CY1F

CY1F10 to 25-AAL CY1F10 to 25-AAR L EA approx.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series KQ) 10 (Series KQ) 10 (Series KQ) 12 (Series KQ) AN103-KM6 AN103-X233 AN103-X235 AN203-KM8 AN200-KM8 AN200-KM10 AN300-KM10 AN300-KM12 0.8 or less 7 37 11 15 25 1.0 or less 14 51 16 26 20 78 22 54 3.0 or less 26 30 81 22 54 30 97 25 70 5.0 or less 41 98 25 70 JIS Symbol Construction/Parts/Dimensions AN203-KM8 AN103-KM6 AN103-X233 AN103-X235 Body (PP) Sound absorbing material (PP sintered

Vacuum Gripper

U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2

Vacuum Gripper

U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2

53

Cooling Capacity HRSH090-A-20HRSH090-A-4012 12 Ambient temperature 32C Ambient temperature 32C 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 43C Ambient temperature 43C 6 6 Ambient temperature 45C 4 4 Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH090-W-20/4014

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Note 6 reducer Connector for pressure sensor controller ZS-28-C 1 pc.

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

VCA

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 VX3 L VXA K 2-M Thread depth 6 2-M Thread depth 6 K VN LVC LVA LVH DIN terminal: D Conduit terminal: T LVD F F (Q) Q S 34 LVQ D LQ LVN U 25 R C 44 TI/ TIL C R G1/2 PA E E G1/2 PAX B B 2-P Port size A A D 2-P Port

Series VCS

20 1 5 30 25 25 2.

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

CJP

Applicable bore (mm) A D L MM N R W B C H d Applicable bore (mm) Part no.

Fieldbus System

B C Base mounted plug-in Note) Refer to the S0700 series catalog (CAT.NAS11-88) for symbol.

Digital Flow Switch (Integrated display type)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

Process Pump

50 100 200 300 500 12 25 50 75 125 Purge air flow rate (L/min (ANR)) Note 3) Inlet air pressure (MPa) 0.7 Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) Dew point indicator purge air flow rate Port size (Nominal size B) 25 25 25 1 L/min (ANR) Note 1) No freezing Note 2) ANR represents the flow rate converted to the value under 20C at atmospheric pressure

100

Hysteresis Window comparator mode Variable (0 or above)*1 Display 3 1/2 digit, 7-segment LED, 1-color display (Red) Display accuracy 2% F.S. 1 digit (Ambient temperature of 25 3C) Indicator light Lights up when switch output is turned ON.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

0.022 (50% reduction) 0.044 25 200 32 0.036 (50% reduction) 0.072 30 450 40 0.027 (50% reduction) 0.053 37 500 MZero table clearance Table Clearance 300 mm Size Displacement due to table clearance [mm] High rigidity guide LEKFS LEFS 25 0 0.079 Amount of displacement from the 300 mm position 32 0 0.068 40 0 0.052 1 Electric Actuator High Rigidity and High Precision Slider Type LEKFS Series

Rotary Cylinder Series MRQ Size: 32, 40 1

C + D = 3.5 + 24.3 = 27.8 l/min B C CRQ2 Rotary motion parts MSQ A D Linear motion parts MRQ 0 1 2 DOperating time (S) 2011-10-7 8 Rotary Cylinder Series MRQ Size: 32, 40 How to Order SO MRQ B S 32 50 C A J79W Number of auto switches Mounting style F: Flange on the rod side B: Basic style Rotation 0 1 2 Linear motion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Parallel Type Air Gripper Series MHZ

Kit includes items 22, 23, 24 and 25 from the table above. Material Part number MHZAJ6-PS CR MHZAJ2-J6 Seal kits consist of items 22, 23, 24 and 25 in one kit, and can be ordered using the seal kit number. Note) Contact P/A when replacing seals.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Flow Characteristics Type 21P Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port Manifold Body ported for internal pilot Type SS5YJ3-21P SYJ323 1/8 M3 x 0.5 0.9 Type SS5YJ3-32P-M5 Base mounted for internal pilot 0.25 0.25 0.19 0.18 0.060 0.059 0.32 0.3 0.25 0.27 0.077 0.075 M5 x 0.8 C4

SMC

25, 40 Magnetically Coupled Rodless Cylinder (Direct Mount Type) P.162 Low Speed Cylinder P.170 Sine Rodless Cylinder P.166 Model Size 12-CY1R 12-CY3R Model Size CQSX 101112, 16, 20, 25 Model Size 12-REA 25, 32, 40, 50, 63 6, 10, 50, 63 15, 20, 25, 32, 40 Low Speed Cylinder P.172 Low Speed Cylinder P.174 Model Size CQ2X 101132, 40, 50, 63 Model Size CM2X 101120, 25, 32, 40 Front matter 2