Pressure switch for energy-saving control ejector with N.O. type valve

In case of P_1-60 kPa, enter 45 to H_3. (The equation will be changed to P_1H_3-60-45-105, so the vacuum pressure does not reach the point where the energy-saving function is triggered.) * The minimum value of P_1H_3 is -105.

ZQ-OM01401

. +2 +5 +20 Assy +25 +45 +50 [g] ZZQ101-BSB 115 ZZQ101-BSC 130 ZZQ101-BPB 150 ZZQ101-BPC 155 ZZQ101-OB 105 ZZQ101-OC 120 1 +2 (x ) + () + (1 x ) ZQ1-V114-5LU-A ZQ1-V124-5MU-A ZQ1-VQ110L-5L-A / DC24V -10 to 10 (%) 0.4W 1W L M L ( 2 1.7mm 0.2 to 0.33mm ) V100VQ100 33 - No.ZQ-OM01401-B 9.4 ZSE10 [kPa] 0 to -101 -100 to 100 [kPa] 10 to -105 -105 to 105 [kPa] 500 [kPa]

ZQ-OM01601

.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 44 - No.7 Yes No No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 No.15 45 - No.

IDX-OM-U021

45 45 2-1 IDF100150F 2 1 IDX-OM-U021 2 2-2 2-2-1 (1) (85%) () B C 245050 () 2000m ) (2) 2-2 IDF100150F 2 2 IDX-OM-U021 2 2-2-2 P.6-2 6.3 IDF-AB501 14 1 1 1 4 5 3 2 1 600mm 600mm 600mm 600mm 600mm 2-2 IDF100150F 2 3 IDX-OM-U021 2 2-2-3 IDF100F-30 () 2-2 IDF100150F 2 4 IDX-OM-U021 2 2-2-4 60 60 IN OUT 2-2-5 10mm ( 2-2 IDF100150F 2 5 IDX-OM-U021 2 2-2-6 2-2

IDX-OM-Z004

45 45 IDF100150F-W 2.1 2 1 IDX-OM-Z004 2 2.2 2.2.1 (1) (85%) () C 245050 () 2000m ) (2) IDF100150F-W 2.2 2 2 IDX-OM-Z004 2 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 600mm 600mm 600mm 600mm 600mm 1 2 IDF100150F-W 2.2 2 3 IDX-OM-Z004 2 2.2.3 60 60 IN OUT 2.2.4 40 Y IDF100150F-W 2.2 2 4 IDX-OM-Z004 2 () () Y () 2.2.5 10mm ( IDF100150F-W 2.2 2 5 IDX-OM-Z004 2 2.2.6

IDX-OM-V020

Coefficient factors Inlet air temperature (oC) 5 to 25 30 35 40 45 50 55 60 65 1.42 1.15 1.00 0.71 0.62 0.50 0.40 0.33 0.21 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 to 1.6 0.71 0.75 0.82 0.89 1.00 Ambient temperature (oC) 2 to 25 30 35 40 45 1.0 0.85 0.80 0.73 0.62 Calculation example: The air flow capacity when the dew point of IDFA60 is set to 10 oC under the following conditions <

IDX-OM-U022

45 45 IDFA100F150F 2 1 2.1 IDX-OM-U022 2. 2.2 2.2.1 (1) (85%) () B C 245050 () 2000m ) (2) IDFA100F150F 2 2 2.2 IDX-OM-U022 2. 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 1 4 5 2 3 1 600mm 600mm 600mm 600mm 600mm 1 IDFA100F150F 2 3 2.2 IDX-OM-U022 2. 2.2.3 60 60 .

IDX-OM-W019

F (7.2C) 11 SCFM (19 m3/h) 16 SCFM (27 m3/h) 26 SCFM (45 m3/h) 43 SCFM (74 m3/h) 62 SCFM (106 m3/h) 80 SCFM (136 m3/h) At Expected Outlet Press.Dew Point of 50 F (10C) 12 SCFM (20 m3/h) 17 SCFM (28 m3/h) 28 SCFM (47 m3/h) 45 SCFM (77 m3/h) 65 SCFM (110 m3/h) 86 SCFM (147 m3/h) Operating Pressure 100psig (0.7MPa) Rated Conditi on Inlet Air Temperature 100 F (37.8C) Ambient Temperature 100

IDX-OM-W020

F (7.2C) (19 m 3/h) (27 m 3/h) (45 m 3/h) (74 m 3/h) (106 m 3/h) (136 m 3/h) 17 SCFM 28 SCFM 45 SCFM 65 SCFM 86 SCFM 12 SCFM 50 F (10C) (20 m 3/h) (28 m 3/h) (47 m 3/h) (77 m 3/h) (110 m 3/h) (147 m 3/h) 100psig (0.7MPa) 100 F (37.8C) 100 F (37.8C) 115V 60Hz 41-122 F (5-50C) 22psig (0.15MPa) 150psig (1.0MPa) () 36-104 F (2-40C) (85%) () 1 AC115V10% 60Hz (Note3) (2) 2.7A 3.0A

PSxx-OML0002CN

. <> [F 6] [FSC] 1 [F 6] -34No.PS-OML0002CN-G [F 7] 30 <> [F 7] [F 7] 30 () (ON) ON OFF ON -35No.PS-OML0002CN-G [F 8] <> [F 8] [F 8] 0 45 -36No.PS-OML0002CN-G [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 38 -37No.PS-OML0002CN-G 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 7 OUT2 8 OUT2 NPN2 PNP2 9 OUT2 10 OUT2 11 12 13 14 15 16 2 -38No.PS-OML0002CN-G [F97]

PSxx-OMM0006CN

(G )JIS B0202(ISO228-1) ISO1179-1(G ) () ISO1179-1 ISO1179-2 ISO1179-3 ISO1179-4 () ISO16030(G )()ISO16030 () [V] [mA] A B C 0.0-101.3 kPa 0 -101.3 kPa -100.0100.0 kPa -100 kPa 100 kPa -0.1001.000 MPa -0.1 MPa 0 1 MPa -61No.PS-OMM0006CN-E M8(3 ) ZSE40A() ISE40A() 0-101.3 kPa -0.1001.000 MPa 10.0-105.0 kPa -0.1051.050 MPa 500 kPa 1.5 Mpa 0.1 kPa 0.001 Mpa DC1224 V 10 (p-p)10() 45

VQC5000Series

Tightening torque (Nm) Wrench tightening angle after tightened by hand (deg) Warning Uni thread size 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection Female Thread : G Wrench tightening angle after tightened by hand (deg) Tightening torque (Nm) Uni thread size 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 2

VP3145-OMH0005

Connection Female Thread: Rc, NPT, NPTF Wrench tightening angle Tightening torque after tightened by hand Uni thread size (Nm) (deg) 1/8 30 to 60 3 to 5 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 5 VP3145-OMH0005-D VPA315 Series Precautions for 3 Port Air Operated Valve Be sure to read before handling.

Modular F.R.L. Pressure Control Equipment

ARG20P-270AS ARG20P-260AS ARG30P-270AS ARG30P-260AS ARG40P-270AS ARG40P-260AS ARG40P-270AS ARG40P-260S GB4-10AS GB4-3AS GB4-P10AS GB4-P3AS AD48 AD47 ARG30P-270AS ARG30P-260S GB3-10AS GB3-3AS GB3-P10AS GB3-P3AS AD38 AD37 ARG20P-270AS ARG20P-260S GB2-10AS GB2-3AS GB2-P10AS GB2-P3AS AD27 Set nut GB2-10AS GB3-10AS GB4-10AS Standard Pressure gauge 0 to 1.0 MPa 0 to 0.3 MPa 0 to 150 psi 0 to 45

4 Port Solenoid Valve Series VQD1000

(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature. (Values at the initial period) 1550 Series VQD1000 ! "# ## $%# 72 +1 ! ' !' @; 9 ( ( & & & & & +&+ 2 * ( ?

Air Slide Table Series MXS

(N) EPDM seal Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 OUT IN 57 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 OUT IN 101 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 OUT IN 226 12 6 10,

7.5

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000Hz. Test was performed to axis and right angle directions of the main valve when pilot signal is ON and OFF.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF.