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2" 1/2" 1/2" 1/2" 1/2" 1/2" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" Specifications 0.88 1.41 2.02 2.82 3.53 L/min CFM L/min CFM L/min CFM L/min CFM L/min CFM L/min CFM L/mim CFM L/min CFM L/min CFM 0.95 1.91 3 0.09 0.21 0.42 0.88 1.77 2.65 4.41 4.41 5.29 6.71 25 40 57 80 100 27 54 85 2.5 6 12 25 50 75 125 125 150 190 2.65 3.88 6 8.48 10.59 0.35 0.88 1.77 3.53 7.06 10.59 17.66 21.19

Series M Miniature Fittings M3, R(PT) 1/8, M5

female. 4/2.5 4/2.5 1 8 1 8 Rc(PT) -M5 female M-5B For nylon tube.

IP Address Setting Tool (Interactive Type)

Definitions and Terminology (Supplementary Explanation) 15 -1No.EX-OMV1026-B 1.

Series LX Construction and Mounting

An actuator can be mounted from two directions, which can be selected depending on the equipment or work piece. 1. Front mount type 1.

Series GS40 Digital Pressure Sensor 1

Bracket (Option) AV R 1/8, 1/4 Dedicated mounting screw AU 22 14 (Hex. width across flats) (M4 x 0.7) M5 x 0.8 38 AF 2 26 2-4.5 600 8 AR (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type PT type 40 VBA VE SMC DIGITAL PRESSURE SENSOR ALM. SET 20 VY1 + G P.SET PPA AL 14-11-19

Series GS40 Digital Pressure Sensor 1

Bracket (Option) AV R 1/8, 1/4 Dedicated mounting screw AU 22 14 (Hex. width across flats) (M4 x 0.7) M5 x 0.8 38 AF 2 26 2-4.5 600 8 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type

MRHQ

Step 1) Position fingers for gripping a workpiece. Step 1) Fully open the fingers. Step 1) Fully open the fingers. Step 1) Position fingers for gripping a workpiece. Step 1) Fully close the fingers.

MRHQ

Step 1) Position fingers for gripping a workpiece. Step 1) Fully open the fingers. Step 1) Fully open the fingers. Step 1) Position fingers for gripping a workpiece. Step 1) Fully close the fingers.

Clean Rodless Cylinder Series CYP

10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5 67 M5 x 0.8 25 60 105 48 45 23 13 18 69 32 17 2.5 118 CYP32 8.6 115 M6 x 1 8 7.5 90 Rc 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 Note 1) These dimension drawings indicate the case of piping port position

Parallel Type Air Gripper Series MHZ

-6S MHZA2-6C MHZAJ2-6C 26 27 26 27 26 27 6 6 6 6 6 6 4 4 4 4 4 4 Double acting 3.3 (0.74) 6.1 (1.37) Normally open 1.9 (0.43) Single acting Normally closed 3.7 (0.83) Single acting type, normally open Note 1) Values based on pressure of 0.5MPa, gripping point L = 20mm, at center of stroke.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

Bore size (mm) Operating direction Operating pressure (MPa) 0.3 0.5 0.7 32 40 50 63 80 100 CQ2Y32-PS IN 181 302 422 Piston seal 1 pc. CQ2Y40-PS 32 OUT 241 402 563 Rod seal 1 pc. CQ2Y50-PS IN 317 528 739 Gasket 1 pc. CQ2Y63-PS 40 OUT 377 628 880 Grease pack (10 g) 1 pc.

Exhaust Cleaner for Vacuum Pump AMV Series

AMV75 1 AMV37 AMV160 2 No Description Material Part no.

CRB1/Size: 10, 15, 20, 30

Weights (g) Vane style Double vane Single vane Model CRB1BW15-lS CRB1BW20-lS CRB1BW30-lS CRB1BW10-lD CRB1BW15-lD CRB1BW20-lD CRB1BW30-lD CRB1BW10-lS Rotation angle 90 180 270 180 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Body of rotary actuator 26.3 26.0 25.7 49 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange bracket ass'y 9 10 19 25 9 10 19 25 Auto switch

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

The maximum piston speed for retraction is approximately 70% that of extension. 848 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Auto Switch Proper Mounting Positions (Detection at Stroke End) CXSJ6 / CXSJ6 11122122D B (mm) D-M9 23 (24) 2 (1) 13 (11.5) 8 (9) D-A93 19 (20) 14.5 (15.5) 6.5 (7.5) Symbol A B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

R 1/ 4NPT 1/4G 1/ 4 (with M5 male thread) URJ 1/4TSJ 1/ 4 Port size Leak rate 1 x 10 -5Pa. m 3/ s 1 x 10 -10Pam3/s 1MPa 1MPa 100kPa 100kPa Rated pressure range 0 0 0 0 -100kPa -100kPa Output Switch output 2 outputs NPN or PNP Analog output Output voltage 1 to 5V Features 2 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 How to Order M ISE50 02 22 L For positive

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH. H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

VXP21/22/23

40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Note 1) Refer to the WEB catalog for details of gripping force at each gripping point.

Low Friction Cylinders Metal Seal Type

Example 3) High speed & high frequency actuation Applications based on low friction specification Solenoid valve 1) Operating resistance will vary with an offset load. Be sure to properly align the rod axis with the load and direction of movement when connecting.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Dryer Piping Caution 1.