End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

10 19 500 300 300 30 134 3.2 171 500 300 52 45 143 39 18 177 188 11 53 53 77 154 154 7 10 47.3 11 10 44.5 143.5 82 54 4 55 75 23 27 7 5 66 36 10 15 30 The dimensions other than indicated below are the same as those of indicated on p.3.4-8.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

122 124 500 300 300 500 300 10 15 30 54 4 55 75 23 27 7 5 66 36 82 7 30 134 3.2 10 171 52 47.3 45 143 39 11 18 177 188 10 11 53 53 77 44.5 143.5 154 154 MGF The dimensions other than indicated below are the same as those of indicated on p.3.8-8.

AS

M Mass (g) 1 8" AS221F-U01-01 AS221F-U01-03 AS221F-U01-05 AS221F-U01-07 AS221F-U01-09 AS221F-U02-03 AS221F-U02-05 AS221F-U02-07 AS221F-U02-09 AS221F-U02-11 AS321F-U02-07 AS321F-U02-09 AS321F-U02-11 AS321F-U03-07 AS321F-U03-09 AS321F-U03-11 AS421F-U04-11 AS421F-U04-13 17 17 18 19 19 32 33 33 34 36 54 55 57 54 55 57 94 96 27.9 28.2 30.2 31.0 32.4 32.5 34.2 34.5 36.4 44.5 39.3 41.0 43.3 39.3

SFOD-OMT0009CN

2) 7. 512 2048 / 0 1 0 1 1 4 1 4 11 () 12 () 1 2 1 11 [] 14096 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 1 2 3 800 2.5mm 12 =1 /2 3 =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 17 No.SFOD-OMT0009CN-B download 18 No.SFOD-OMT0009CN-B (3) View(V) Step Data Step No. 7.4 19 No.SFOD-OMT0009CN-B 3.7 JOG (1) ON ON (SVRE ON ) View(V) Status SVRE

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

273 262.5 244 14.5 17 285.5 275 254.5 15.5 18 298 287.5 265 16.5 19 310.5 300 275.5 17.5 20 310.5 300 286 12.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15 10 223 212.5 191.5 16 11 235.5 225 202 17 12

JXCx-OMT0001CN

LEFS25RH-300LEFS25RH-300 (C) (11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BR LEFS16A-100LEFS16A-100 -15No.JXC-OMT0001CN-C Execute()Execute Check box Execute Apply Apply 3.6 (2) -16No.JXC-OMT0001CN-C (2) 9. 512 2048 / 0 1 0 1 1 4 1 4 11 12 1 2 1 [] 11 1 4096 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 1 800 2.55mm 2 3 12 =1 /2 (3 ) =2.5mm/5mm (2.5mm

Square Tube Type Air Cylinder Series MB1

(Refer to Rod boot/Air cushion on page 11.)

MXQ

Table (4) Maximum Allowable Moment: Mmax (Nm) 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) 20 Model 10 30 40 50 75 100 125 150 84 10 20 30 40 50 75 100 125 150 0.2 MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 5.1 5.1 6.0 6.9 7.4 7.9 7.4 50 100 200 300 500 700 4.7 4.7 4.7 7.2 7.2 11 11 11 13 13 15 14

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Vacuum Pad

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

Vacuum Pad

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

Vacuum Pad

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

Vacuum Pad

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

C76

D-H7NF Bore A B A B 32 8 7 7 6 40 14 12 13 11 Aim at this number.

C76

301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125

Compact Manifold Regulator Series ARM5

End plate L 11 1 No.

Manifold Specifications

310.5 300 287 12 12 335.5 325 306 15 13 348 337.5 325 11.5 14 373 362.5 344 14.5 15 385.5 375 363 11.5 16 410.5 400 382 14.5 17 423 412.5 401 11 18 448 437.5 420 14 19 473 462.5 439 17 20 485.5 475 458 14 3-3-84

Fieldbus System

Note 2) Only direct mounting is available for Type 11 (Bottom ported). * Bottom ported type of the SY3000 uses the manifold base of the SY5000.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 20 Z ZZ (NN-1) x H G H 5.5 11 5.5 11 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) GA 11 21 31 43 41 F 20 30 20 28 38 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 HA 20 20 20 30 48 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 M 42 52

LX

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.