FHM

400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

ChemicalThermo-con Series HED SEMI

Heat exchanger Radiating method W Water-cooled Temperature controller 007 B HED C 2 Cooling capacity Communication 003 005 007 A B RS-485 RS-232C 300 W 500 W 750 W Temperature controller Power supply 2 Single-phase 180 to 242 VAC 50/60 Hz 176

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Port size: (inch) Output specification 11 13 19 PF2D504 PF2D520 PF2D540 3/8 1/2 3/4 Specification PF2D200/300 series PF2D300 series Symbol 1 2 Applicable monitor unit (monitor) model Output for monitor unit + analog output (1 to 5 V) Output for monitor unit + analog output (4 to 20 mA) Refer to pages 202 and 203 for Flow Switch Precautions.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series HYB Hygienic Design Cylinder Round Type

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25, 50, 75, 100, 125, 150, 200 25 to 100 25, 50, 75, 100, 125, 150, 200, 250, 300 Intermediate strokes of 1 mm each can be produced. (The spacer is not used.)

Membrane Air Dryer/Single Unit Type Series IDG < A IDG < A Series Reduced purge

Nil H L S Select from Series IDG Flow direction (Right m Left) 500 15 300 Note) In the case of two or more options, indicate them alphabetically. 170 240 300 110 75 40 50 100 150 60 Accessory Thread type Symbol Type Symbol Type None (Standard) Nil B Rc Nil N F With bracket NPT Note) When symbol B is indicated, a bracket assembly with a part number shown in the table left below is included

Plate Cylinder: Double Acting, Single Rod ø25, ø32, ø40, ø50, ø63 Series MU

300 Other intermediate strokes can be manufactured upon receipt of order.

SYJ300

For sub-plate type, manifold type 41, S41, 42, S42, 42R, S42R (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Manual override 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Nil: Non-locking push type Grommet L plug connector M plug connector M8 connector R port P, E port G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Indicator light and surge voltage suppressor G: 300 mm lead wire L: With 300 mm lead wire M: With 300 mm lead wire

3 Port 3 Position Valve Body Ported VEX3 Series

mm L: With lead wire (Length: 300 mm) M: With lead wire (Length: 300 mm) MN: Without lead wire D: With connector * Only with solenoid Manual override Grommet/ (L/M) plug connector DIN terminal H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector Nil Non-locking push type Grommet/ (L/M) plug connector B Locking slotted type compliant

VEX1

mm) 1 4 1 4 H Grommet (Lead wire length 600 mm) 1 4 1 4 02 3 03 D DIN terminal 3 8 3 8 DO DIN terminal (Without connector) 04 1 2 1 2 1 2 3 4 1 2 3 4 1 04 5 06 Body ported G Grommet (Lead wire length 300 mm) 10 1 1 1 H Grommet (Lead wire length 600 mm) 10 7 12 14 9 20 2 E Grommet terminal 1 4 1 T Conduit terminal 1 4 1 2 D DIN terminal 1 2 G Grommet (Lead wire length 300 mm) Grommet (Lead

ZL112A

mm L: With lead wire (300 mm) M: With lead wire (300 mm) MN: Without lead wire K1 Supply valve (N.C.), Release valve (N.C.)

Direct Operated

.) : VX314/VX324/VX334 Conduit: C Grommet: G 280 D F J D 300 J F G1/2 25 25 Width across flats H Width across flats H K K C C Port size 3 x P Port size 3 x P E E B1 A A B2 B2 B1 Conduit terminal: T DIN terminal: D F J D Cable 6 to 12 F M J 34 G1/2 D 25 Width across flats H Width across flats H N 44 K K C C M Port size 3 x P Port size 3 x P E E A A B2 B2 B1 B1 G1/2 With bracket T 4 Q (mm

Vacuum Ejector Series ZM

SP Nil 6 10 15 20 25 30 300 mm 600 mm ZCUK 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm AMJ AMV How to Order AEP ZM Nozzle diameter Body style Standard supply pressure HEP Related 0.35 MPa (Double diffuser) (Except nozzles diameter 05,, and 15,, type) 0.45 MPa (Single diffuser) (Nozzle diameter 13,, and 15,, only) 0.5 MPa (Double diffuser) (Except nozzles diameter 15,, type) Equipment

Rotary Actuator/Vane Style Series CRB1

mm) G: Lead wire length 300mm M: With lead wire (Wire length: 300 mm) D: With connector C: Locking C type (Manual) Light/surge voltage suppressor Nil S Z (1) Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor Note 1) GZ, HZ and DOZ are not available.

CKZ2N

4 Short head cap screw t Top cover Top cover kits 4 Series CKZ2N Maximum Cylinder Locking Moment Bore size (mm) Max. locking force Nm Ibfin 50 63 80 800 1500 2500 7080 13274 22124 Maximum Clamping Moment Max. clamping force Bore size (mm) Nm 0.3 MPa Ibfin Nm 0.4 MPa Ibfin Nm 0.5 MPa Ibfin Nm 0.6 MPa Ibfin Nm 0.7 MPa Ibfin Nm 0.8 MPa Ibfin 50 63 80 100 300 560 885 2655 4956 130 350 720 1150

Low Profile Slide Table Series MXF

10 20 30 50 75 100 -X MXF8 8 Solid state auto switch D-M9, D-M9V MXF12 12 Individual -X 2-color indication solid state auto switch D-M9W, D-M9WV MXF16 16 MXF20 20 133 Series MXF Model Selection Model Selection Step Formula/Data Selection Example Operating Conditions 1 Cylinder: MXF20-50 Cushion: Rubber bumper Workpiece table mounting Mounting: Horizontal wall mounting Average speed: Va = 300

High Power Cylinder Series RHC

Solenoid valve ( ): Effective area [mm2] : Metal seal Speed controller D 36 to 45 E 64.8 to 67 F 102.6 to 120 G 180 to 300 C 16.2 to 21.6 Composed effective area (mm2) 2 Standard type 1 With One-touch fittings Elbow type 1-A Refer to System Selection table, and the appropriate solenoid valve, speed control valve and bore size may be selected.

High-Precision Digital Pressure Switch

ms) Switch output Hysteresis Hysteresis mode Variable from 0*2 Window comparator mode Short circuit protection Yes Voltage output Output type Voltage output: 1 to 5 V Voltage output: 0.6 to 5 V Output impedance Approx. 1 k Output type Current output: 4 to 20 mA Current output: 2.4 to 20 mA Analog output Current output Load impedance Maximum load impedance at power supply voltage of 12 V: 300

0.1% F.S. or less, Enclosure: IP40, PSE200/300/530-560 OTHER SIZE, INSTRUMENTATION, PSE200/300/530-560, 1X, PSE200/300/530-560 OTHER SIZE, 0.57251 lb

0.2%F.S. or less, Enclosure: IP40, PSE200/300/530-560 OTHER SIZE, INSTRUMENTATION, PSE200/300/530-560, 1X, PSE200/300/530-560 OTHER SIZE, 0.16034 lb