Compact Vacuum Unit

Spacer (Flat washer, etc.) w 1.52 0.2 Exhaust port q Fig. 1 [inch] Gasket Recommended fittings when using a bracket for single unit Mounting screw (M2) For the manifold with pressure sensor/vacuum pressure switch, order the manifold base (q) exclusive for the required number of stations and the required number of single units of the body type 3 valve (w), pressure sensor (e) or vacuum pressure

Large Size Vacuum Module: Series ZR

Example) ZR1--CN(-Q) . 1 pc. ZS-10-5A-50 . 1 pc.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

J type J type fitting assembly procedure Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 !

VXD21/22/23

59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136)

VDW Series

How to find the flow rate for water Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) Q = 0.8 S 10.2 P l/min Q: Flow rate (l/min), P: Pressure differential (P1P2), P1: Upstream pressure (MPa) P2: Downstream pressure (MPa), S: Effective area (mm), Cv: Cv factor 17 Compact Direct Operated Series VDW 2/3 Port Solenoid Valve for Water and Air Safety

VHK

Do not use any other agent except a seal tape. q Contact SMC if using fluids other than air. w Do not supply air pressure from 2(A) port. The air will leak to 1(P) port. e Since the valve may have slight air leakage, it may not be suitable for holding pressure in a pressure vessel.

ZQ

Actuation Warning 1 Normally closed q Cannot be used for vacuum retention. w Use a release valve. (Without a release valve, the workpiece may not be released.)

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

5 Port Air Operated Valve

e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1

CV/MVGQ

Mounted Cylinder Series CV/MVGQ 10, 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Series Variations RE A B Standard variations Bore size (mm) Series Action Page REC With air cushion With strong scraper Built-in One-touch fitting With auto switch Built-in magnet CX Series CVJ5 CY 10 16 10-15-4 Double acting MQQ M RHC Series CVJ3 MK(2) Single acting (Spring return) (Spring extend) 10 16 10-15-10 RS Q

Stainless Steel 316

Construction q w Material No.

Valve Single Unit

Material Aluminum die-casted (SX3000: Zinc die-casted) Note White Body q Adapter plate White White White Resin Resin w e End plate Pilot body Piston Spool valve assembly Molded coil r Resin t Resin y Aluminum, HNBR Gray u Resin Caution Replacement Parts Part no. SX340 SX540 SX740 Mounting Screw Tightening Torques No.

Valve Single Unit

Material Aluminum die-casted (SX3000: Zinc die-casted) Note White Body q Adapter plate White White White Resin Resin w e End plate Pilot body Piston Spool valve assembly Molded coil r Resin t Resin y Aluminum, HNBR Gray u Resin Caution Replacement Parts Part no. SX340 SX540 SX740 Mounting Screw Tightening Torques No.

Mini Free Mount Cylinder

3 w q !5 !4 y r e !2 Without magnet Rod end male threaded Built-in magnet Single Acting, Spring Return !1 !0 !3 w q o i y r e u t Built-in magnet Without magnet Replacement Parts: Seal Kit Double Acting Component Parts Contents Note No. Description Material Kit no. Bore size (mm) 12 16 20 Hard anodized Aluminum alloy 1 Cylinder tube CUJB12-PS Set of !3, !4, !5 and grease pack.

3 Port Solenoid Valve

q D side r Lock bracket Connector entry direction Lateral Description No.