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HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 2.2 (57) 0.16 x 0.20 (4 x 5) 15.4 (390) Power switch External temperature sensor connector Alarm output connector Display/Operation panel Communication connector Warning/Caution label 11.7 (298) Power connector 5.7 (145) Tank lid with gasket Power cable (Accessory) Model no. label Handle 4.0 (101) 2.0 (51) 5.7 (145) Handle 60

B C Dimensions (mm) Recommended flow (m3/min (ANR)) Model Applicable One-touch fitting size Effective area (mm2) Noise reduction (dB (A)) 6 (Series KQ) 6 (Series KQ, KJ) 1/4" (Series KQ, KJ) 8 (Series KQ) 8 (Series KQ) 10 (Series KQ) 10 (Series KQ) 12 (Series KQ) AN103-KM6 AN103-X233 AN103-X235 AN203-KM8 AN200-KM8 AN200-KM10 AN300-KM10 AN300-KM12 0.8 or less 7 37 11 15 25 1.0 or less 14 51

Indicator light (AC) When solenoid gets energized, indicator light illuminates, thus electrical states of the solenoid can be seen from the outside. 51 VA (64 VA ) 50 Hz Inrush Apparent power (VA) (Power consumption (W)) 45 VA (55 VA ) 60 Hz AC 17 VA (5.3/5.5 W) 50 Hz Holding 11 VA (2.9/3.2 W) 60 Hz 5.5 DC Power consumption (W) In the case of 3 position type.

Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51

Lubrication Dustproof [Degrees of protection 0] (4) VZ Enclosure Shock/Vibration resistance (m/s2) Electrical entry 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or equivalent (130C) (6) 51

. : D-M9N-SWY When a large amount of ferrous debris such as machining chips or spatter is accumulated, or a magnetic substance (something attracted by a magnet) is brought into close proximity with an auto switch cylinder, it may cause auto switches to malfunction due to a loss of the magnetic force inside the cylinder. 51 Series NCQ8 Auto Switch Precautions 4 Be sure to read before handling

L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 113 102 90 79 68 57 45 0UT 34 23 113 12 6 85 77 68 60 51

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 20 101 6 X168 CX helical insert thread 186 166 145 124 104 83 62 41 207 8 X169 2 built-in magnets

diameter [mm] 2.6 Insulator Number of cores 3 cores (Brown/Blue/Black) 2 cores (Brown/Blue) 2.6 Outside diameter [mm] 0.88 15 Conductor Effective area [mm2] 0.15 Strand diameter [mm] 0.05 Min. bending radius [mm] (Reference value) 17 Weight 5.5 Most sensitive position [g] Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 0.5 m (Nil) 7 6 Lead wire length 1 m (M) 13 11 3 m (L) 35 31 5 m (Z) 57 51

diameter [mm] 2.6 Insulator Number of cores 3 cores (Brown/Blue/Black) 2 cores (Brown/Blue) 2.6 Outside diameter [mm] 0.88 15 Conductor Effective area [mm2] 0.15 Strand diameter [mm] 0.05 Min. bending radius [mm] (Reference value) 17 Weight 5.5 Most sensitive position [g] Auto switch model D-M9Nm-5 D-M9Pm-5 D-M9Bm-5 0.5 m (Nil) 7 6 Lead wire length 1 m (M) 13 11 3 m (L) 35 31 5 m (Z) 57 51

Lead Wire Specications Model D-MP Sheath Outside diameter [mm] 2.6 Insulator Number of cores 4 (Brown/Blue/Black/White) Outside diameter [mm] 0.57 Conductor Effective area [mm2] 0.08 Minimum bending radius [mm] (Reference values) 13 Weight [g] Model D-MP025 D-MP050 D-MP100 D-MP200 Lead wire length 2 m (A) 29 31 37 51 0.3 m (B) 17 19 25 39 0.3 m (C) 25 27 33 47 How to Order D MP 025 A Measuring

The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto drain). 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Cooling water (l/min) Model 70C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 50C 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 100C 37.5 47 51 38 44.5 48 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36

However, add -XB10 to the end of the part number for non-standard strokes from 51 to 599. Also when exceeding a 600 mm stroke, specify -XB11 at the end of the part number. (Except 10) Applicable Auto Switches/Refer to pages 1575 to 1701 for further information on auto switches.

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Theoretical Output [N] Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 Refer to page 8 for cylinders with auto switches. 12 6 OUT 113 23 34 45 57 68 79 IN 85 17 25 34 42 51 59 Auto switch proper mounting position (detection at stroke end) and mounting height Minimum stroke for auto switch mounting Operating range Auto

piping external diameter NPT1/8 Symbol 25A 32A 40A 50A 65A 80A 6 32 PA 38 8 48 60 B A 9 75 89 PB Standard Specifications Model LVW60 LVW80 LVW90 Nominal diameter 80A 40A 65A 32A 50A 25A Applicable pipe size external diameter 89 48 75 38 60 32 Operating pressure 0 to 0.02 MPa Orifice size 80 65 25 40 Pilot pressure 0.3 to 0.5 MPa 169.7 43.7 Kv 131.1 18.8 71.1 8.5 Flow rate characteristics 198 51

, Tapped on all faces (5 surfaces including end surface) RSQ Stroke adjuster (Rear end stroke only) RSG RS Scraper Can be mounted on standard products MI Theoretical Output Unit: N Operating pressure MPa Operating direction Piston area (mm2) Rod size (mm) Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 11 7 IN 26 23 19 15 38 34 23 OUT 79 68 57 45 113 12 6 26 17 IN 60 51

150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51

150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51