Digital Flow Switch (Integrated display type) ( compatible)

0x03EB. 9 Diagnosis (flow) 0: OFF 1: ON HHH, Set with the index 0x03EB. 10 Diagnosis (tenperature) 0: OFF 1: ON tHHH/tLLL, Set with the index 0x03EB. 16 to 31 Temperature measurement value With sign: 16 bit 32 to 47 Flow measurement value With sign: 16 bit Bit offset 47 46 45 44 43 43 41 40 39 38 37 36 35 34 33 32 Item Flow measurement value (PD) Bit offset 31 30 29 28 27 26 25 24 23 22 21

LFE-OMY0008

[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]

LFE-OMZ0013

[F 0] Selection of sensor See page 21 Item Description Default setting Range selection of the sensor to be connected The flow rate range of the sensor to be connected is set.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

(Specific Product Precautions 4/Maintenance 5 on page 7) 21 VCC Series Parts Description Model Symbol Description 2 port valve Part no.

M-E05-1-LQ1

Insert pin LQ3 GPS C Pin for cooling (single) Tubing size (Refer to Table 1) Insert pin type Base plate AXT1075-21 Nil Metric N Inch * Compatible insert pins are included. (Including seat. Supplied in parts case.) Table 1 Tubing size symbols Tubing O.D.

DOC1003626

3.11.3 Function code: 16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register map . 3-18 HRS400-A-46 DOC1003626 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid flow rate . 3-19 3.13.3 Circulating fluid discharge pressure . 3-19 3.13.4 Circulating fluid electrical conductivity . 3-19 3.13.5 Status flag . 3-20 3.13.6 Alarm flag. 3-21

HRX-OM-W069

3.11.3 Function code16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register Map . 3-18 HRL Series HRX-OM-W069 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid electrical conductivity . 3-19 3.13.3 Circulating fluid discharge pressur . 3-19 3.13.4 Circulating fluid flow rate . 3-19 3.13.5 Status flag . 3-20 3.13.6 Alarm flag. 3-21

HRX-OM-Y120

3.11.3 Function code16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register Map . 3-18 HRL Series HRX-OM-Y120 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid electrical conductivity . 3-19 3.13.3 Circulating fluid discharge pressur . 3-19 3.13.4 Circulating fluid flow rate . 3-19 3.13.5 Status flag . 3-20 3.13.6 Alarm flag. 3-21

A_HEC-OM-J017

20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch alarm

HEC-OM-S008

20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch alarm

XG_-OMV0028

12 18 2 A 16 U 17 21 23 2B 9 10B 11 9 27 15 12 14 B 11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4.

K35-OMW0030

Construction Back portion of 125 to 250 head covers (1) (4) (5) (6) (7) (8) (9) (10) (11) (2) (33) (12) Air supply port Air exhaust port Top portion of 320 head cover (13) (14) (15) (16) (17) (27) (28) (29) (30) (33) Cross-section portion of 320 rod end (3) (18) (19) (20) (21) (22) (23) (24) (25) (26) (31) (34) (35) (32) No. Name Material / Surface treatment No.

Cylinder with lock

Piston seal Fig. 21 Mounting of the rod seal and cushion seal Fig. 22 Mounting of the piston seal 4) When the support brackets are replaced, use a hexagon wrench as specified below.

MONOSASHI-KUN WITH BRAKE CONTROLLER

External Dimension Drawing 5-1 Monosashi-kun with Brake 18 19 5-2 Controller 20 5-3 Extension Cable 21 6.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

CEx-OMQ0011

P1 No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 59 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Cylinder with lock

Wiring method and examples of auto switches 21 - 4. Maintenance 4-1. Consumable parts Fig. 9 Replaceable seals 4-1-1. Seal kit Bore size (mm) Order No.

Cylinder with lock

Piston seal Fig. 21 Mounting of the rod seal and cushion seal Fig. 22 Mounting of the piston seal 4) When the support brackets are replaced, use a hexagon wrench as specified below.

Rotary Table: High Precision Type

MSUA-OM02-B PRODUCT NAME Rotary Table: High Precision Type MODEL / Series / Product Number MSUA1,3,7,20 Contents 2 Safety Instructions 18 Product description 18 How to order (Basic type) 18 Specification 19 Equivalent size 19 Mass 20 Precautions on model selection 21 Effective torque 23 Calculation formulae for moment of inertia 24 Kinetic energy / Rotation time 24 Allowable kinetic energy

Air Gripper Unit for Collaborative Robots

Lubrication . 21 6.Maintenance . 21 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.