Number of tightening rotations Thread Model MS-5AUMS-5HMS-5P MS-5J MS-5N MS-5UN MS-5ALHU-6 MS-5HLHMS-5ATHU-6 MS-5ALHU-3, 4 MS-5UL MS-5UT MS-5ATHU-3, 4 Approx. 1/6 to 1/4 rotation Note) Use of Tube with Barb Fitting Caution 1. Cut the tube perpendicularly to the tube axis to a little longer length than required (use tube cutter TK-1, TK-2 or TK-3). 2.
3 u o !2 !1 !0 !5 !6 !4 !7 !8 Component Parts No. Description Note 1 Ionizer ZVB20: 1 unit, ZVB40: 2 units, With diffusion nozzle 2 Additional air blow nozzle ZVB20: 2 pcs., ZVB40: 4 pcs., Nozzle diameter: 1.0 No.
None With flow control With micro by-pass With flow control & micro by-pass With pop-up indicator With indicator light High back pressure (60psi)(.42MPa) Nil 1 2 3 4 5 6 Applicable Tubing Size Body Class Body Class Connecting Tube Outside Diameter Connecting Tube Outside Diameter Symbol 2 3 4 5 6 Symbol 2 3 4 5 6 Metric Sizes 04 06 08 10 12 19 25 00 Inch Sizes 03 05 07 11 13 19 25 00 4 6
DIN (SY SY ) (1) 6 ,2 (M4X5)DIN (EX600-ZMB2) EX600 0.70.8 Nm (2)2 M4X14EX600-ZMA2 0.70.8 Nm (3)DIN DIN (4)DIN DIN (5)M4X20(EX600-ZMA2) 0.70.8 Nm -13No.EX-OMN0035CN-A M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180(1/2) (1) (2) (3) A B C D-sub (1) (2) (3)2 0.6 Nm -14No.EX-OMN0035CN-A -15No.EX-OMN0035CN-A () 2.5 mm0.4 mm 0.081.5 mm 2(AWG1628) 56 mm EX600-ZT1 -16No.EX-OMN0035CN-A
Applicable bore size (mm) Snap ring l A1 NDH10 MM NX R1 U1 Dd9 t d L m Dd9 t d L m l +0.048 0 0.030 0.060 0.030 0.060 I-J010SUS 10 CD-J010 10 CD-J010 10 3.3 3.3 3.3 C type 3.2 C type 3.2 8 21 M4 x 0.7 3.1 8 9 3 15.2 12.2 1.2 0.3 3 15.2 12.2 1.2 0.3 0.030 0.060 +0.048 0 0.030 0.060 I-J016SUS CD-Z015SUS IY-J015SUS 16 16 16 5 5 5 C type 5 C type 5 8 25 M5 x 0.8 6.4 12 14 4.8 22.7 18.3 1.5 0.7
0.70.8 Nm (EX600-ZMA2) (EX600-ZMB2) (3)DIN DIN (4)DIN (5)M4X20(EX600-ZMA2) 0.70.8 Nm DIN DIN (EX600-ZMA2) 6 -14No.EX-OMN0027CN-D M12 M8 M12 SPEEDCON SPEEDCON (1)(/)BA (2)C (3)B180 (1) (2) (3) A B C (EX600-ZT1) -15No.EX-OMN0027CN-D SI EX600-S A SI 1 PNP(-COM) 2 NPN(+COM) PR PROFIBUS DP No. 1 LED 2 3 4 (BUS OUT) 5 6 (PCI) 7 8 9 10 11 (BUS IN) 12 (2
CE*-OMQ0013-F / / 1 7 1-1 1-2 1-3 1-4 8 2-1 2-2 2-3 13 3-1 3-2 3-3 15 4-1 4-2 4-3 17 5-1 5-2 5-3 21 6-1 6-2 22 7-1 7-1-1 7-1-2 7-2 7-2-1 7-2-2 7-3 7-3-1 7-3-2 7-3-3 INPUT 7-3-4 OUTPUT 7-3-5 7-3-6 28 36 9-1 9-1-1 9-1-2 9-1-3 9-2 9-2-1 9-2-2 9-3 9-3-1 45 10-1 10-2 46 11-1 11-2 50 12-1 CE2/CEU2 / *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power
In case of 1 digit = 1 kPa, it is displayed like 1, 2, 3 . . . 99, 100, with displaying every 1 kPa. Internal voltage drop Caused by the resistance of an electrical part in an electronic circuit. Example is a 2-wire pneumatic pressure switch. 16-13-3 11 Glossary of Terms K Key lock mode It is the function to prevent from malfunctioning.
Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw
CQ-L080 CQ-L100 Yes A79W Grommet 3-wire (NPN) F9NV F79 F7NV F9N IC circuit 5V, 12V 3-wire (PNP) Grommet F9P F9PV F7P F7PV F9B F9BV J79 F7BV Solid state switch 12V 2-wire Note 1) When ordering the foot bracket, order 2 pieces per cylinder.
t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!
Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.
Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 598 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Seal method Nil Without sealant S With sealant Type 2 Elbow 3 Universal Note) Face seal type is used for the G thread type. Select Nil/Without sealant.
Note 2) Use 1/8" tube. Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.
Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread
Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE SET reduction
NPN, AND connection + Brown (Red) Brown (Red) Black (White) Blue (Black) Load Black (White) Switch 1 Switch 1 Load Relay Blue (Black) + + + + Switch 2 Switch 2 Relay Relay contact Switch 3 Relay Switch 3 2-wire 2 pcs.
(1) (2) (3) (4) (5) (6) OUT1 (1)OUT1OUT2 (2)+(3) (4)/ () (5)IP8000(2) (6)IP8100(3) 15 7-1 5 O K O O K K (1) 0% (4mAD (1) 0% (4mAD C) C) (2) 100%(20 (2) 100%(2 mADC) 0mADC) (3) 0%(1) (3) 0%(1) (4) (4) 16 7-2 / () mADC 17 18 18OUT1OUT2A 1718 ( 1/16-1 ) 11-1(/) 7-3 A 1M1/8OUT117 1/8 1/81/4 2A(17) SUPOUT1 A 17 8.
) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20