Fitting Type: Connector, Size Combination: 3/8" x 1/4", Piping Type: Tube, Packaging: -

Type: Union Elbow, Size Combinations: 1/4" x 5/32", Fitting Type: -

Type: Union Elbow, Size Combinations: 3/8" x 1/4", Fitting Type: -

Type: Union Elbow, Size Combinations: 1/2" x 3/8", Fitting Type: -

Type: Union Elbow, Size Combinations: 3/4" x 5/8", Fitting Type: -

Type: Union Elbow, Size Combinations: 1" x 7/8", Fitting Type: -

Type: Union Elbow, Size Combinations: 6 x 4, Fitting Type: -

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Tube, out, Pipe/Tube-Protruded Connection Type: [Tube-Protruded, Union Tees] Tube Extension Straight Connector, Applicable Tube Outer Dia. (in) D (D1): 1/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 2

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Tube, out, Pipe/Tube-Protruded Connection Type: [Tube-Protruded, Union Tees] Tube Extension Straight Connector, Applicable Tube Outer Dia. (in) D (D1): 1/2, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 4

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Tube, out, Pipe/Tube-Protruded Connection Type: [Tube-Protruded, Union Tees] Tube Extension Straight Connector, Applicable Tube Outer Dia. (in) D (D1): 3/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 5

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Tube, out, Pipe/Tube-Protruded Connection Type: [Tube-Protruded, Union Tees] Tube Extension Straight Connector, Applicable Tube Outer Dia. (in) D (D1): 1, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body: 6

4-channel Flow Monitor (Remote type monitor unit)

Normal condition: Flow display which is converted in atmospheric pressure at 0 C. 5: Total accuracy when used with applicable sensor. -37No.PF-OMH0003-F PF2W20 Model PF2W20 PF2W504(T) PF2W520(T) PF2W540(T) PF2W511(T) Applicable sensor PF3W504 PF3W520 PF3W540 PF3W511 Rated flow range 0.5 to 4.0 2 to 16 5 to 40 10 to 100 L/min L/min L/min L/min Instantaneous Setting/display flow range 1 0.35

IZS30_eng

T Tungsten 3. Specifications 3-1.

FILTER REGULATOR

Insert the baffle so that concave on the valve guide could meet T convex on the baffle. And rotate it clockwise manually until feeling snap fit (approx. 110) to fix to the element. (For element convex side.) Mount the bolw assembly. Match the mating mark of the body and the bowl assembly to insert the assembly to the body.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 w t !1 !3 q u !0 !2 r y e !5 o !

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !4 Open condition Component Parts Note Note No. q Description Material No. Description Material Bushing B !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Apply the specified grease to the sliding part and T groove part of the finger. . Insert the piston in the T groove so that it will be hooked there. 4.

CLK1

Hs T (mm) Symbol BX BY D F GA GB L M N S T W Wc Ws Z ZZ Hs IA K Bore size 40 56 54 16 44 77 10 55 M12 x 1.5 86 112.5 57 5 39 27.5 114 228 46 47 14 50 64 64 20 55 78.5 10 58 M16 x 1.5 87.5 117 60 7 41 33 118.5 232.5 50 58 17 63 74 74 20 69 82 12 58 M16 x 1.5 91 120.5 67 5.5 48 39 122 236 56 72 17 12 Series CLK1 Accessory Dimensions Single Knuckle Joint Double Knuckle Joint 0.040 0.076 Hole

2–4

6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

D2 L1 L2 L3 M1 L4 H(1) A(2) D1 D2 L1 L2 L3 L4 T M1 Weight (g) Model Model Min.