SMC Corporation of America
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consumption ZQ1053M-K1Y5L-D31C ZQ1103M-K1Y5L-D31C 10 -20 -20 Maximum suction flow 5 0 10 15 0.1 0 0.2 0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) ZQ110 Exhaust Characteristics ZQ110 Flow Characteristics Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50

'neumatic Regulator W2M/4M Proportionally Controlled Air Pressure Linearity +1"h or less Hysteresis O.5% or less Repeatability +9.5% (At full span) Six Output Pressure Ranges Voltage lCurrent Type Input A series for each output flow rate lT1 000.1T2000.1T4000 About 50 N0/min About 800 N{/min About 5000 N{/min lT 1000 for low flow rates . The output flow rate is about 50 Nthin. .

Refer to back page 50 for Safety Instructions and pages 543 to 546 for Flow Control Equipment Precautions. 613

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

Emergency display Display: Red/display the error code on Lt;;D Pressure display 3 1/2 Digit LCD Se ~ diagnosIs functIOn Excess pressure/Data error/ NoIe2) Excess current/Pressure during O-clear Operating temp.range O~50 'C I Bottom mode Noise resistance 500Vp~p pulse width 1 itS standing 1 nS fbl/nn lULl Insulation resistance Between whole wires and case 2M Q (SOVDC by megameter) Vibration

Table 12-3 MPC LED Status Key 22 - IN20267 Studio 5000 Setup 13. EDS file Rockwell Studio 5000 13.1. The EDS file can be downloaded from the www.smcusa.com website. Install the EDS file by selecting Tools then EDS Hardware Installation Tool.

Recommended Tightening Torque [Nm] Connection thread Pressure Control Equipment 1/2 3/8 1/4 1/8 Torque 28 to 30 22 to 24 12 to 14 7 to 9 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

VCHR ITV IC ITVX Recommended Tightening Torque PVQ Unit: Nm Connection thread 1/2 3/8 1/4 1/8 VEF VEP Torque 28 to 30 22 to 24 12 to 14 7 to 9 VER 2. Avoid excessive torsional moment or bending moment other than those caused by the equipments own weight as this can cause damage. Support external piping separately. 3.

C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)2.1 A5 A180/200 W 50/60 Hz220 W0.01 ?

C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)21.2 scfm (600 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 230 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?

C; rubber seal -5 to 50 C, Optional IP65 enclosure, SUBPLATE, 1/4 PT, VALVE, VQ4000 VALVE, SOL 4/5-PORT, 22, VQ4000 NO SIZE RATING, .92400 lb

Designated nozzle: IBG1-12-10: Nozzle length (50, 100, 150, 300) Silencing nozzle: IBG1-12S Set including the designated nozzle and silencing nozzle: IBG1-12-10-S : Nozzle length (50, 100, 150, 300) 4. Impact resistance of the product is 150[m/s2]. Vibration resistance is 30[m/s2]. Avoid applying vibration exceeding the allowable value to the product. Mounting Warning 1.

. 10-1 10.3 . 10-2 10.4 . 10-2 11 R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50

C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?

C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?

C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)21.2 scfm (600 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?

C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)21.2 scfm (600 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?

C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)21.2 scfm (600 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 230 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?

ASS ASR ASF Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.