High Vacuum L Type Valve Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 6 XL*-OMI0011-E 3.
Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across
Model AU ALU ALHU F R Barb fitting M3, M5 M3 M5 Barb elbow Barb one-touch Reducer Removing tubing Withdraw the sleeve straight along the tubing. Use a tool such as long-nose pliers if it is difficult to pull out by hand. 1. Withdraw the tubing straight. 2.
Effective area at supply side (mm2) PA 44 38 32 4 2 (A)(B) 4 2 (A)(B) Single Double S at P1=0.7MPa/P2=0.5MPa PB 38 40 31 Number of pilots Effective area at exhaust side (mm2) AEA 5 1 3 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 90 4 2 (A)(B) 4 2 (A)(B) 77 S at P2=0.5MPa BEB 5 1 3 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) How to Exchange Air Operated Valves Loosen set screw and take air operated valve out vertically
(A)(B) (A)(B) Rc 1/8 4 2 4 2 (kg) 0.83 5 1 3 5 1 3 (mm2) PA 44 38 32 (EA)(P)(EB) (EA)(P)(EB) (A)(B) (A)(B) P1=0.7MPa,P2=0.5MPaS PB 38 40 31 4 2 4 2 (mm2) AEA 90 5 1 3 5 1 3 P2=0.5MPaS BEB 77 (EA)(P)(EB) (EA)(P)(EB) ()( ) 2.8N m 7 VFR3000-OMY0001 VFRA3000,4000 3 VFRA3000 VFRA4000 3 1(P) 8 VFR3000-OMY0001 R , 9 VFR3000-OMY0001 No. 1ISO VG 32 R (1) (2) (3) (4) (5) (6) 10 VFR3000
fitting Elbow with One-touch fitting Bulkhead with One-touch fitting Symbol M F N H L E Socket/Plug designation S P Socket Plug Piping port size variation Male/Female thread type One-touch fitting type Nut fitting type Thread size M5 x 0.8 R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 Applicable tubing O.D
M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.
CKZ25 53B781EL R 1) Mount the top cover to the clamp cylinder, then tighten to the specified tightening torque below. The top cover kit includes a top cover and mounting brackets.
20m 5 5m 5 C C 5m 3 00 3 00 500 500 600 600 7 00 7 00 800 800 900 900 1000 1000 1 2 00 1 2 00 1500 1500 1800 1800 2000 2000 LEFB16 LEFB16 LEFB25 LEFB25 () R R LEFB32 LEFB32 S S / P.38 5.3 <> NPNPNP LEFS16A-100 NPN -14- 2.4. 16/25/32 40 22 21 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18 8 A 19 9 B 20 10 21 11 22 1 12 2 13 3 14 4 15 5 16 NBR 6 17 7 18
1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.
hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90
hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90
Leakage voltage Caution Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as 3% or less of the rated voltage. 3.
Resister Caution LED: Light emitting R: Resister Connection 1.
(1 ) 2. 3. 0 12 2 13 R 13 R R (GFCI) GFCI 1 GFCI 13-2 13-1 1. 2. 3. 4. GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.
32 R V7 B 200 N S 3 M2 Motor type Motor mounting Size Symbol Type Output(W) Size Compatible driver Nil In-line 25 32 40 V6 100 25 LECYM2-V5/LECYU2-V5 R Right side parallel AC servo motor V7 200 32 LECYM2-V7/LECYU2-V7 L Left side parallel Absolute encoder V8 400 40 LECYM2-V8/LECYU2-V8 Lead[mm] Motor option Stroke Symbol LEKFS25 LEKFS32 LEKFS40 50 50 Nil Without option H 20 24 30 to to B With
Working Principle Diagram VY1 Pressure display VBA VBAT Output signal Power supply i Control circuit AP100 Input signal w Exhaust solenoid valve q Air supply solenoid valve e Built-in regulator Built-in regulator EXH Solenoid valve EXH P u Pressure sensor t Diaphragm r Pilot chamber EXH y Air supply valve SUP OUT 959 ITVH2000 Series ITVH2000 Series Linearity Hysteresis 2.5 1.0 Output deviation