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Holding forces very Holding force F [N] Workpiece thickness t [mm] depending on the material and shape of the workpiece. Please perform a holding test referring to the value selected based on the graph. 9 - 3-4. Dimensions Refer to P13, P14 and P15 for the dimensions of the magnet gripper, valves and auto switches. 10 - 3-5.

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

The ZSE2 series is a compact, pressure switch (for vacuum pressure) and can be integrated with ZX or ZR vacuum systems. The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., DIGITAL PRESSURE SWITCH, VACUUM SWITCH, ZSE30, ZSE30A, N63, 75 lb

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 03 (3/8), Option: Standard, Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: Standard, Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 03 (3/8), Option: D (N.O. Float Type Auto Drain), Attachment: T (T-Interface), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body Hexagon lock nut Round lock nut J Nil Lock nut option Body size Indication symbol Panel mount type Symbol M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Made to Order Refer to page 622 for details. Applicable tubing O.D.

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6

V Voltage dV dt = Voltage ratio Voltage rise % on zero-cross point dV t Time dt 3.3 Installation HRL Series 3-10 HRX-OM-W060 Chapter 3 Transport and Setting Up Power supply specifications, power supply cable and earth leakage breaker Prepare the power supply shown in the following table.

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y :DIN +-No.1 No.2 T :68mm E :2.32.8mm D :68mm Y :4.57mm AB+ B+COM -COM ET :1.25-31.25-3S1.25Y-3N 1.25-31.25-3S1.25Y-3N1.25Y-3S 1.25Y-3S(D Y ) -8No.VFR2000-OMM0001 3.23.7mm ( 0.33mm ~ 0.2 2 1.7mm ( ) (1mm) -9No.VFR2000-OMM0001