AS-FPQ/AS-FPG 2 Speed Controller for Clean Room Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type Parts list No.
4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5
B A Auto switch mounting bracket A-A B-B Dust seal band type Seal band holder roller specification C No.
a Pr: Flow/temperature measurement value and pressure set value PD: Flow/temperature measurement value (process data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 4 L 0.004 0 16 L 0.016 0 L/min 40 L 0.04 0 100 L 0.1 0 250 L 0.25 0 PF3W7 4 L 0.001057 0 16 L 0.004227 0 G/min 40 L 0.01057 0 100 L 0.02642 0
l m l B Bore size (mm) Clevis Knuckle Part no. d (Drill through) Bore size (mm) Part no. d H B C D Dd9 L m l Cotter pin CJ1 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 Note 1) Cotter pins and flat washers are included.
min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) ZMA10H ZMA13H Exhaust Characteristics Exhaust Characteristics Flow Characteristics Flow Characteristics Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure
Supply valve (N.O.), and release valve Air operated valve (supply valve), Port size connection M3 x 0.5 Air operated valve (supply valve), Port size connection M5 x 0.8 Air operated valve (supply/release valve), Port size connection M3 x 0.5 Air operated valve (supply/release valve), Port size connection M5 x 0.8 Without valve Nil B Non-locking push type Locking slotted type Light/Surge voltage
Bore size (mm) Part no. l m L d Dd9 H B C D Applicable cotter pin CJ1 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 Note 1) When using cotter pin, flat washer is used together.
Panel adapter B ZS-22-02 Specifications PF2W300/301 PF2W330/331 Model Flow rate measurement range Note 1) 0.35 to 4.5 l/min 1.7 to 17.0 l/min 3.5 to 45 l/min 7 to 110 l/min Set flow rate range Note 1) 0.35 to 4.5 l/min 1.7 to 17.0 l/min 3.5 to 45 l/min 7 to 110 l/min Minimum set unit Note 1) 0.05 l/min 0.1 l/min 0.5 l/min 1 l/min Accumulated pulse flow rate exchange 0.05 l/pulse 0.1 l/pulse
2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam
Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .
Note) Component parts Aoolicable manifold base MBF261--3;-18 M a n i i o l d b l o c k O , C l a m p O ' O o r i n g O ' O ' O ' O Adapter O , Pin housing. Guide. Insertllug lead wire Plug-in type Connector lead wires o Manilold block assy ' :o-side ports A, B l-1l8 P A, B bottom 2-1l8 P, A, B bottom w/ (114 A, B side) MBF261.-3r-1A M a n i f o l d b l o c k O , C l a m p O , @ .
JAS Series How to Order Port size M3 M3 x 0.5 M5 M5 x 0.8 U10 10-32UNF JAS L E A 04 M5 JAS L E A S 04 01 Seal method Type L Elbow Nil Without sealant S With sealant Control type1 Port size E Meter-out S Meter-in 01 1/8 1 Meter-out and meter-in types can be visually identified by the color of the knob.
X500 AC (50/60 Hz) 1 2 3 4 7 B DC 5 6 24 VDC 12 VDC X600 TRIAC output specification (Refer to page 14.) 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC PE port EA/EB port VF1000 VF3000 > VF5000 > A, B port size VF5000 > > VF1000 > > VF3000 > > Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 Refer to Made to Order (Page 14) when piping to PE port is required.
Verify the specifications before use. 5 Branch port B (COM B) 4 (Input: Max. 32 points/Output: Max. 32 points per branch) Number of branches Connect the SI unit (with manifold valves) or input unit using a branch cable.
together B Basic Z Basic (without trunnion mounting female thread) L Axial foot F Rod ange G Head ange U Rod trunnion T Head trunnion D Clevis Number of auto switches with the product, but not assembled Nil 2 pcs.
detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item dt HED < For 400 V type and option B [With earth leakage breaker]> 3.
VEX SRH Product Not Applicable to the ASME Standard ASME Standards Compliant Product SRP VBAT 05 N A 1 E V X105 Product not applicable to the ASME standard VBAT 05 N 1 A X11 SV SRF ITV Tank internal capacity Tank capacity Option Symbol Internal capacity 05 5 L 10 10 L 20 22 L 38 38 L Material Option IC Symbol Option Nil None V Drain valve Symbol Internal capacity 05 5 L 10 10 L Symbol Option
When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to described by l (liter). 1 dm3 = 1 l .