Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !
Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.
10 400 12 10, 25, 40, 50, 80, 100, 125, 160, 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.
Energy-saving, large flow rate, 3 stage diffuser construction ZA Suction flow rate increased 250% and air consumption reduced 20% with 3 stage diffuser construction (Versus 1.3, one stage model) ZX 1 stage performance Vacuum pressure ZR Q1 Q2 Q3 ZM Q1 Q2 Q3 Suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) 2 stage performance 3 stage performance ZMA Suction flow rate ZL112 100 200
Size (port size) For Air Series variations Flow rate Remote type Output specifications Port size (Rc, NPT, G) Integrated measurement Analog output Accumulated display type Switch output pulse output 1/8 1/4 3/8 1/2 11/2 1 2 Display unit Sensor unit range l/min PFA510 550 511 521 551 PFA710 750 711 721 751 703H 706H 712H P P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200
300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 AU Flow rate (/min (ANR)) Flow rate (/min (ANR)) AF AR ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (
Coil rated voltage 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 1 2 3 Electrical entry 110 to 120 VAC, 50/60 Hz T E H G Grommet (Lead wire: 300 mm) Grommet (Lead wire: 600 mm) 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC Grommet terminal Conduit terminal D With connector DO Without connector L With lead wire LN Without lead wire LO Without connector M With lead wire MN Without lead wire 7 240 VAC, 50/60
0.4 0.1 0.05 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Operating temperature C How to Order 1.2 Metric size Max. operating pressure MPa D 20 TLM0425 N 1.0 0.8 E Tubing designation Length per roll Symbol 10 20 50 100 2S 0.6 F Type Length 10 m 20 m 50 m 100 m 2 m 0.4 Color indication G Roll Symbol N R BU B Color Translucent (Material color) Red (Translucent) Blue (Translucent) Black
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
0 20 40 60 80 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74/7D 6, 1/4" ZFC75/7E 8, 5/16" ZFC76/7F 10, 3/8" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa 10 10 10 0.7 MPa 0 0 50 100 150 250 200 0 0 0 100 200 300 400 500 0 200 400 600 Flow
PNP Analogue 1 to 5V F* PNP Analogue 4 to 20mA E and F: Provided for the isolated type only.
Solenoid Valve for 200/220 VAC Specification Warning AC specification solenoid valves with grommet have a built-in rectifier circuit in the pilot section to operate the DC coil. With 200/220 VAC specification pilot valves, this built-in rectifier generates heat when energized.
Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.
Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.
Grommet (G) Rated voltage DIN terminal (D) Part no. symbol Standard: Y, V, W Continuous duty type (E) Standard: Y, V, W Continuous duty type (E) W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light Varistor Varistor Diode Diode Coil Coil Coil Coil S AC Vacuum Spec.
(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly
Calculation Example 1: MUB40-15S(T) Basic weight0.62kg 2 pcs. 5 10 15 15 Example 2: MUC50-5S(T) Basic weight1.06 Additional weight (mounting bracket)0.40 1.06 + 0.40 = 1.46 kg 1 pc. 5 5 10 15 Construction Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !
However under Japanese regulation, only MPa is available in Japan. e e 4PL 5PC qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) Specifications Operating Parameters AK1002 1 to 30 psig (0.007 to 0.2 MPa) AK1006 2 to 60 psig (0.014 to 0.4 MPa) AK1010 2 to 100 psig (0.014 to 0.7 MPa) AK1020 5 to 200 psig (0.034 to 1.4 MPa) AK1030 5 to 300 psig (0.034 to 2.1 MPa)
80 300 300 1.0 RS1H80 RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 0.7 10 20 30 40 10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20
operating tensile and compressive force (N) Allowable eccentricity (Umm) Rotating angle Basic type Standard/Thread nominal size JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 0.5 0.5 0.75 1 300 800 1250 3100 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 20 25/32 40 50/63 5 Semi-standard/Thread nominal size JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200