Clean Regulator

If the wrench is applied on any other part, air leakage or other damage may occur. 862 Clean Regulator SRH Series Brackets For SRH3000 For SRH4000 Model B21-1-T1 1350112-T1 ARJ Material Rolled sheet steel (Electroless nickel plated) AR425 to 935 30 ARX 36 61 51 AMR 31 37 8.5 ARM Dimensions 10 ARP 21 20 28 6.5 8 IR-A 13.5 30 50 28 41 2.3 1.6 IR IRV VEX SRH SRH SRP SRF ITV IC ITVH ITVX PVQ

Precision Clean Regulator

0 q 9 Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port

Valve Single Unit

Refer to external dimensions in pages 1-6-51 to 1-6-53, and then mount it. 1-6-50 Body Ported Series SX3000/5000/7000 SX7000: SS5X7-20PStations L1 L2 10 (A, B port) 2n2-One-touch fitting (Pitch) Applicable tubing O.D.: 8 (A, B port) 2n1-Rc 1/4 (Mounting hole) 4-4.5 P = 20.5 13.5 10 16.5 9.4 21 19.5 76.8 22.4 11.5 SV B A B A B A B A B A B A B A 19 20.5 EA EB P SZ EB EA P 20 20 21 21 SY 62.5

4/5 Port Air Operated Valve SYJA3000 Series

Weight Type of actuation Valve model Port size 14/2 (PA/B) Flow rate characteristics Note 2) Effective area mm2 4/25/3 (A/BEA/EB) Note 3) Pilot port size Weight (g) Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] b Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 48 (22) 51

4/5 Port Air Operated Valve Series SYJA3000

model Type of actuation Port size 1 4/2 (P A/B) Flow characteristics Note 2) Note 3) Effective area mm2 4/2 5/3 (A/B EA/EB) Weight (g) Pilot port size Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] b Grommet Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 48 (22) 51

Electro-Pneumatic Proportional Valve Series VEF/VEP

) plug Port 3 (R) Port 1 (P) ARM ARP G1/2 Applicable cable O.D. 6 to 12 IR IRV 112.2 99.7 VEX 21.5 SRH 28 SRP 25 13 50 SRF 122 3 x 1/4, 3/8 VCHR ITV Flow type: VEF2131 Flow type: VEF2141, VEF3141 Pressure type: VEP3141 IC 3 x 3/8, 1/2, 3/4 45 45 2 x 1/4, 3/8, 1/2 ITVX PVQ VEF VEP VEF VEP 129 Port 1 (P) VER 154.5 Port 1 (P) Port 2(A) Port 2 (A) Port 3 (R) P 95 120.5 Plug A VEA 65 P 36 35 51

5 Port Air Operated Valve

3 (EB) port] 1/4, 3/8 [1 (P), 5 (EA), 3 (EB) port] 52 52 3 position closed center/exhaust center/pressure center VFA5 20(-P) 02 03 3 4 5 138 59.5 (78.5) 66 47 (28.2) (Distance between ports) 4A 24 32 3 2B 1/8 (Pilot port: Upward) 28 2 x 4.3 (For mounting) 1/4, 3/8 [4 (A), 2 (B) port] 44 1/8 [Pilot port: Lateral (-P)] 36 4.5 45 40 22.5 27 3 x 4.3 (For mounting) 2 x 3 (Breathing hole) 70 51

VFM300

(Total Travel) 40 Panel mounting hole Hexagon nut thick 5.5, across flats 24 (Pilot exhaust port) JIS Symbol 0.5 MPa supply (SUP CYL port) 2-4.2 mounting hole (EXH port) 15 N F.O.F. 40 T.T. 5-6-51 Series VFM300 Series VFM300 Push button (Mushroom) VFM350-02-30R/B/G/Y Panel mounting hole (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. 2-4.2 mounting hole (EXH port)

        Series VKF300

VK300-82-2-01 VK300-82-2-02 VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 1578

VZ3000

plug connector (L) DIN terminal (D) M plug connector (M) 300 (Lead wire length) MAX. 10 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 : With light/surge voltage suppressor 3-3-51

3 Port Solenoid Valve Series VQ100

Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51

SZ3000

For Series SZ3000 (8) Model AN203-KM8 Effective area 14 mm2 B 26 C 51 A 16 SZ3000-114-2A Label for block disk Plug (White) The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) These are inserted in cylinder ports or SUP/EXH ports which are not being used. Purchasing order is available in units of 10 pieces.

Thermo-con

HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 2.2 (57) 0.16 x 0.20 (4 x 5) 15.4 (390) Power switch External temperature sensor connector Alarm output connector Display/Operation panel Communication connector Warning/Caution label 11.7 (298) Power connector 5.7 (145) Tank lid with gasket Power cable (Accessory) Model no. label Handle 4.0 (101) 2.0 (51) 5.7 (145) Handle 60

Silencer Series AN

B C Dimensions (mm) Recommended flow (m3/min (ANR)) Model Applicable One-touch fitting size Effective area (mm2) Noise reduction (dB (A)) 6 (Series KQ) 6 (Series KQ, KJ) 1/4" (Series KQ, KJ) 8 (Series KQ) 8 (Series KQ) 10 (Series KQ) 10 (Series KQ) 12 (Series KQ) AN103-KM6 AN103-X233 AN103-X235 AN203-KM8 AN200-KM8 AN200-KM10 AN300-KM10 AN300-KM12 0.8 or less 7 37 11 15 25 1.0 or less 14 51

Direct Operated Solenoid Valve Metal Seal Series VS4
10

Indicator light (AC) When solenoid gets energized, indicator light illuminates, thus electrical states of the solenoid can be seen from the outside. 51 VA (64 VA ) 50 Hz Inrush Apparent power (VA) (Power consumption (W)) 45 VA (55 VA ) 60 Hz AC 17 VA (5.3/5.5 W) 50 Hz Holding 11 VA (2.9/3.2 W) 60 Hz 5.5 DC Power consumption (W) In the case of 3 position type.

3 Port Solenoid Valve Series VQ100 1

Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

Lubrication Dustproof [Degrees of protection 0] (4) VZ Enclosure Shock/Vibration resistance (m/s2) Electrical entry 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or equivalent (130C) (6) 51

NCQ8

. : D-M9N-SWY When a large amount of ferrous debris such as machining chips or spatter is accumulated, or a magnetic substance (something attracted by a magnet) is brought into close proximity with an auto switch cylinder, it may cause auto switches to malfunction due to a loss of the magnetic force inside the cylinder. 51 Series NCQ8 Auto Switch Precautions 4 Be sure to read before handling

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 113 102 90 79 68 57 45 0UT 34 23 113 12 6 85 77 68 60 51

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 20 101 6 X168 CX helical insert thread 186 166 145 124 104 83 62 41 207 8 X169 2 built-in magnets