0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.
4 @3 #2 #7 t @7 $4 !5 @4 !8 @0 !7 !9 i @2 q r y #0 #9 $1 w A B $0 #3 @6 #8 @8 $3 #4 #5 $5 !0 u @5 !6 @1 !1 $5 o $7 e Section B (Tie-rod for unit attachment) Section A (Release piston bushing) #1 !2 !2 !2 100 80 63 50 40 32 80, 100 Description Material Qty. Note Component Parts No. No.
Chromated Aluminum alloy 1 7 Bushing retainer HYCB32-PS Chromated Aluminum alloy 1 8 Magnet holder HYCB40-PS Set of nos. above !5, !6, !7, !8 and @1 Stainless steel 1 9 Rod end nut HYCB50-PS Zinc chromated Steel 2 10 Cushion ring HYCB63-PS Stainless steel 1 11 Piston nut Place the seal material symbol in .
Specifications PF2W540/540T--1 PF2W200/201 Model PF2W511--1 Applicable flow rate sensor PF2W520/520T--1 PF2W504/504T--1 0.35 to 4.50 L/min 1.7 to 17.0 L/min 3.5 to 45.0 L/min 7 to 110 L/min Flow rate measurement range Note 1) 0.35 to 4.50 L/min 1.7 to 17.0 L/min 3.5 to 45.0 L/min 7 to 110 L/min Set flow rate range Note 1) 0.05 L/min 0.1 L/min 0.5 L/min 1 L/min Minimum set unit Note 1) Accumulated
Applicable shaft type: W (mm) L2 Y Size (mm) CRB2 10 X L1 3 to 8 5 (8 Y) to (Y 1) Size CRBU2 10 15 3 to 14 9 (14 X) to (X 1) 3 to 9 6 (9 Y) to (Y 1.5) Y = L1 = 15 20 10 (18 X) to (X 1.5) 5.5 to 18 3 to 10 7 (10 Y) to (Y 1.5) L2 = CRB1 20 30 10 (20 X) to (X 1.5) 7 to 20 5 to 13 8 (13 Y) to (Y 2) X = 30 40 10 (22 X) to (X 1.5) 7 to 22 7 to 15 9 (15 Y) to (Y 4.5) MSU
5Pressure sensor assembly ZK2 VA1S A 8 1 ZK2 PS A One-touch fitting size Rated pressure range and specifications 6 8 7 9 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Metric size 0 to 101 kPa, Output: 1 to 5 V, Accuracy: 2% F.S. or less 100 to 100 kPa, Output: 1 to 5 V, Accuracy: 2% F.S. or less 1 Inch size 3 !
4: Rc 1/4 thread 2n-Rc 1/4, 3/8, C8, C10, C12 {4(A), 2(B)} B A 7 SMC SMC SMC SMC SMC SMC B A 2 4 B A 6 B A B A 4 2 Manual override B A 5 B A B A 6.5 L1 2 4 B A 4 B A B A 2 4 B A B A 3 B A D side 2 4 B A 2 A A 2 4 B A 1 A SMC A 4 2 Indicator light R4.5 Stations 12 X (External pilot port) Rc 1/8 9 9 12 106 10 16.5 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 (Pilot EXH port) Rc 1/8 SMC 1
1 1 1 3 7 3 7 Note 1) Solid state switch D-M9/M9W: with 1 pc.
10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16
Material: Carbon steel 20 Series MU Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V B B A A Hs Hv D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-A9 D-M9V D-M9WV D-M9AVL Size A B A B Hs Hv A B A B Hs Hv 25 5 5 5 5 7.5 27.5 1 1 1 1 32 5 5 5 5 14.5 30 1 1 1 1 40 5.5 5.5 5.5 5.5 16.5 37 1.5 1.5 1.5 1.5 50 7
11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B
Connection thread Proper tightening torque (Nm) Piping Tightening Torque M5 1.5 to 2 Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 1 1/4 40 to 42 Rc 1 1/2 48 to 50 Rc 2 48 to 50 5. Confirm the leakage of fluid. Confirm that the hose or tubing is not pulled out and that there is no leakage in the fitted parts.
Content of diagnosis 0 There is an error in unit 0. 1 There is an error in unit 1. 2 There is an error in unit 2. 3 There is an error in unit 3. 4 There is an error in unit 4. 5 There is an error in unit 5. 6 There is an error in unit 6. 7 There is an error in unit 7. Unit diagnosis byte1 Bit No.
10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-
1 point: 0.5 A or less (2) 1 unit: 1 A or less (3) Total current of OUT0 to 7: 1 A or less Meet the three following conditions: (1) 1 point: 0.5 A or less (2) 1 unit: 3 A or less (3) Total current of OUT0 to 7: 1.5 A or less Max. load current Total current of OUT8 to 15: 1 A or less Total current of OUT8 to 15: 1.5 A or less Enclosure Short circuit installed Current consumption 50 mA or
3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -18No.
ZP 10 UT ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C
0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.
1 !7 i @6 !0 r @4 e o t w @7 !0 y CL 16: 25 stroke 20, 25: Under 75 stroke MLGC !8 CNA !3 16: Over 50 stroke CB 25 stroke CV/MVG 20, 25: Over 100 stroke @1 @0 @2 20, 25: Over 50 stroke CXW CXS Cushion valve section CXT MGPM32 to 100 MGPL32 to 100 MX @5 i !6 !5 u q !4 !2 @3 !9 !1 !7 MXU @6 !0 t @4 @7 @5 @8 !
No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.