4 @1 w !8 w !8 w @1 !4 !3 @1 !4 !3 !8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.
D) In the state of C), adjust shim w so that the arm side block contacts the workpiece.
1 t Inlet i FGC i Inlet Drain port FGF FGF r Pressure gauge !2 r FGH Pressure gauge e Outlet FQ1 Outlet e FN y EB ES w w Fluid release Component Parts and Seal List Component Parts/Replacement Parts Part No. No. Description Material Qty. Applicable model Note 1) FGFS/L Stainless steel 1 Material No. Description Part No. Qty.
Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.
2 w (MIW12 to 32) Heat treatment/Special treatment Carbon steel Carbon steel Finger R shape snap ring !3 e Hard anodized Aluminium alloy NBR Cover Piston seal !4 r White anodized Aluminium alloy NBR Cap (W) Rod seal !5 t Heat treatment (MIW8 to 20) Stainless steel NBR Cam Gasket !6 y (MIW8 ... M-3P) Heat treatment (MIW25, 32) Stainless steel Roller holder u Plug !7 (MIW12 to 25 ...
R/W detected: NFC communication with the wireless unit is available. R/W undetected: NFC reader/writer is not identified or USB is not connected. Installation not performed: NFC reader/writer driver is not installed. R/W detection/ R/W no-detection button 5 Refer to Preparation befor use (2. Preparation befor use (page 7)).
3 y w o t RE A B !2 w r !0 !1 REC CX CY 25, 32 Option w @0 !1 !7 !8 !5 !9 MQQ M RHC !6 MK(2) (32 only) RS Q G Scraper Stroke adjuster RS H A No. Description Material Note Component Parts RZQ No. Description Material Note Hard anodized Piston seal NBR Aluminium alloy Body !0 q MI W S Rod seal NBR Piston assembly !1 w Heat treatment/Special treatment Gasket NBR (MIW8 ...
Take appropriate measures to avoid freezing of drainage, moisture, etc. q When the valve is installed in an atmosphere where there is a lot of dust, install a silencer into the port "3(R)". When dust enters the valve from the port "3(R), it may cause malfunction. w Operation method To stop the valve midway can cause malfunction.
2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.
R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M
Fittings & Tubing Air Cylinders Rotary Actuators Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Key Key +4 0 0 0 +4 0 9 y 9 A port B port 0 y A port B port a a w 0 w 1 y y e ay e k k 80 w of of y e e ke 1 g g n n f ay ra a o r n n w ge io io at ey n ot at R ra ot k R Angle adjustment range 3 n of io at e +4 0 ot R ng R ot ra at n 80 io io at 1 n ot R ay ra +4
Proper tightening torque Nm 7 to 9 12 to 14 22 to 24 Connection thread size R 1/8 R 1/4 R 3/8 Manual unlocking For 20 through 32 Preparing for Operation Manual unlocking bolt Lock ring Manual unlocking bolt Warning Locking direction Locking direction 1. Before starting operation from the locked position, be sure to restore air pressure to the B port in the pneumatic circuit.
Proper tightening torque Nm 7 to 9 12 to 14 22 to 24 Connection thread size R 1/8 R 1/4 R 3/8 Manual unlocking For 20 through 32 Preparing for Operation Manual unlocking bolt Lock ring Manual unlocking bolt Warning Locking direction Locking direction 1. Before starting operation from the locked position, be sure to restore air pressure to the B port in the pneumatic circuit.
4 t i w r !5 Rod end male thread CHQWB32 to CHQWB100 e o !0 y q !2 !1 !4 t w r !3 i !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
Servo malfunction indicator PL For power supply switching A surge killer should be attached to the electromagnetic contactor and relay. 5Ry Power supply OFF 1MC ON SUP 1MC 5Ry SGDE servomotor Motor 1 1MC SGDE servo pack R U V 2 M 1MC T 3 W 4 1CN 150 PULS 1 2 3 4 5 6 Be certain to ground.
Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.
Rod Center Mounting Basic Fool ,r ' flange , trunn~~~ 1 !
FGDE Seal kit w, r, y, !3, !6: 1 pc. each FGDT FGDF u, o, !1, !2, !3, !4, !5, !6, !7 : 1 pc. each Note) Only the FGD-CA003 and CA005 includes !8 element guide in the set.
Made to Order Specifications Oil-free specifications VCB X10 17-2-25 6 Series VCB Construction q w e r Component Parts t Material Description No.