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12 Mini-free Mount Cylinder Series CUJ Proper Auto Switch Mounting Position (Detection at stroke end) (6, 8, 10 common) D-F8N/F8P/F8B D-M9N/M9P/M9B When detecting extended stroke end When detecting retracted stroke end 10 mm or more 10 mm or more (2) 1 1 3 7 Stroke 3 + Stroke 7 CUJ CU CQS Note 1) Solid state switch: D-M9 includes one auto switch.

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

IDFA Series 12-1 121 IDX-OM-W032 12 V 12-2 Drain tube (O.D. 10m) (10) IDFA22E,37E,55E,75E-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5sec OFF 30sec IDFA Series 12-2 122 IDX-OM-W032 12 V 12-3 1) 2) 3) 4) ON OFF 4 6 2 3 2 1 8 4 0.5 0.5 5 ON:SEC OFF:MIN 12-4 R 6-4 6-3 T 11-6 11-3 IDFA Series 12-3 123 IDX-OM-W032 13 13 13-1 / IDFA Series 13-1 13-1 D:2021/11 4-14-1

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry

R R 1. 2. 2 9 - 3-7 1 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 10 - 2 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 11 - M2.54 5 6 5~6mm 0.05~0.1 Nm90 D-Y59/Y69/Y7P/Y7PV D-M9(V) D-Y7W/Y7WV D-M9W(V) D-M9A(V)L MHL2-10D 0.8 0.3 MHL2-16D 0.5 0.4 MHL2-20D 0.5 0.7 ON MHL2-25D 0.5 0.6 OFF MHL2-32D 0.5 0.6 MHL2-40D 0.5 0.9 1. 2. 12 - 3-8

Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

(D-M9 only) Operation Environment Recommended Tool Description Model Wire stripper D-M9N-SWY * Stripper for a round cable (2.0) can be used for a 2-wire type cable. Warning (1) Never use in an atmosphere with explosive gases. Auto switches are not designed with explosion-proof construction. Never use in an atmosphere containing explosive gas since this may cause a serious explosion.

e) 47 - D 100 154 1. 2. 3. 4. 5. 6. 7. 8. -10603585% 48 - 155 5 156 49 - 16/ 161 / UL1310Class2 162 ON 50 - 5 () 51 - 163 50mm 164 () 52 - 165 166 D 100 167 53 - Revision history No.JXC-OMT0030CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior

M10 x 1.25 14 +0.08 0 7.5 2 10 M12 x 1.25 16 11.5 3 14.5 M14 x 1.5 +0.08 0 Trunnion mounting taps for the width across flats NA are not attached to 80 and 100 types. 18 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM 35 12 26 12 5 M4 x 0.7 depth 7 5 M8 x 1.25 Up to 200 14 13 8 15.5 2 18 12 6 40 12 31 12 6 5.5 M10 x 1.25 M5 x 0.8 depth

OUT() DC(-) DC(+) PSE57--28 420 mA N.C. 500 (24 V ) 100 (12 V ) OUT() DC(-) -13No.PS-OMS0004CN-D (A/D ) () 20 2030 -14No.PS-OMS0004CN-D PSE570 PSE573 PSE574 01MPa -100100 kPa 0500 kPa 3.0MPa 600 kPa 1.5MPa oC) oC) (25 ) 2F.S.(050 3F.S.(050 oC) oC) 3F.S.(-1060 4F.S.(-1060 PSE57PSE57--28 DC1224 V1010% 10 mA 420 mA 15 V 1 k 500 (24 V ) 100 (12 V ) (25 oC) 1.0F.S. 0.5F.S. oC)

FKM MHZAJ2-J6F Si MHZAJ2-J6S 4 Series MHZA2-6/MHZAJ2-6 Parallel Type/Compact Series Dimensions/(mm) Standard Type 1in = 25.4mm MHZA2-6 Double acting/Single acting Basic Type 12 Scale: 100% 5 2-M2 x 0.4 thread depth 4 (mounting thread) 2-M3 x 0.5 through (mounting thread) Prepared hole dia. 2.6 through (mounting hole) 0 -0.1 13.6 4 20 12 20 When closed 8 0 -0.4 When open 12 1 +0.022 0 7H8

(34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175 200 157 70 387 540 17.5 3 520

Name Alarm flag 1,2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Unused 1 ERR01 System error 1 2 ERR02 System error 2 3 ERR03 Back-up data error Alarm flag 1 4-10 Unused 11 ERR11 DC power supply failure 12 ERR12 Internal temperature sensor High temperature failure 13 ERR13 Internal temperature sensor Low temperature failure 14 ERR14 Thermostat alarm Alarm given off status

D A B Grommet with membrane Power cable outlet (17) Dimensions (mm) A 230 B C D Circuit breaker Model 32 B D IDFA4E, 6E, 8E, 11E IDFA15E1 67 179 43 258 77 158 C E A IDFA22E to 75E Power cable outlet (17) (Wire diameter 9 to 11) F (mm) Dimensions E D C B A F Model Signal cable outlet (Wire diameter 17) Grommet with membrane IDFA22E IDFA37E IDFA55E IDFA75E 59 125 40 25 46 39 60 Terminal block

Spacer 1 Stations Part no. 2 ISA-16-2 3 ISA-16-3 4 *1 ISA-16-4 5 ISA-16-5 6 *1 ISA-16-6 w Seal for extra station ISA-15 e Threaded plug with seal ISA-12-m 1 pc. Piping Part no. Rc1/8 ISA-12-A G1/8 ISA-12-C q Joint screws (2 pcs.) ISA-161 e Threaded plug with seal ISA-12*1: Spacers are included for 4 and 6 stations. Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

mm2) AEA 40 P2=0.5MPaS BEB 36 10 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 4 4 4 4 01F D 01C COM A B 1)8 2) +COM -COM 3) D U D 1 COM A B 1)8 2) +COM -COM 3)D U D 1 11 VFR3000-OMJ0001-A () X () [3(EB) 4(EA)] ( (PE) 12 VFR3000-OMJ0001-A No. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR3000-OMJ0001-A Revision history