ARM10/11

Handle position 56 Handle position Top Handle position Bottom Handle position Front A B C Top Front Bottom 84 42 84 70 70 6 P 26(Max.28) U S SMC SMC H L O C 6 K F.R.L. SMC SMC 28.5 AV 6 51.5 80 51.5 AU 13 OUT IN 13 3 28 OUT IN 13 AF OUT IN 3 3 5. Option 4. Accessory 6. Unit representation 2.

Series SV

II Air Cylinder Drive Systems Total Stroke Time and Speed at the End Series SV Series SV1000 Applicable bore size: 20, 25, 32, 40 Applicable related components Total stroke time s Solenoid valve Tubing Speed controller Silencer 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F

Vacuum

(M) zsE40 (F) rsE40N-70 (LHrr) Wilh ado shitt input With auto shift inpul 91 zsE4o(DnsE4F9i 2-[t3 x 0-5 it]r6ad dep$ 4 . Fo. sla*' FEol use (1P65), ins.t n air tn ino the alnGpherc rele*e porl.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

70 70 76 LS 95 95 95 101 LS 120 120 120 126 160 185 145 145 151 135 2-LC (Knock pin position) 165.5 190.5 215.5 140.5 LS + Stroke 167.5 192.5 217.5 142.5 ZZ + Stroke 185 210 235 160 Other dimensions are the same as basic style. 6-5-26 27 Series CG1 Air Cylinder: Standard Type Single Acting, Single Rod, Spring Return/Extend With Mounting Bracket Rod side flange style: CG1FN Bore size (

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

100 1000 70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

MNB

75 80 85 70 75 80 85 35 55 35 + 30 (n 2) n = 2, 3, 4 70 + 30 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 n (Different sides) D-A44 n (Same side) 1 70 75 80 85 10 2 (Different

Refrigerated Air Dryers

[C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp. [C] Correction factor 5 to 30 1.35 35 1.25 40 1 45 0.8 50 0.6 Inlet air temp.

Fluoropolymer Piping Equipment

67.5 37 16 LQ3T6A-R2 1/2" 1" 24.5 22.5 24 64.5 62.5 29 9.5 LQ3T6A-R3 3/8" 1" 22.5 19.5 21 60 57 25 6.4 LQ3T6A-R4 1/4" 1" 17 16 16 50 49 20 4 LQ3T6A-R5 1" 3/4" 30 26 26.5 24 41 32 78 74 70 67.5 49 37 16 LQ3T6A-R6 1" 1/2" 30 26 24.5 22.5 24 64.5 62.5 29 9.5 LQ3T6A-R7 3/4" 3/4" 26.5 24 26.5 24 32 32 70 67.5 70 67.5 37 37 16 LQ3T6A-R9 3/4" 1" 3/4" 26.5 24 32 3/4" 1" 30 26 78 74 49 41 30 26 78

Thermo-chiller/Rack Mount Type

Required ventilation rate [m3/min] Model Heat radiation amount [kW] Differential temp. of 3C between inside Differential temp. of 6C between inside and outside of installation area HRR010-A Approx. 2 40 20 HRR012-A Approx. 2 40 20 HRR018-A Approx. 4 70 40 HRR024-A Approx. 5 90 50 HRR030-A Approx. 6 100 60 HRR050-A Approx. 10 140 70 and outside of installation area Voltage dV dt = Voltage

Series AP500

1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70

MNB

75 80 85 70 75 80 85 35 55 35 + 30 (n 2) n = 2, 3, 4 70 + 30 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 n (Different sides) D-A44 n (Same side) 1 70 75 80 85 10 2 (Different

LJ1H

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Series IDG

70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG75L IDG60L 0 0 P1 = 0.3MPa Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.3MPa 10 10 20 20 P1 = 0.5MPa P1 = 0.5MPa 30 30 40 40 P1 = 0.7MPa P1 = 0.7MPa 50 50 60 60 70 70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate l/min (ANR)

FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

MO None With light/surge voltage suppressor Without connector MOZ Manifold Manifold type Type Model Note) Type 30 Type 40 Common Common Valve EXH A, B (CYL) port VF330--01 02 VF340VF350Type 60, 61 Common Valve VF360--01 02 Type 70, 71 Individual Valve VF370--01 02 Note) For common exhaust type for main and pilot valve, model number will be VF333, VF343, VF363.

Pin Clamp Cylinder Series CKQ/CLKQ

Adjustable from 0.5 to 2 mm 70 70 Shim Mounting tap: M10 x 1.5 Pin hole: 8H7 Mounting tap: M10 x 1.5 Pin hole: 8H7 66 66 One 1 mm and two 0.5 mm shims are attached.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

flow rate (l/min) EJ101S-004 4 70 x 250 EJ101S-006 6 2 EJ101S-013 13 4 20 6 Note) Specity seal material in place of "" (N for NBR or V for FPM).

10

Absorbed Energy Max. absorbed energy (J) Collision speed (m/s) Model 1 2 3 4 5 10 20 30 40 50 60 70 80 Soft type RJ0604 0.05 to 1 0.5 H : 0.05 to 2/L : 0.05 to 1 RJ0806H/L 1 H : 0.05 to 2/L : 0.05 to 1 RJ1007H/L 3 H : 0.05 to 2/L : 0.05 to 1 RJ1412H/L 10 H : 0.05 to 2/L : 0.05 to 1 RJ2015H/L 30 H : 0.05 to 1.5/L : 0.05 to 1 RJ2725H/L 70 Short stroke type RJ0805 0.05 to 1 0.5 RJ1006 0.05 to

Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

C76

NCM C76FA 110 200 C76FB 240 455 NCA Mounting bracket C76T 15 25 DC76C 165 305 KJDA Single knuckle joint 70 105 -X Accessory Double knuckle joint GKM-A 100 165 JA-Floating joint 70 160 20Calculation: (Example) C76F40-100T, C76C40, KJ12DA Base weight 11250 (40) g Mounting bracket 305 g Single knuckel joint 105 g 1125 + 305 + 105 = 1535 g Data Auto Switch Mounting, Minimum Possible Cylinder