HRX-OM-R026

Product Warranty HRSH Series 10-2 Revision Rev RDec.2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Size End width L: 2.0 to 2.4 [mm] End thickness W: 0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 584 a Programless Controller (With Stroke Study) LECP2 Series Dimensions Screw mounting (LECm2mm-m) 38 36.2 18.1 85 4.5 for body mounting 1.2 4.5 110 101 86 4.5 for body mounting DIN rail mounting (LECm2mmD-m) CN4 I/O connector 38 36.2 85 (11.5) SL CN3 encoder connector CN2

JA/JAH/JB/JS

(kg) A B C D E F G H Nominal size Pitch Standard: Heavy Load Type Hydraulic: Up to 7 MPa JAH40-16-150 JAH50-20-150 JAH63-24-150 JAH80-30-150 JAH100-39-150 JAH100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 22 28 32 42 52 61 25 31 35 45 55 50 59.5 66 79 96 96 9.5 11.5 13 14 16 16 19 24 27 30 36 36 16 16 20 22 24 29 32 32 41 46 55 70 52.5 64 74 94.5 112 118 1.5 1.5 1.5 1.5 1.5 1.5 85.5 101

Floating Joint

R Weight (kg) B C D E F G H 40 50 63 80 100 100 JAH40-16-150 JAH50-20-150 JAH63-24-150 JAH80-30-150 JAH100-39-150 JAH100-48-150 16 20 24 30 39 48 22 28 32 42 52 61 25 31 35 45 55 50 59.5 66 79 96 96 9.5 11.5 13 14 16 16 19 24 27 30 36 36 16 16 20 22 24 28 32 32 41 46 55 70 52.5 64 74 94.5 112 118 11000 18000 28000 54000 71000 71000 0.58 1.08 1.5 2.7 4.8 5.4 1.5 1.5 1.5 1.5 1.5 1.5 85.5 101

Suction Guard (Produced upon receipt of order) FHG Series

101 71 71 71 104 104 104 129 129 53 53 53 74 74 74 94 94 9 9 9 9 9 9 9 9 3.6 3.6 3.6 7.3 7.3 7.1 14.5 14.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.

Refrigerated Air Dryer

AMH AME AMF ZFC SF SFD LLB AD GD 101

Series AP3500

Vespel is a registered trademark of DuPont. 101 Air operated type (For low pressure) Diaphragm Valve for Ultra High Purity Series AP4500 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed or normally open LOTO option available as an option (AP4540) Indicator switch available as an option (AP4550) How to Order (Inlet) (Outlet) AP

AZ1000

2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21 600 Delivery pessure (kPa) -35 500 -48 400 Connections inch A (mm) -61 300 FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8 4.30 (109.2) -75 200 5.22 (132.6) -88 100 4.00 (101.6) 0 -101

51

Head Flange (mm) Bore size (mm) Standard stroke A AL D J B B1 C H1 H ZZ E F FX FD FT GA GB I KA MM NA P S 20 25 32 40 50 63 80 100 12 12.5 11 10.5 15 15 17 20 85 92 94 101 130 130 162 166 14.5 17.5 17.5 23.5 29 29 35.5 35.5 5 6 6 8 11 11 13 16 14 16.5 20 26 32 38 50 60 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 8 10 12

CHKD/CHKG

10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63 42 45 M30 x 1.5 9 30 58 125 90 67 23 66 7 68 135 80 80 57 60 M39 x 1.5 14 41 77 155 105 78 27 86 7 87 165 100 100 72 75 M48 x 1.5 21 50 101

Rotary Actuator/Vane Type

Note 5) These figures show the CRB2 series. 101 CRBm2 Series Auto Switch Mounting Operating Range and Hysteresis Operating range: q m The range between the position where the auto switch turns ON as the magnet inside the auto switch unit moves and the position where the auto switch turns OFF as the magnet travels the same direction.

Process Valve

Note 1) Note 2) Note 3) Note 4) Note 5) VNB VNB Specifications (Vacuum pilot type) Fluid Vacuum SGC 101 kPa to Atmospheric pressure Pilot pressure range Operating pressure range Pilot Solenoid Valve Specifications 101 to 47.9 kPa SGH Port size 6A to 25A 32A to 50A VO307-1 VO307D DZ1-Q Symbol (Vacuum pilot type) Pilot solenoid valve Note1) SF4--23 SF4D DZ-23-Q VNC Valve type Type N.C.

100

Vacuum pressure switch Compound pressure switch Pressure switch for vacuum with energy saving function Rated pressure range 0 to 101 kPa 100 to 100 kPa For details on compact digital pressure switch functions, refer to the Operation Manual of the ZSE10 series on the SMC website (https://www. smcworld.com).

Stability of suction position,

flats 22 ZP3E ZP3E A 32 61 32 50 ZP2 33 24 ZP2V 4 4 25.11) 5 22.61) 7 30 (Rotating angle) 30 (Rotating angle) ZP 83 80 103 100 ZPT ZPR XT661 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-TF80UMJB10 98.5 168.5 443 441 458 ZP3E-TF80UMJB30 123.5 193.5 472 470 487 ZP3E-TF80UMJB50 143.5 213.5 495 493 510 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-TF100UMJB10 101

Rotary Cylinder Series MRQ Size: 32, 40 1

Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

JA/JAH/JB/JS

(kg) A B C D E F G H Nominal size Pitch Standard: Heavy Load Type Hydraulic: Up to 7 MPa JAH40-16-150 JAH50-20-150 JAH63-24-150 JAH80-30-150 JAH100-39-150 JAH100-48-150 40 50 63 80 100 100 16 20 24 30 39 48 22 28 32 42 52 61 25 31 35 45 55 50 59.5 66 79 96 96 9.5 11.5 13 14 16 16 19 24 27 30 36 36 16 16 20 22 24 29 32 32 41 46 55 70 52.5 64 74 94.5 112 118 1.5 1.5 1.5 1.5 1.5 1.5 85.5 101

CXWM/CXWL

Theoretical Output (N) Operating pressure (MPa) Piston area (mm 2) Model Rod size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 CXWM106 101 20 30 40 51 61 71 81 91 CXWM1610 245 49 74 98 123 147 172 196 221 CXWM2012 402 80 121 161 201 241 281 322 362 CXWM2514 597 119 179 239 299 358 418 478 537 CXWM32Made to Order Specifications (For details, refer to page 8-31-1.) 20 980 196 294 392 490 588 686 784

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 40 32 25 20 40 32 20 CX 0 0 D0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

to 101 kPa], Option: None, Analog Voltage Output(V): 1 to 5 V DC