Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Digital Flow Switch (Integrated display type)

Max. 1 NL/min 10 NL/min PF2A710 3.5 CFM x 10-2 35.0 CFM x 10-2 5 NL/min 50 NL/min PF2A750 18 CFM x 10-2 176 CFM x 10-2 10 NL/min 100 NL/min PF2A711 3.5 CFM x 10-1 35.5 CFM x 10-1 20 NL/min 200 NL/min PF2A721 7 CFM x 10-1 71 CFM x 10-1 50 NL/min 500 NL/min PF2A751 18 CFM x 10-1 176 CFM x 10-1 : Analogue output is based on the rated flow range at normal condition.

ZR

Without lead wire (housing and 3 sockets) ZS-10-A With lead wire ZS-10-5ALead wire length Note) When requiring a switch with lead wire of 5 m, indicate separately the model numbers of the connector type switch without lead wire and the connector assembly with 5 m lead wire. Nil 30 50 0.6 m 3 m 5 m Example) ZSE2-0R-15CN . 1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

10 units.

IDX-OM-W011

0.235 0.37 0.57 0.82 1.32 1.82 3.1 0.7MPa 35 32 10 550 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 3.0/3.1 5.7/5.7 4.3/4.6 (2) A AC200V 50/60Hz 1.2/1.3 1.2/1.3 1.2/1.3 1.5/1.5 3.4/3.0 3.4/3.1 (2) W AC100V,AC200V 50/60Hz 180/202 180/202 180/202 180/202 180/202 208/236 385/440 420

IP8101 Series

to 10 (832) Integrated time setting; -10 to 10 (833) Differentiation time setting; -10 to 10 Table 12 Amount of change when set value is increased/ decreased by 1 Set value is 0 or more Set value is less than 0 Prop. gain 10% 10% Integ. time 50% 10% Deffer. time 10% 10% 8: When automation calibration is performed, PID constant is automatically set.

Rotary Cylinder Series MRQ Size: 32, 40 1

Size/Standard stroke (mm) Rotating angle 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to pages 11-10-18 to 11-10-19 for middle and long strokes other than standard stroke.

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

High Purity Chemical Valve

16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PFA 46

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

16 20 25 12 16 20 25 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5

HRX-OM-Y098

-A-20 CH1) 8.5.2 HRL200-A-20 CH1 0.6 60 Circulating fluid outlet 0.5 50 Lifting head [m] 0.4 40 Pressure [MPa] 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow[L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series Documents 8-9 HRX-OM-Y098 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 70 Circulating

VQ5000

Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal 0 1 Coil voltage Function 1 2 3 Stations 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC sepecifications.

VDW

ass'y is a corrosion resistant construction. 3 N.C. for manifold Orifice size Voltage Orifice size (mm ) 1 1.6 1.6 2.3 3.2 2 3 4 Symbol Series 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 1 2 3 2 3 4 10 G Grommet Electrical entry 20 30 Manifold Option Blanking plate assembly Types 10, 20 VVCW20 3A Type 30 VVDW 0 3A 2 Series

NCQ8

Green LED lights up Indicator light Lead wires Oilproof vinyl heavyduty cord, 0.11" (2.7mm), 20" (0.5m) 2.3x 10-4in2 (0.15mm2) x 3 cores (Brown, Black, Blue) 2.8x 10-4in2 (0.18mm2) x 2 cores (Brown, Blue) Note 1) Refer to page 50 for auto switch common specifications. Note 2) Refer to page 50 for lead wire lengths.

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

Digital Flow Switch (Integrated display type) ( compatible)

Indicator light Output 1 and 2: Orange Power supply Used as switch output device 12 to 24 VDC, including ripple (p-p) 10% voltage Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 50 mA max.

One-touch Fittings

[mm] Weight [g] With a rib X Y Nylon Urethane M L1 Rib 3.2 1/8 KQ2L23-01mS1 10 7.1 6.7 9.5 10 14.5 16.7 17.2 13.3 3 2.5 2.5 4.6 1/4 KQ2L23-02mS1 14 7.1 6.7 9.5 10 14.5 21.2 20.1 13.3 3 2.5 2.5 14.1 D1 4 1/8 KQ2L04-01mS1 10 8.2 7.7 10 10 14.8 16.2 17.2 13.3 4.6 3.3 3 4.8 V 1/4 KQ2L04-02mS1 14 8.2 7.7 10 10 14.8 21.7 21.1 13.3 4.6 3.3 3 14.3 V D2 A L2 6 1/8 KQ2L06-01mS1 10 10.4 9.7 12 10

PFxx-OMX0007

L/min 20 to 2000 L/min Instantaneous flow 10 to 1050 L/min 20 to 2100 L/min Set point range Accumulated flow 0 to 999,999,999,990 L Flow specifications Instantaneous flow 1 L/min 2 L/min Minimum resolution Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.)

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.1 0.1 0 0 5 0 10 15 20 25 10 0 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (4 Hz) PAF5413 Air Consumption (3 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) SUP = 0.5 MPa 300 SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10