High Vacuum Angle Valve

70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 H B A G *1 The E dimension applies when the heater option is included.

CL

Fine lock series (Series CLJ2/CLM2/ CLG1) Maximum load at horizontal mounting: 70% or less of the holding force (Maximum static load) for spring lock Maximum load at vertical mounting: 35% or less of the holding force (Maximum static load) for spring lock Lock-up series (Series CL1) Maximum load at horizontal mounting: 50% or less of the holding force (Maximum static load) Maximum load at

Electric Actuator Miniature Rod Type Miniature Slide table Type

%] Duty ratio (%) Pushing time (minute) 70 or less 100 LEPY10 LEPS10 Compact 80 70 10 100 50 5 7.4 Precaution on maintenance Caution 1.

Electric Slide Tables

LES25/Step Motor 200 180 160 140 120 100 80 60 40 20 0 70 50 30 Lead 8: LES25K Force (N) Lead 16: LES25J Set value of pushing force [%] Step 2 Check the set value of pushing force.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

The load factor for each direction can be found as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 1000 1000 1000 Lz 800 800 800 600 600 600 L1 [mm] L3 [mm] L2 [mm] 400 400 400 Lx Ly 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 8 LEKFS Series Battery-less Absolute (Step

99

100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100

Compressed Air Preparation Filter

50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

100

rate Air consumption Air consumption 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Supply pressure [MPa] Supply pressure [MPa] Standard supply pressure: 0.33 MPa (Without valve) 0.35 MPa (With valve) Time to Reach Vacuum Tank capacity: 1 L Flow Rate Characteristics 100 90 80 70 60 50 40 30 20 10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa

JXCx-OMT0034CN

ID Bit[70] 3 RWrn 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWrn+1 1) Bit[F8] 0 Bit[70] H RWrn+2 1) 2 065500 mm/s Bit[F8] L Bit[70] H RWrn+3 1) 2 0300 % Bit[F8] L Bit[70] 3 RWrn+4 1) Bit[F8] 2 ID1 4 2147483647 0.01mm Bit[70] 1 RWrn+5 1) Bit[F8] 0 Bit[70] 0 0255 RWrn+6 1) Bit[F8] 1 0255 4 Bit[70] 2 0255 RWrn+7 1) Bit[F8] 3 0255 RWrn+8 IF (ID=1) ID2 RWrn+917 ID1 ID3 RWrn+1826

Soft Start-up Valve

2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AVA4000-04--A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AVA5000-06,10--A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 -30- Lockout type (Manual operation): AVL00---A (mm) Dimensions Standard specifications Port size A B C D E1 E2 F G H Model 1(P) 2(A) 3(R) AVL2000-02--A 1/

Air cylinder

(Same side) 90+100(n2) n=2, 4, 6, 8 100+100(n2) n=2, 4, 6, 8 105+100(n2) n=2, 4, 6, 8 110+100(n2) n=2, 4, 6, 8 65 1 switch 60 75 80 85 70 70 2 switches (Different side) 75 80 85 2 switches (Same side) 75 80 85 70+30(n2) n=2, 4, 6, 8 Other qty. (Different side) 75+30(n2) n=2, 4, 6, 8 80+30(n2) n=2, 4, 6, 8 85+30(n2) n=2, 4, 6, 8 D-A44 70+50(n2) n=2, 4, 6, 8 Other qty.

LX

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

IDU/IDF

P N M L K J I H G F E D C A B Model Port size 70 65 580 580 470 317 289 363 157 77 405 (450) 131 (85) 152 630 570 260 620 R 3/4 IDF11C/11D 70 65 580 580 470 337 309 383 207 77 405 (450) 131 (85) 175 680 620 280 620 R 1 IDF15C/15C 70 30 700 700 600 351 323 398 199 642 405 (530) 98 183 760 680 295 750 R 1 IDF22C/22C1 70 30 776 780 680 376 348 423 249 722 405 (610) 98 208 810 730 320 830 R 1

LX

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

CNA

(PT)P Across flats B1 Cylinder port at head side Cylinder port at rod side MM GL1 GL GR E D Q T H1 AL A H S + Stroke ZZ + Stroke N K F M M BN W V lC lB With rod boot e 8 f l ZZ + l + Stroke h + l (mm) Bore (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 X 1.25 6 14 to 500 35 32 70

Cylinder with Lock

RY RT (mm) Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H H1 J K Up to 800 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 50 16 12 12 10 51 8 M8 x 1.25 6 Up to 1200 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56 20 13 15 12 58 11 M8 x 1.25 7 Up to 1200 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 65 20 18 12 15 58 11 M10 x 1.25 7 Up to 1400 40 37

Cylinder with Lock Series CLS

M40 x 1.5 125 42.5 54 RR1 8 70 M45 x 1.5 125 42.5 54 CL1 9 86 M56 x 2 160 53 81 Knuckle pins and cotter pins are included.

IDX-OM-Y002

IDF60/70/80/90 Series 9.1 Safety instructions for use 9-1 IDX-OM-Y002 Chapter 9 Option M 9.2 Specifications Motor type auto drain (ADM200) is installed instead of the float type auto drain (standard). Table 1.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

-XB19 70 182 152 CXS32-75-XB19 75 187 157 70 CXS32-80-XB19 80 192 162 CXS32-90-XB19 90 202 172 CXS32-100-XB19 100 212 182 7

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.