Fieldbus system EtherNet/IP compatible SI Unit

) Monitor lower limit value 0 to 65535 (Low byte first) 12..13 0..7 (Ch0 out) Upper limit value 0 to 65535 (Low byte first) 14..15 0..7 (Ch0 out) Lower limit value 0 to 65535 (Low byte first) 16..17 0..7 (Ch0 out) Fault value 0 to 65535 (Low byte first) 18..19 0..7 (Ch0 out) Idle value 0 to 65535 (Low byte first) 20..21 0..7 (Ch1 in) Monitor upper limit value 0 to 65535 (Low byte first) 22

EXxx-OMU0020CN

EX245-DY1-X37 EX245-DY1-X37 . 4-5 EX245-DY1-X37 Force to OFF Force to ON Hold last state Digital Output 0 Force to OFF Force to OFF OFF Force to ON ON Hold last state Force to OFF Force to ON Hold last state Digital Output 1 Force to OFF Force to OFF Force to ON Hold last state Digital Output 7 Force to OFF 22 No.EX-OMU0020CN 4.3.

EXxx-OMQ0015CN

No.EX-OMQ0015CN PROFINET SI // EX600-SPN# EX600-ED# 2 8 9 10 12 12 14 SI 15 15 16 16 LED 17 19 19 20 21 21 22 22 23 23 23 25 26 35 35 56 GSDML 56 56 SIEMENS PLC S7 57 62 65 66 66 71 -1No.EX-OMQ0015CN 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems

EXxx-OMN0035CN

FE FE IP67 -20No.EX-OMN0035CN-A (2)EX600-DXC 1 24 V() 3 0 V() 4 EX600-DXPC EX600-DXNC 1 24 V 1 24 V *1 DC24 V 3 0 V DC24 V 3 *2 0 V 4 4 2.7 k 2.7 k 1EX600-DXPC1 2EX600-DXNC1 IP67 2 OFF 0.5 mA () OFF 0.5 mA 3 0.5 mA SI -21No.EX-OMN0035CN-A (3)EX600-DXE 1 0 2 2 3 4 4 6 5 8 6 10 7 12 8 14 9 NC 10 24 V() 11 0 V() 12 0 V() 13 FE 14 1 15 3 16 5 17 7 18 9 19 11 20 13 21 15 22

Digital pressure switch for energy-saving control ejector

Product Number ZME-ZSE***-A Table of Contents Safety Instructions 2 Model indication and How to order 9 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 14 Installation 14 Wiring 15 Wiring 15 Internal circuit and wiring example 16 Easy Setting 17 Measurement mode 17 Function Setting 20 Function selection mode 20 Default setting 20 F0 Unit selection function 22

Digital Flow Switch (Remote type monitor unit)

No.PF-OMJ0018-F PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PFM3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Mounting and Installation 13 Installation 13 Wiring 15 Flow Setting 19 Function Setting 21 Default settings 21 F0 Selection of connected sensor Unit selection function 22

Flow sensor

Refer to the dimension drawing of the bracket (page 22) for mounting hole dimensions. -15No. PF-OMK0004-F Piping The required tightening torque of the fitting is 1 to 1.5 Nm. If the tightening torque is exceeded, the product can be broken. If the tightening torque is insufficient, the fittings may become loose.

PFxx-OMK0003CN

PF-OMK0003CN-E / / PFMV5## 2 10 12 13 14 14 16 17 18 19 19 20 22 -1No.

Digital Flow Monitor

No.PF-OMU0007-D PRODUCT NAME Digital Flow Monitor MODEL / Series / Product Number PFG3#0 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Mounting and Installation 12 Installation 12 Wiring 14 Flow Setting 20 Outline of Settings 21 Initial Setting 22 3 Step Setting Mode 26 Simple Setting Mode 28 Function Selection

Digital Flow Switch (Integrated display type)

PRODUCT NAME Digital Flow Switch (Integrated display type) MODEL / Series / Product Number PF2A7## Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Piping 16 Wiring 17 Outline of setting 19 List of outputs 20 Initialize mode 21 Setting procedure of initialize mode 22

Digital Flow Switch (Integrated display type)

Switch (Integrated display type) MODEL / Series / Product Number PF2A7##H Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 14 Piping 15 Wiring 16 Outline of setting 18 List of outputs 19 Function selection mode 20 F_0 Initialize mode 21 F_1 Selection of display mode 22

Digital Flow Switch (Remote type sensor unit)

22 Characteristics data 24 Dimensions 25 -1No.PF-OMO0014-D Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

IZ-OMU0031-CN

Doc.IZ*-OMU0031 / Series IZE11 2 7 8 10 10 11 14 15 18 18 F0 19 F1 OUT1 20 F2 OUT2 22 F3 22 F4 23 F5 24 F6 25 F98 26 F99 27 28 31 32 32 34 -1No.IZ*-OMU0031 1) (ISO/IEC)(JIS) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

A_HEC-OM-J017

21 20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch

HEC-OM-S008

21 20 High temp. cut off alarm ERR12 Low temp. cut off alarm ERR13 Unused Output failure alarm ERR15 D2 23 22 21 20 Upper temperature limit alarm WRN Lower temperature limit alarm WRN Thermostat alarm ERR14 DC power supply failure alarm ERR11 D3 23 22 21 20 External sensor failure alarm ERR18 Internal sensor failure alarm ERR17 During Auto tuning or auto tuning warning ERR19 Flow switch

K35-OMW0030

Construction Back portion of 125 to 250 head covers (1) (4) (5) (6) (7) (8) (9) (10) (11) (2) (33) (12) Air supply port Air exhaust port Top portion of 320 head cover (13) (14) (15) (16) (17) (27) (28) (29) (30) (33) Cross-section portion of 320 rod end (3) (18) (19) (20) (21) (22) (23) (24) (25) (26) (31) (34) (35) (32) No. Name Material / Surface treatment No.

AC Servo Motor Driver (Pulse input type/Positioning type)

Parameter Configuration using Setup software (MR Configurator2TM) .19 5.1 PC Setup software (MR Configurator2TM ) . 19 5.1.1 Installation Method . 19 5.2 Basic driver set-up for Initial Test Drive . 19 5.2.1 Start up the Setup software (MR Configurator2TM). 20 5.2.2 System Settings . 21 5.2.3 Model Selection . 21 5.2.4 Driver ON LINE Check . 22 5.2.5 Help Function . 22 5.3 Parameter setting

MX-OMP0051

2.1 MXQ8(A,C) MXQ6B M30.5 1.1 4.1 2.1 MXQ12(A,C) MXQ8B M0. 2.7 5.7 2.7 MXQ16(A) MXQ12B M0. 5.4 7.3 3.3 MXQ20(A) MXQ16B M50.8 5.4 7.3 3.3 MXQ25(A) MXQ20B M61 9.2 9 4 0.5mm , ,,, 8 3 0.02mm 2-2 5 [] 9 2-3 1.52 2 2-4 2-5 1 ISO VG302 10 2-6 , 2-7 Nm MXQ6(A) M36 1.1 MXQ8(A,C) MXQ6B M36 1.1 MXQ12(A,C) MXQ8B M48 2.7 MXQ16(A) MXQ12B M510 5.4 MXQ20(A) MXQ16B M612 9.2 MXQ25(A) MXQ20B M816 22

Cylinder with lock

Piston seal Fig. 21 Mounting of the rod seal and cushion seal Fig. 22 Mounting of the piston seal 4) When the support brackets are replaced, use a hexagon wrench as specified below.

POWER CLAMP CYLINDER

Refer to Replacement Parts (CKZ5NP19. , CKZ5TP.22) for the part numbers of the applicable stopper bolts. Stopper Bolt Tightening Torque Bore size Tightening Torque(Nm) 5063 45 to 65 2.