Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150 3000 300 6000 10 L/min 12000 600 Features

ZQ-OM01301

60 -60 40 Air consumption -40 30 -40 Suction flow rate 20 -20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 Supply pressure [MPa] Suction flow rate [L/min (AMR) ] The flow characteristics curve shows the relationship between the vacuum pressure and the suction flow of the ejector.

TA301

VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2.

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings 4/5 PORT SOLENOID VALVE. SS5Y5 10 STA MANIFOLD BASE. 1.33000 lb. VVM.

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings 4/5 PORT SOLENOID VALVE. SS5Y5 10 STA MANIFOLD BASE. 1.38200 lb. VVM.

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings 4/5 PORT SOLENOID VALVE. SS5Y5 10 STA MANIFOLD BASE. 1.36600 lb. VVM.

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings 4/5 PORT SOLENOID VALVE. SS5Y5 10 STA MANIFOLD BASE. 1.73500 lb. VVM.

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, SS5Y5 MANIFOLD WITH 10 STATIONS, 4/5 PORT SOLENOID VALVE, VVD, 0.70049 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, SS5Y5 10 STA MANIFOLD BASE, 4/5 PORT SOLENOID VALVE, VVM, 1.33 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, SS5Y5 10 STA MANIFOLD BASE, 4/5 PORT SOLENOID VALVE, VVM, 1.33 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, SS5Y5 10 STA MANIFOLD BASE, 4/5 PORT SOLENOID VALVE, VVM, 1.73500 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, SS5Y5 10 STA MANIFOLD BASE, 4/5 PORT SOLENOID VALVE, VVD, 1.33000 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, SS5Y5 10 STA MANIFOLD BASE, 4/5 PORT SOLENOID VALVE, VVM, 1.31300 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, SS5Y5 10 STA MANIFOLD BASE, 4/5 PORT SOLENOID VALVE, VVM, 1.73500 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, SS5Y5 10 STA MANIFOLD BASE,NATURAL COLOR, 4/5 PORT SOLENOID VALVE, VVM, 1.33 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, SS5Y5 10 STA MANIFOLD BASE, 4/5 PORT SOLENOID VALVE, VVD, 1.366 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings, SS5Y5 10 STA MANIFOLD BASE, 4/5 PORT SOLENOID VALVE, 1.33 lb

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings 4/5 PORT SOLENOID VALVE. SS5Y5 10 STA MANIFOLD BASE. 1.366 lb. VVM.

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side or bottom ported , Available with external pilot , Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring , One-touch fittings 4/5 PORT SOLENOID VALVE. SS5Y5 10 STA MANIFOLD BASE. VVM.