w e r t AK10 01 4PL 4 4 S 0 0 Delivery pressure Code Connections (Inletq, Outletw) Delivery pressure Delivery pressure 5 to 150

Soft start up valve with lock out

psi (0.2 to 1 MPa) A1 A2 A3 45 (0.3) Ambient and fluid temp. 32 to 140F (0 to 60C) 30 (0.2) 113 20 122 37 61 1(P) to 2(A) 2(A) to 3(R) Effective area (mm2) 132 24 141 49 76 15 (0.1) 1.14 (0.64) 1.63 (0.74) 2.21 (1.00) 4.19 (1.90) 4.06 (1.84) Weight manual/solenoid lb (kg) 0 15 (0.1) (0.2) (0.3) (0.4) (0.5) (0.6) (0.7) (0.8) (0.9) (1.0) 30 45 60 75 90 105 120 135 150 Weight manual lb (kg)

AZ1000

Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150

Air Cylinder Short Type Standard: Double Acting, Single Rod CG3 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

CG5-S

, 200 201 to 350 20 Minimum stroke for mounting auto switches 301 to 400 25 301 to 450 32 Number of auto switches Model 301 to 800 40 25, 50, 75, 100, 125, 150, 200, 250, 300 2 pcs. 1 pc. 301 to 1200 50, 63 D-G5BA 15mm 10mm 80 301 to 1400 Refer to page 15 for details. 100 301 to 1500 Note 1) All non-standard strokes are produced upon receipt of order.

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Manufacture of intermediate strokes at 1 mm intervals is possible.

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

.: GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) REB 236 IN 71 118 165 20 10 314 OUT 94 157 220 REC 378 IN 113 189 264 25 12 491 OUT 147 245 344 CY CY Intermediate Stroke CX Installation of spacer on standard stroke body. Refer to page 1168 for standard model no. Intermediate strokes at 1 mm intervals are available by using spacers with standard stroke cylinders. Method Model no.

Series CM2X-Z 10- ø20, ø25, ø32, ø40 Low Speed Cylinder 11- Double Acting, Single Rod

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 X L 40 150 Z M9BW Low speed cylinder Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Auto switch Nil Without auto switch For applicable

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Standard Nil A Both ends adjuster P Note) Axial piping CS Extension

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard Nil P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

CLG1

, 200 201 to 350 D25 32 40 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200, 250, 300 -X Intermediate stroke is available, too.

CM2 Series ø 20, ø 25, ø 32, ø 40 Air Cylinder: Standard Type Double Acting, Single Rod

CM2 A B Z 40 150 CDM2 With auto switch M9BW 150 A B 40 Z Port thread type Number of auto switches Rod end bracket With auto switch (Built-in magnet) Nil Rc TN NPT TF G Nil None V Single knuckle joint W Double knuckle joint Mounting Nil 2 pcs. S 1 pc. n n pcs.

Cylinder with Lock Double Acting, Single Rod Series CNG ø20, ø25, ø32, ø40

, 200 Data D-C7/C8 D-B5/B6 D-H7 D-G5NTL 1500 10 mm 15 mm 25, 50, 75, 100, 125, 150, 200, 250, 300 15 mm 20 mm Note 1) Intermediate strokes other than the above are produced upon receipt of order.

CYV

Rodless Cylinder for Vacuum Series CYV 15, 32 How to Order MX CYV 15 200 MTS MY CY Standard stroke Bore size 15 32 15 mm 32 mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) MG 15, 32 CX DSpecifications -X 15 32 Bore size (mm) 20Atmosphere to 1.3 x 10-4 Pa (ABS) Operating environment pressure Air/Inert gas Operating atmosphere Data Air/Inert gas Fluid

Bag Filter FGF Series

FN Number of elements Nominal filtration accuracy Note) Element size Number of elements 1 pc included (FGF1) 3 pcs included (FGF3) 5 pcs included (FGF5) Symbol 1 3 5 EB ES Element material (Polyester) Symbol Nominal filtration accuracy (m) Element size 190 x L440 190 x L770 Symbol A B 005 010 025 050 100 5 10 25 50 100 Port size Port size Rc2 100(4B)JIS10KFF 150(6B)JIS10KFF Applicable model

FH99

(Including O-ring for element) FH FH With relief valve Without relief valve Model Element size 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) HOW FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 65 x 90 82 x 133 104 x 177 104 x 177 132 x 212 132 x 212 155 x 193 EM520-105N EM620-105N EM720-105N EM820-105N EM920-105N

G15/G27

Symbol Outside diameter 15 15 27 26 Max. display pressure Symbol Unit 1.0 MPa 1.0 MPa, 150 psi 10 (1) P10 (1) (2) Note 1) Pressure other than 1.0 MPa is not available. Note 2) This symbol must be used with Option X30. 645

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series RoHS How to Order 100 A 20 HRS Option Cooling capacity 100 10 kW 150 15 kW Cooling method Nil None A With caster adjuster-foot B With earth leakage breaker B1 With earth leakage breaker with handle K Note) With uid ll port A Air-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.