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12 V IC circuit 12 V 5 V, 12 V 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 5 V, 12 V IC circuit Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches

Guide Table Series MGF ø40, ø63, ø100 1

MGF40 D-XC79 Machining tapped hole, drilled hole and pin hole additionally MGF63 30, 50, 75, 100 -X MGF100 20Minimum Stroke for Auto Switch Mounting Data (mm) Applicable auto switch No. of auto switches mounted D-Z7 D-Z8 D-Y69 D-Y7V D-Y59 D-Y7 D-Y7W D-Y7BAL D-Y7WV 10 5 10 15 20 1 pc. 15 10 10 15 20 2 pcs.

EX510-GDN1.eng

DC-DC converter (isolated) Pin #1: Brown wire FG +24 V TD+ TD0 V Power supply for output INPUT OUTPUT +24 V 0 V COM D +24 V 0 V +24 V RD+ RD0 V Power supply for input and controlling GW 2 13 12 Wiring (continued) Press fitting Press the cover to the body with plier etc. Confirmation It is completed with a check on 4 latches engaging. 3 NOTE 1.

Digital Flow Switch

--CNPN (1 output) + Analogue (4 to 20 mA) output type PFMB7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 NPN (1 output) + External input type PFMB7--GMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop:

Digital Flow Switch ( compatible)

voltage drop: 1.5 V or less PF2MC7###-##-C#-### NPN (1 output) + Analogue (1 to 5 V) output type PF2MC7###-##-D#-### NPN (1 output) + Analogue (4 to 20 mA) output type Maximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1.5 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 Minimum load impedance

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

Angular Style When auto switch D-M9/M9W/Y59/Y7P/Y7W is used Auto switch mounting bracket When auto switch D-M9V/M9WV/Y69/Y7PV/Y7WV is used Max. Protrusion of Auto Switch from Edge of Body (L) Auto Switch Mounting Bracket: Part No. (mm) Auto switch part no. D-M9(V)/M9W(V) Auto switch mounting bracket part no.

ZP

A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 Series ZPT/ZPR Replacement Parts

EX510-GPR1.eng

INPUT COM D COM C COM B COM A Settings 2 4 Mounted by screw 54 5 16 70 5 PWR (V) Put Claw 1 of the body under DIN rail and push it upward.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 28 28 (43) 18 18 (33) 0 0 (15) 12 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 28 33 (45) 18 28 (35) 0 5 (17) D-A9, D-A9V 0 (15) 0 32 32 (47) 22 22 (37) 0 0 (15) 16 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 32 37 (49) 22 32 (39) 0 5 (17) D-A9, D-A9V 0 (15) 0 38 38 (53) 26 26 (41) 0 0 (15) 20 D-M9, D-M9V D-M9W, D-M9WV 30 (37) 0 38 38 (

Air cylinder

.) < Applicable Auto switches > Solid state auto switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed auto switch D-A90(V)A93(V)A96(V) Figure 4.

Compact Vacuum Ejector Series ZQ

D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

Fieldbus system (CC-Link compliant)

Output: 32 OFF ON ON 8 points for each 8 points for each of A to D of A to D 2.

Space Saving Vacuum Ejector Vacuum Pump System

ZQ-OM00801-D Manifold Vacuum Pump Unit D CE/UKCA -compliant Note 3) CE/UKCA compliant products are not available for 1, 2, 3 and 4. 12 - Doc. no. ZQ-OM00801-D B KQ2S23-M5N1 KQ2S04-M5N1 KQ2S04-M5N1 KQ2S06-M5N KQ2S06-M5N KQ2L04-M5N1 KQ2L23-M5N1 KQ2L04-M5N1 CE/UKCA compliant D CE/UKCA marked Note) CE/UKCA compliant: for DC only. 13 - Doc. no. ZQ-OM00801-D Manifold 14 - Doc. no.

CV/MVGQ

2-wire Connector RB Diagnostic indication (2-color indication) Grommet 3-wire (PNP) 3-wire (NPN) J IC circuit 5 V, 12 V Grommet 12 V 2-wire DConnector Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 3-wire (PNP) -X Grommet 2-wire 12 V With diagnostic output (2-color indication) IC circuit 5 V, 12 V 4-wire (NPN) 20Lead wire length symbols

OMR0032

Pulse train signal specifications (Open collector input and differential input are common) 5 s or more 24 V 21.6 V to 26.4 V 5 V 4.75 V to 5.25 V PP3s or less 5 s or more 3s or less 16 s or more 28 - 7.4 Parallel I/O signals (Pulse Input Type) (1) Input side (Pulse input type) Function Description Common terminal for the input signal power supply.

Clean Room Rodless Cylinder Series CYP ø15, ø32

MY CY Proper Auto Switch Mounting Position MG A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 24.5 93.5 -X CYP32 33 122 20Data Mounting of Auto Switch When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

Vacuum Pad

B A D B 2 2 2 2 D B D B A M6 x 0.75 M6 x 0.75 M8 x 0.75 M8 x 0.75 A 3 3 Lateral 3 3 With Adapter: Vacuum Inlet 0.3 0.3 0.8 0.8 Width across flat 5.5 Width across flat 5.5 1.5 2 0.3 0.3 0.8 0.8 2 2.5 1.5 2 2 2.5 Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Lateral D D 10 14 B 24 31 B A 7 10 A 8 11 Model Model Model Model ZP3-T015U;J3-B3 ZP3

Vacuum Pad

B A D B 2 2 2 2 D B D B A M6 x 0.75 M6 x 0.75 M8 x 0.75 M8 x 0.75 A 3 3 Lateral 3 3 With Adapter: Vacuum Inlet 0.3 0.3 0.8 0.8 Width across flat 5.5 Width across flat 5.5 1.5 2 0.3 0.3 0.8 0.8 2 2.5 1.5 2 2 2.5 Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Lateral D D 10 14 B 24 31 B A 7 10 A 8 11 Model Model Model Model ZP3-T015U;J3-B3 ZP3

Vacuum Pad

B A D B 2 2 2 2 D B D B A M6 x 0.75 M6 x 0.75 M8 x 0.75 M8 x 0.75 A 3 3 Lateral 3 3 With Adapter: Vacuum Inlet 0.3 0.3 0.8 0.8 Width across flat 5.5 Width across flat 5.5 1.5 2 0.3 0.3 0.8 0.8 2 2.5 1.5 2 2 2.5 Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Lateral D D 10 14 B 24 31 B A 7 10 A 8 11 Model Model Model Model ZP3-T015U;J3-B3 ZP3

Booster Regulator/Air Tank

V 10 T = t x = 89 x = 89 (s).