Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10Compressed air0.3 to 0.85 5 to 55 5 to 55 20125100250.72525251 L/min [ANR] {In case of Inlet air pressure

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10Compressed air0.3 to 0.85 5 to 55 5 to 55 20125100250.72525251 L/min [ANR] {In case of Inlet air

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20Compressed air0.3 to 0.85 5 to 55 5 to 55 20250200500.72525251 L/min [ANR] {In case of Inlet air

air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20Compressed air0.3 to 0.85 5 to 55 5 to 55 20250200500.72525251

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251

temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa

temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa

temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa

temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa

temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20HCompressed air0.3 to 0.85 5 to 55 5 to 55 15222200220.72525251 L/min [ANR] {In case of Inlet

(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20Compressed air0.3 to 0.85 5 to 55 5 to 55 20250200500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.66

temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20Compressed air0.3 to 0.85 5 to 55 5 to 55 20250200500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}

temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20Compressed air0.3 to 0.85 5 to 55 5 to 55 20250200500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}

temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20Compressed air0.3 to 0.85 5 to 55 5 to 55 20250200500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525?