Body/Exhaust Type: B (Single Unit - Port Exhaust), Nominal Nozzle Size: 15 (ø1.5), Supply Valve and Release Valve: K (N.C. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (Without Pressure Sensor / Digital Pressure Switch for Vacuum), Connector: L3 [L-type Plug Connector - w/o Lead Wire with Connector - w/o Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 09 [ø5/
4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release Pressure Supply: D [With Individual Release Pressure Supply (PD) Port Type]
Body/Exhaust Type: B (Single Unit - Port Exhaust), Nominal Nozzle Size: 15 (ø1.5), Supply Valve and Release Valve: K (N.C. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (Without Pressure Sensor / Digital Pressure Switch for Vacuum), Connector: L3 [L-type Plug Connector - w/o Lead Wire with Connector - w/o Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 08 [ø8
Body/Exhaust Type: Single Unit - Port Exhaust, Nominal Nozzle Size: ø1.5, Supply Valve and Release Valve: N.C. / N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Without Pressure Sensor / Digital Pressure Switch for Vacuum, Connector: L3 [L-type Plug Connector - w/o Lead Wire with Connector - w/o Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 09 [ø5/16 One-touch Fitting
. / N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Without Pressure Sensor / Digital Pressure Switch for Vacuum, Connector: L3 [L-type Plug Connector - w/o Lead Wire with Connector - w/o Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 07 [ø1/4 One-touch Fitting (Inch)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual Release
Body/Exhaust Type: Single Unit - Port Exhaust, Nominal Nozzle Size: ø1.5, Supply Valve and Release Valve: N.C. / N.C., Rated Voltage: 24 VDC, Vacuum Sensor: Without Pressure Sensor / Digital Pressure Switch for Vacuum, Connector: L3 [L-type Plug Connector - w/o Lead Wire with Connector - w/o Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 08 [ø8 One-touch Fitting (Metric
Clean Regulator Model XT13-394-06 XT13-394-10 INA-48-1-06 INA-48-1-10 INA-48-16-10 INA-48-16-06 INA-48-58-10-H INA-48-58-06-H Port size Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Relief mechanism Non-relief Relief Non-relief Fluid Deionized water (Pure water) Air, N2 Proof pressure 1.9 MPa 1.5 MPa Max. operating pressure 1.3 MPa 1.0 MPa Set pressure 0.1 to 1.0 MPa 0.05 to 0.5 MPa 5 to 60C Ambient and fluid
Free flow 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.3 0.3 0.3 0.3 Note) C and b values are for controlled flow with the needle fully open and free flow with the needle fully closed. 636 Speed Controller with Indicator/Elbow Type Uni Thread Type AS-FS Series Elbow Brass 1 Electroless nickel plated How to Order AS 2 1F 0 U01 S 06 2 Applicable tubing
Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.
lines in clean room environments TPH 06 04 B 20 Tube O.D.
port size (inch) A, B port size (metric) spaEleyonamanr'od Manifold D-sub Connector .
T 04 06 08 10 12 4 6 8 10 12 VMG Construction Description Material Component Parts No. q w e r t y u i o !0 !
(kg) -E 0.21 0.21 0.21 -EL 0.26 0.26 0.26 -M 0.27 0.27 0.27 -ML 0.32 0.32 0.32 Without switch 0.17 0.17 0.17 Model ZM2 ZM4 ZM6 ZM1-J ZM3-J ZM5-J ZM1-K ZM3-K ZM5-K ZM1-A ZM3-A ZM5-A ZM1-B ZM3-B ZM5-B ZM0.24 0.28 0.33 0.34 0.39 0.25 0.29 0.34 0.35 0.4 0.25 0.29 0.34 0.35 0.4 0.26 0.3 0.35 0.36 0.41 P Q 0.24 0.28 0.33 0.34 0.39 -04R/L 0.209 0.214 0.219 0.224 0.229 0.234 0.239 0.244 0.249 0.254
Manual override Caution Nil: Non-locking push type B: Locking type (Tool required) Use standard (DC) specification for continuous duty.
As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.
Component module KBC1 KBC2 KBC3 KBC4 KBP1 KBP2 KBP3 KBP4 KBV2-06 2 KBE2-06 2 KBN2 1 KBN2 KBV1-06 KBE2-06 KBV2-06 5 Bracket: KBX(Page 87) Component module KB X 6 KBV2-06 1 KBV1-06 1 KBR2-1 1 KBH2-R2S 1 KBP1 1 KBP1 KBR2-1 Applicable thread size KBH2-R2R KBV2-06 KBP1 Type Bracket: KBX KBV1-06 Part No.
Unit Series AV2000-A AV3000-A AV4000-A AV5000-A Spacer Y200-A Y300-A Y400-A Y600-A Spacer with bracket Y200T-A Y300T-A Y400T-A Y600T-A Applicable model AC20-A AC20-B AC25-A, AC30-A AC25-B, AC30-B AC40-A*1 AC40-B*1 AC50-B, AC55-B AC60-B *1 Except port size 06 Assembly Example eSpacer with bracket qSoft start-up valve Air combination wAC30-03G-A Assembly example Products do not come assembled
Unit Series AV2000-A AV3000-A AV4000-A AV5000-A Spacer Y200-A Y300-A Y400-A Y600-A Spacer with bracket Y200T-A Y300T-A Y400T-A Y600T-A Applicable model AC20-A AC20-B AC25-A, AC30-A AC25-B, AC30-B AC40-A*1 AC40-B*1 AC50-B, AC55-B AC60-B *1 Except port size 06 Assembly Example eSpacer with bracket qSoft start-up valve Air combination wAC30-03G-A Assembly example Products do not come assembled
ANA1-01 to 06 ANA1-06: PP How to Order ANA1-01 to 20 A1 03 AN Port size Symbol Port size Connection 01 1 8 02 1 4 03 3 8 04 1 2 Screw-in 06 3 4 1 4 10 1 12 1 1 2 1 14 20 2 Model (One-touch fitting connection) C08 (8 One-touch fittings size) Effective area (mm2) Weight (g) ANA1-C08 11 5 58 16 A B Dimensions (mm) Model One -touch fitting size 8 10 12 C10 (10 One-touch fittings size) One-touch