No more element replacement!

Quantity Note NBR 5 m, Cylindrical type END100-005 1 FN11l1l 20 m, Cylindrical type END100-020 1 5 m, Step type END110-005 1 5 m, Cylindrical type END200-005 1 FN11l2l 20 m, Cylindrical type END200-020 1 5 m, Step type END210-005 1 7 Low Maintenance Filter Series FN1/FN4 Construction FN4102l-20-Sl r o t i q y OUT w u e IN DRAIN Component Parts Replacement Parts No.

Process Pump

Fluoropolymer Tubing Series TL/TIL Specifications TL0403 TL0604 TL0806 TL (Metric) TL1916 TL1210 TL1008 4 x 3 6 x 4 8 x 6 19 x 16 12 x 10 10 x 8 Model Tubing model O.D. x I.D. (Metric) TIL01 TILB01 TIL05 TIL (Inch) TIL13 TIL11 TIL07 1/8" Model Tubing model Nominal size (Inch) O.D. x I.D.

2/3 Port Valve for Various

Fluid Standard specifications Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x 102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 10-1 Pa) (V, M) Non-leak (106 Pam3/s or less) (V, M) JIS Symbol A C.O.

Thermo-con

Circulating FluidTypical Physical PropertyValues Fluorinated Fluids Density [kg/m 3] Physical property value Temperature 10C 20C 50C 80C Specific heat C [J/(kg K)] 1.87 x 10 3 0.87 x 10 3 1.80 x 10 3 0.96 x 10 3 1.74 x 10 3 1.05 x 10 3 1.67 x 10 3 1.14 x 10 3 Water Density : 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 133 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

3 m 5 m Note 6 stations{ AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 Cable 26 core x 28AWG 7 stations{ 8 stations{ Connector terminal no.

NAAMS Standards Compliant

2 x P H7 depth D 2 x 2 x MM depth J 2 x 2 x NPT 1/4 G Rc Hexagon socket head plug RD B [mm] Bore size B C D E GA GB J L LA LB MM N P Rubber cover Metal cover 50 92 48 12 13.7 95 166 12 376.6 155.5 78.4 78.4 M8 x 1.25 19 8 63 110 54 15 16.6 99 171.5 12 391.6 161 78 78.4 M10 x 1.5 22 10 Bore size PA PB PC PD R RA RB RC RD RR W XB XC Y Without switch cover With switch cover 50 45 45 5 40 46

9.8

s2 in X, Y, Z directions for 2 hours each (De-energized) Vibration resistance 100 m/s2 in X, Y, Z directions 3 times each (De-energized) Impact resistance 2% F.S.

Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

-U10/32-07 7.2 ASR ASQ M5 x 0.8 10/32UNF 8 693 AS-FSG Series Dimensions: Elbow Type Seal method: Sealant For R, NPT thread Indicator window direction: 0 Indicator window direction: 180 D3 W1 W2 X Y Applicable tubing O.D. d A L4 D1 L3 M L2 L1 T H (Width across flats) Metric Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom piping.

Model Selection 1

Linseed oil x Liquid Magnesium chloride aqueous solution Methane gas Methyl acetate M x x x x x x (Crystal) Gas Liquid Metal material is not allowed. Select a resin valve. x x x x Explosion proof degree of d1G1 When the explosion proof (d1G1) is designated, adopt the airoperated style. Alias: Methanol Methyl alcohol x x x Liquid Gasified at the boiling point of 23C.

Compact Cylinder

L x 100 L 100 100 (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQUB32-5 CQUB40-5 M5 x 65 L M5 x 65 L 65 65 -10 -10 x 70 L x 70 L 70 70 -15 -15 x 75 L x 75 L 75 75 -20 -20 x 80 L x 80 L 80 80 -25 -25 x 85 L x 85 L 85 85 -30 -30 x 90 L x 90 L 90 90 10.5 10.5 -35 -35 x 95 L x 95 L 95 95 -40 -40 x 100 L x 100 L 100 100 -45 -45 x 105 L x 105 L 105 105

High-precision Digital Pressure Switch ( compatible)

Remarks Bracket A ZS-50-A With 2 mounting screws M4 x 6 Bracket B ZS-50-B With 2 mounting screws M4 x 6 Orifice ZS-48-A ZS-31-B Straight: 5 m Lead wire with M12 connector ZS-31-C Right angle: 5 m -9No.PS-OMY0007-A Summary of Product parts Names of individual parts Body Power supply/output connectors: Connects the power supply/output lead wire.

High-precision Digital Pressure Switch ( compatible)

Remarks Bracket A ZS-50-A With 2 mounting screws M4 x 6 Bracket B ZS-50-B With 2 mounting screws M4 x 6 ZS-31-B Straight: 5 m Lead wire with M12 connector ZS-31-C Right angle: 5 m -8No.PS-OMV0004-H Summary of Product parts Names of individual parts Body Power supply/ output connectors: Connects the power supply/ output lead wire. Operation/Display: Refer to the table below.

High-precision Digital Pressure Switch

Remarks Bracket A ZS-50-A With 2 mounting screws M4 x 6 Bracket B ZS-50-B With 2 mounting screws M4 x 6 Orifice ZS-48-A ZS-31-B Straight: 5 m Lead wire with M12 connector ZS-31-C Right angle: 5 m -9No.PS-OMV0009-E Summary of Product parts Names of individual parts Body Power supply/output connectors: Connects the power supply/output lead wire.

1.63

YY YL Z MM ML NN OA OB OL 20 25 32 40 50 63 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 Rc1/8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 17 18 26 27 28.5 30 14 16 20 20 26 30 64 68 78 92 132 160 24 26 35 35 44 48 123 146 178 193 247 274 108 128 156 172 220 248 126 146 176 192 240 266 76 92 112 128 168 196 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 9 9 12 12 15 15 20 20 20 23 25

Clean Gas Filter

Construction q t e r w IN Description No.

MLGC

60 25 26 54 M8 X 1.25 depth14 35 80 105 50 93 12 M5 X 0.8 MGP 7 7 9 4 70 32 31 62 40 95 60 12 M10 X 1.5 depth18 125 M8 X 1.25 103 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 7 7 9 4 70 32 38 62 40 95 60 12 M10 X 1.5 depth18 125 M8 X 1.25 104 MGQ 8 8 11 4 38 47 67 45 75 12 150 M8 X 1.25 115 M12 X 1.75 depth 21 82.5 115 MGG Bore size (mm) WH U W Y T V Wq Z X 20 25 32 40 23 50 16 53 30* 112 30 146 182 MGC

HRX-OM-X037

9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label .9-24 9.7 Standards . 9-25 9.8 Daily

JXCx-OMX0009

[Unit: mm] If the current position is within the range between the W area end 1 and W area end 2, the WAREA will be turned ON. * If W area output end 1 >W area output end 2, the alarm Parameter W-AREA1 XX Stroke (-) to Stroke (+) of the basic parameter ALM will be activated.