Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.
CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.
ZSE50F / ISE50 1 x 10 -5 Pam3/s ZSE60F / ISE60 1 x 10 -10 Pam3/s IP65 Enclosure Panel mount With bracket Option Panel mount + Front side protection cover To confirm working pressure of hydraulic cylinder Application examples To confirm adsorption of workpieces containing water To confirm primary pressure of cleaning line 16-2-26 3 High precision and high resolution 1/2000 (0.1 kPa) Positive
Nylon Urethane Effective orifice(mm 2) Weight (g) T (M) L Mounting hole M1 M2 KCE04-00 KCE06-00 KCE08-00 KCE10-00 KCE12-00 4 6 8 10 12 M12 1 M14 1 M16 1 M20 1 M22 1 14 42 13 15 17 21 23 18 19 21.5 24 25.5 16 17 18.5 21 22 21 30 39 84 115 2.6 6.8 13.1 20.4 30.4 2.6 6.8 16.2 25.6 35.4 17 19 24 27 45.5 52.5 59.5 63.2 Bulkhead female union: KCE Thread Rc (PT) 4 6 8 10 12 Effective orifice(mm
Type Pneumatic 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Specifications Mountable Auto switch Pneumatic Type Refer to pages 11-7-10 to 11-7-12 for dimensions.
Type Pneumatic 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Specifications Mountable Auto switch Pneumatic Type Refer to pages 11-7-10 to 11-7-12 for dimensions.
Table (10) shows the port size. Table (10) Port size Size Port size 50 to 100 Rc1/4 Perform followings before piping.
AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.
Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.
Model XT13-394-06 XT13-394-10 INA-48-1-06 INA-48-1-10 INA-48-16-10 INA-48-16-06 INA-48-58-10-H INA-48-58-06-H Port size Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Rc3/4 Rc1 Relief mechanism Non-relief Relief Non-relief Fluid Deionized water (Pure water) Air, N2 Proof pressure 1.9 MPa 1.5 MPa Max. operating pressure 1.3 MPa 1.0 MPa Set pressure 0.1 to 1.0 MPa 0.05 to 0.5 MPa 5 to 60C Ambient and fluid
Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25 0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.
DC1224 V10% DC1224 V 10 DC(+) DC(-) 8 DC1224 V10% DC1224 V10% DC(+) DC(-) 9 ( ) 10 11 -71No.PS-OMU0002CN-D No. / 5 m / 12 1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -72No.PS-OMU0002CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -73No.PS-OMU0002CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -74No.PS-OMU0002CN-D ZSE20A() ZSE20AF() ISE20A() 0.0-101.0 kPa -100.0100.0
1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4
For precise pressure detection, allow the product to warm up for 10 to 15 minutes. Check if the product satisfies the specified accuracy 10 minutes after supplying power. Warming up inadequate Product failure Replace the product. Unit s selection function is not available for fixed to SI units type.
121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5
ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 1 unit 2 units 10 units ZSE40 ISE40 ZSE10 ISE10 Master Slave (Max. 10 units) ISE70 Wiring example when using ZS-38-U Slave-side sensor Master-side sensor Slave-side sensors (up to 10 sensors) ZSE80 ISE80 Master-side sensor 1 unit 2 units n units (Up to 10 switches) Brown: DC+ PS DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC
port Rc (G , NPT ) 1 8 1 8 1 8 Finger opening port O 34 S 7.5 30 20 4 x M6 x 1 bottom hole dia. 5.1 through Thread for mounting attachment MHT2-40DZ 2 x M8 x 1.25 thread depth 12 Mounting thread 20 40 4 x M6 x 1 thread depth 10 Mounting thread 18 37 48 10 4 x M8 x 1.25 thread depth 10 Mounting thread (Both sides) 7 7 Open 27 Closed 3 40 0.2 96 82 52 5 24 60 74 40 0.2 29 54.5 (136.5) 42
40 42 97 IS ZSM With regulator + 2 port solenoid valve With 2 port solenoid valve PF2 IF Data SUP port on the right 97 Conduit terminal Conduit terminal 82 DIN connector DIN connector 0 0 T E S T E S 9 9 162 0.3 0.3 0.15 0.1 0.05 133 0.4 128 0.4 MPa 0.2 0 103 64.4 SUP port Rc, NPT, G 1/8 SUP port Rc, NPT, G 1/8 Throttle needle 25 40 10 42 With regulator + 2 port solenoid valve With 2 port
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).