SMC Corporation of America
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20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch alarm

12 18 2 A 16 U 17 21 23 2B 9 10B 11 9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4.

Construction Back portion of 125 to 250 head covers (1) (4) (5) (6) (7) (8) (9) (10) (11) (2) (33) (12) Air supply port Air exhaust port Top portion of 320 head cover (13) (14) (15) (16) (17) (27) (28) (29) (30) (33) Cross-section portion of 320 rod end (3) (18) (19) (20) (21) (22) (23) (24) (25) (26) (31) (34) (35) (32) No. Name Material / Surface treatment No.

Piston seal Fig. 21 Mounting of the rod seal and cushion seal Fig. 22 Mounting of the piston seal 4) When the support brackets are replaced, use a hexagon wrench as specified below.

External Dimension Drawing 5-1 Monosashi-kun with Brake 18 19 5-2 Controller 20 5-3 Extension Cable 21 6.

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Wiring method and examples of auto switches 21 - 4. Maintenance 4-1. Consumable parts Fig. 9 Replaceable seals 4-1-1. Seal kit Bore size (mm) Order No.

Piston seal Fig. 21 Mounting of the rod seal and cushion seal Fig. 22 Mounting of the piston seal 4) When the support brackets are replaced, use a hexagon wrench as specified below.

MSUA-OM02-B PRODUCT NAME Rotary Table: High Precision Type MODEL / Series / Product Number MSUA1,3,7,20 Contents 2 Safety Instructions 18 Product description 18 How to order (Basic type) 18 Specification 19 Equivalent size 19 Mass 20 Precautions on model selection 21 Effective torque 23 Calculation formulae for moment of inertia 24 Kinetic energy / Rotation time 24 Allowable kinetic energy

Lubrication . 21 6.Maintenance . 21 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

No.MH*-OMZ0004 / / JMHZ2-16D-X7400B-ASSISTA(-P) . 2 1. 4 2. . 5 3. . 6 3-1. . 6 3-2. . 7 3-3. . 8 3-4. () . 9 3-5. . 10 3-6. . 10 4. . 11 4-1. . 11 4-2. 3 . 12 4-3. . 13 5. . 14 5-1 . 14 5-2. . 14 5-3. . 20 5-4. . 20 5-5. . 20 5-6. . 21 6. . 21 1 - (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power

Raising dust characteristic 21 Recommended tube diameter The figure below shows the amount of the vacuum aspiration and the raising dust degree. (reference value) (1) Step motor (servo 24VDC) / Servo motor (24VDC) The table below shows the amount of the vacuum aspiration and the raising particle. .

/LEHS .20 4.1 . 20 4.2 . 21 4.3 . 22 5.23 5.1 . 23 5.2 . 24 5.3 . 27 . 27 . 29 (1). 31 (2). 32 (3). 33 . 34 5.4 . 36 . 36 . 38 1 - 6.39 7.40 7.1 . 40 7.2 . 41 7.3 . 41 7.4 . 42 7.5 . 44 7.6 . 44 8.45 8.1 . 45 8.2 . 46 8.3 . 50 8.4 . 53 .54 2 - LEH Series / (ISO/IEC)(JIS)1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General

How to check Alarm/Monitor 21 8.1 Confirmation of current product status (Monitor confirmation) 21 8.2 Confirmation of alarm details (Alarm Confirmation) 22 9. Troubleshooting 23 1 No. JXC#-OMA1006-B e-Actuator setup tool / Setting software .Safety precautions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

[SW] 1 1 1 0. [] 02 1. a [a ] 2. b [b ] SW 21 21 1 33 - 8 81 ( 82 0 / 34 - 83 1 1 INP ON / 2 ( INP OFF 3 INP OFF INP ON 35 - INP ON ( ) 84 PLC 15ms30ms 85 2 EMG EMG OFF () RESET RESET () HOLD HOLD EMG RESET OUT OFF 36 - 9 91 )100mm/s 50mm (No.1 ) 50mm 50mm/s 10mm 5 100mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 50.00 1000 1000 0 0 0 100

Product Specifications . 17 3.1 Basic specifications . 17 3.2 Parts description. 18 3.3 Outside dimension diagram. 19 (1) Screw mount type (LECPA-) . 19 (2) DIN rail mount type (LECPAD-) . 19 3.4 How to install . 20 (1) How to install . 20 (2) Ground wire connection . 20 (3) Installation location . 21 4.

DeviceNet / LEC-GDN1 . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4() . 8 (1) . 8 (2) . 8 (3)(LEC) . 8 (4) . 8 (5) . 8 (6) . 9 (7) . 9 3. . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGDN1) . 13 (2)DIN(LECGDN1D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1 (NODE ADDRESS,B RATE) . 15 4.2(CN2SW) . 15 4.3(LEC) . 16 5. . 18 5.2 CN3 . 18 5.3 CN1CONT . 18 5.4 CN2PC/TB . 19 .CN4 . 20 6.1 . 20 6.2 . 20 6.3 . 21

Fieldbus system EtherNet/IPTM compatible SI unit MODEL / Series / Product Number EX600-SEN# EX600-ED# Table of Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 12 Mounting and Installation 14 Installation 14 Wiring 16 SI Unit Model Indication and How to Order 19 Summary of Product parts 19 Mounting and Installation 20 Wiring 20 Setting and Adjustment 21

IPTM MODEL / Series / Product Number EX250-SEN1 Table of Contents Safety Instructions 2 Product Summary 7 Definition and terminology 8 Model Indication and How to Order 9 Summary of Product Parts 9 Mounting and Installation 10 Installation 10 Position of end plate 11 Wiring 12 LED Indication and Settings 16 EtherNet/IPTM CONFIGURATION WITH RSLogix5000TM 19 Maintenance 20 Troubleshooting 21