Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

17.5 9.3 13.1 24.4 8.4 26.9 36.3 13.5 1/8" 22.9 14 11.6 6 10.9 AS231F-01-08 AS231F-01-03 9.3 30.9 40.8 18.5 5/32" 28.2 16.2 15.2 8 12.9 21 24.9 18 12 AS231F-02-04 AS231F-01-05 16.5 10.9 23.9 26.8 35.2 30.2 32.1 27.1 11.6 14 37.3 30.6 39.6 16 3/16" 21.9 16.2 10.4 4 10.9 14.2 32 1/8 (12.7) AS231F-02-06 AS231F-01-07 17 12.9 16.2 25.6 13.2 29.9 19 38.2 34 42.1 17 1/4" 25.2 18.4 12.8 6 12.9 33

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

22.9 36.3 30.9 13.5 14 26.9 24.9 6 11.6 5/32" 9.3 10.9 18 NPT 1/8 AS231FG-01-08 AS231FG-N01-05 35.2 30.2 27.1 32.1 28.2 40.8 18.5 16.2 23.9 30.9 26.8 14 8 15.2 3/16" 11.4 12.9 21 14 10.9 16.5 12.7 AS231FG-02-04 AS231FG-N01-07 21.9 39.6 36.3 16 16.2 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 18.5 19 16.2 12.9 AS231FG-02-06 AS231FG-N01-09 25.2 42.1 40.8 17 18.4 28.2 34 30.9 6 12.8 5/16" 15.2 33

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

17.5 12.7 5/32" 20.3 9.3 10.8 33.8 28.8 10-32 UNF 8 9.6 9.3 30.1 25.1 34.5 3/16" 23.3 16.5 21.3 11.4 8 31.9 1/4" 20.7 13.7 21.6 12 17 1/8" 24.4 8.4 17.5 12.7 13.1 30.9 9.3 5/32" 24.9 9.3 18 37.3 3/16" 23.9 16.5 26.8 11.4 14 35.2 30.2 14.2 NPT 1/8 12.7 10.9 32.1 27.1 38.2 19 1/4" 25.6 17 29.9 13.2 16.2 12.9 40.8 21 5/16" 28.2 18.5 30.9 15.2 39.6 32 5/32" 21.9 16 30.6 10.4 16.2 10.9 41.6 33

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

22.9 36.3 30.9 13.5 14 26.9 24.9 6 11.6 5/32" 9.3 10.9 18 NPT 1/8 AS231FG-01-08 AS231FG-N01-05 35.2 30.2 27.1 32.1 28.2 40.8 18.5 16.2 23.9 30.9 26.8 14 8 15.2 3/16" 11.4 12.9 21 14 10.9 16.5 12.7 AS231FG-02-04 AS231FG-N01-07 21.9 39.6 36.3 16 16.2 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 18.5 19 16.2 12.9 AS231FG-02-06 AS231FG-N01-09 25.2 42.1 40.8 17 18.4 28.2 34 30.9 6 12.8 5/16" 15.2 33

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

21 21 18.4 R 1/4 40.4 35.4 18.5 17 34.4 29.4 AS231FG-02-08 AS231FG-N02-03 28.2 45.6 40.1 18.5 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 32 16 18.3 10.9 16.2 AS231FG-02-10 AS231FG-N02-05 31 48.4 42.6 21 23.9 38.7 31.1 10 18.5 3/16" 11.4 40 33 17 20.2 NPT 1/4 AS331FG-02-06 AS231FG-N02-07 40.4 35 34.4 29.4 25.2 47 45.6 17 25.6 38.5 34.2 6 12.8 1/4" 13.2 60 19 36 18.5 17.5 12.9 18.3 20.6 AS331FG

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

19.8 20.3 21.4 24.4 24.9 26.9 30.9 30.6 34 35.2 38.7 8.4 9.3 11.6 8.4 9.3 11.6 15.2 10.4 12.8 15.2 18.5 28.7 12.7 17.5 M5 x 0.8 8 8 28.8 33.8 25.1 30.1 9.6 9.3 10.8 31.8 13.5 20.6 ASV 17 31.8 12.7 17.5 9.3 13.1 AK 36.1 31.1 32.1 27.1 R 1/8 14.2 14.2 18 21 37.2 41.7 40.1 42.6 45.6 48.4 13.5 18.5 16 17 18.5 21 22.9 28.2 21.9 25.2 28.2 31 10.9 12.9 10.9 12.9 14 16.2 16.2 18.4 18.3 20.2 ASS 33

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

19.8 20.3 21.4 24.4 24.9 26.9 30.9 30.6 34 35.2 38.7 8.4 9.3 11.6 8.4 9.3 11.6 15.2 10.4 12.8 15.2 18.5 28.7 12.7 17.5 M5 x 0.8 8 8 28.8 33.8 25.1 30.1 9.6 9.3 10.8 31.8 13.5 20.6 ASV 17 31.8 12.7 17.5 9.3 13.1 AK 36.1 31.1 32.1 27.1 R 1/8 14.2 14.2 18 21 37.2 41.7 40.1 42.6 45.6 48.4 13.5 18.5 16 17 18.5 21 22.9 28.2 21.9 25.2 28.2 31 10.9 12.9 10.9 12.9 14 16.2 16.2 18.4 18.3 20.2 ASS 33

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

22.9 30.9 36.3 13.5 14 26.9 24.9 6 11.6 5/32" 9.3 10.9 18 NPT 1/8 AS231FG-01-08 AS231FG-N01-05 35.2 30.2 32.1 27.1 28.2 40.8 18.5 16.2 23.9 30.9 26.8 14 8 15.2 3/16" 11.4 12.9 21 14 10.9 16.5 12.7 AS231FG-02-04 AS231FG-N01-07 21.9 39.6 36.3 16 16.2 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 18.5 19 16.2 12.9 AS231FG-02-06 AS231FG-N01-09 25.2 42.1 40.8 17 18.4 28.2 34 30.9 6 12.8 5/16" 15.2 33

Stroke Reading Cylinder and Counter

d9 T CW RR CL + Stroke A + Stroke (mm) Head side flange Rod side flange Common Foot type Rod side flange, Head side flange Double clevis type Bore size (mm) LT FT LA LB LE LH LX O A LD LS LY LZ FD FG FL FV FX FZ M A A A CD CL CU CW CX CZ RR T 32 40 50 63 M6 x 1 148 5.8 11.2 6.6 52.5 30 112.4 65 57 72.5 71 5.5 69.5 8 59 48 56 65 34 131 139 161 10 151 14 20 18 36 10 57.5 M6 x 1 7 11.2 6.6 33

Cylinder

58 63 1 68 J 73J 83 , 66 71 76 81 1 91 i 10 . . " ISore size A' ~i I D O'( A B e GA GB K MM CX E NN CK CU OC~ CH ' ,o j ' 1 Cr H I J (mni) .~ , ~ 6 7 9 14 16.5 3 1 0.5 11 M3 XO .S M10 X 1.0 6 17 , 6 18.5 20.4 3 16 4 12 1.6 18 3.4 8 26 ~-13 ( 10 10 20 5 M4XO.7 MlaXl.0 6.5 1.6 24 6 I 17 8 20,5 1 239 4.5 20 I 7 33 R l l~ . 5 L29 13.5. 12 24.5 6 15.5 6 18.5 M5 XO .8 M14 X 1.0 17 2.9 42 14 I

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 14 30 14 Vacuum suction port Rc1/8 (NPT1/8, G1/8) Extension end adjuster 45.5 (Extension end adjuster) 15 6 N x M5 x 0.8 thread depth 8 Note 1) Note 2) Retraction end adjuster 6 14.5 (Extension end adjuster) 31 33 70 35 1.5 30 3 60 17.5 5H9 ( ) depth 5 +0.030 0 F 7 4 x M5 x 0.8 thread depth 8 18 2 N 1 x F 51 3 x M6 x 1 thread depth 13 5H9 ( )

Rotary Actuator/Vane Type

detecting position Auto switch mounting Auto switch adjustment D53 CRB2 Series Volume [cm3] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Volume 1 (0.6) 1.2 1.5 1.5 (1.0) 2.9 3.7 4.8 (3.6) 6.1 7.9 11.3 (8.5) 15 20.2 25 (18.7) 31.5 41 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33

Possible to transfer a workpiece at low-speed.

180 M5 x 0.8 depth 6 68 30 3 69 (11) 14 39 16.5 49 16 34.7 12 32 M10 x 1.5 14 8.5 4 90, 180 M6 x 1 depth 7 76 32 3 78 (13) 16 47 18.5 55 16 40.4 15 36 M10 x 1.5 14 8.6 5 Key dimensions Q S W b L1 US TA TB TC TD TF (H9) TG (H9) TL UW G M N L Size Rotation angle 90 104 4 0 0.03 0 0.1 0 0.1 20 8 9.6 29 11.5 20 59 24.5 1 13.5 27 4 4 2.5 74 15 11 180 130 90 122 4 0 0.03 0 0.1 0 0.1 30 10 11.4 33

Compact Cylinder with Solenoid Valve/

Note 1) 40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8 26 23.3 7 40 5.4 M6 x 1 5 to 100 46.5 42 0.2 40.5 Note 2) 48.5 Note 2) 10 to 100 64 62 53.4 7.5 M6 x 1 32 29.7 8 50 6.6 M8 x 1.25 50 0.2 46 10 to 100 77 74 59.6 7.5 M6 x 1 38.5 35.4 8 60 9 M10 x 1.5 54 Note 1) The dimensions (A + stroke) and (B + stroke) for 5 mm stroke will

Low Profile Guide Type

14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F CY1F CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 100,150,200,250,300,350,400,450,500,550,600 CYP Model KC KA KB KH KW L LA LL LW LZ ML MM N PA PB PC Q QA QB QW CY1F10 6.5 44 8 19 59 38 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 33

60

58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4 90.9 119.4 123.4 152.3 31.3 40 53 55 71 25.3 33

3 Port Solenoid Valve/

.: 6, 1/4" (With check valve) (External pilot port) 44.5 Safety limit switch 5.2 (For mounting) 3.5 Made by OMRON 7.5 4.5 33 3.5 108.4 20.5 Precautions Symbols Symbols Specific Product (Max. 10) 224.2 Applicable cable O.D. 3.5 to 7 Safety limit switch (made by OMRON) Part number: D4N-2B31 (G1/2) : D4N-9B31 (M12 connector) 5.2 (For mounting) G1/2 88.8 81.3 (22.9) (With check valve) A 9.4 38.5

42

75 29 0.4 P R B 64 33 28 0.3 Effective area at exhaust side [mm2] S at P2 = 0.5 MPa A R EA 36 75 78 0.2 B R EB 68 38 69 0.1 Note 1) Set the pressure within the operating pressure range of the valve.

High Vacuum Angle Valve

Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33

In-line Air Filter

Unlocked state Locked state Procedure 2 Lock mechanism Procedure 7 Procedure 3 Product no. display Procedure 6 Case Element Procedure 4 Procedure 5 Cover Protrusion on the cover 5 In-line Air Filter ZFC Series Dimensions ZFC1 (2, 3.2, 1/8") Applicable tubing O.D. (2, 3.2, 1/8") 8.5 IN 12.8 8.5 8 2 x Mounting hole for M3 countersunk head screw 33 10 45 25 8.8 11.2 ZFC3 (3.2, 4, 1/8", 5/32"