Lubrication Equipment

1/8 3/8 1/2 3/4 1 10 20 30 40 50 60 B With bracket Thread Port size Rc(PT) NPT G(PF) N F 8 M5 X 0.8 1/8 1/4 3/8 1/2 3/4 1 M5 01 02 03 04 06 10 C R With bowl guard (Only AL2000) Flow direction: Right to left With drain cock and barb fitting (6, 4 for nylon) (AL3000 to AL6000) 3W AL3000 When specifying more than one option, please list alphabetically.

Precision Regulator Series IR1000/2000/3000

Panel When mounting on a panel, refer to page 561 in Specific Product Precautions. 4.5 M5 x P0.5 8.5 M6 x P0.5 5.5 71 11 18 124 46 53 92 10 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) 30 OUT(2) SUP(1) 43 35 2 x Rc 1/8 Port size EXH 43 50 50 2 x Rc 1/4 Port size 2 x Rc 1/8 35 60 2 x Rc 1/8 Pressure gauge port Pressure gauge port 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (Option) 30

Low Profile Guide Type

Bore size (mm) Cylinder fixing bolt Tightening torque Bore size (mm) Hexagon socket head set screw Tightening torque 10 15 25 M3 0.55 to 0.72 Nm 10 15 25 M3 0.37 to 0.45 Nm M5 2.6 to 3.5 Nm M5 0.54 to 0.64 Nm 3. Be careful about the tightening torque of the hexagon socket head screws. Be careful excessive tightening may cause damage or malfunction of the shock absorber.

Vacuum Saving Valve

(mm) Model M1 M2 L1 L2 L3 L4 H (Width across flats) D W (g) ZP2V-A5ZP2V-A8ZP2V-A01ZP2V-AG1ZP2V-AN1ZP2V-B5ZP2V-B6ZP2V-B01ZP2V-BG1ZP2V-BN1Tightening torque (Nm) Note) M5 x 0.8 M8 x 1.25 R1/8 G1/8 NPT1/8 M5 x 0.8 M6 x 1 Rc1/8 G1/8 NPT1/8 1.0 to 1.5 5.5 to 6.0 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 1.0 to 1.5 2.0 to 2.5 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 M5 x 0.8 M8 x 1.25 Rc1/8 G1/8 NPT1/8 M5 x 0.8

Clamp Cylinder with Lock Series CLK1

-R5006 CKA40-18-206C CKB40-18-207B Double knuckle joint CKA40-40-209A 75mm stroke CKA40-40-210A Weights (Basic weight is for a 0mm stroke.)

HRX-OM-X037

Required facility water system (for water cooled type) Table 3-1 Heat Radiated Heat Facility water specifications Model Radiated kW HRL100-W*-40 Approx.18 Refer to 9.1 Specifications.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

+0.084 0 0.1 0.3 AccessorySCA1 Bore size , #8 3.4-18 End Lock Cylinder Series CBA1 Pivot Bracket for Trunnion CL MLGC CNA CB Note) The dimensions above are for reference.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

for further information on rod end nuts and accessories. 14 up to 600 11 52 20 13 40 12 17 17 58 27 47.3 61 M8 M18 X 1.5 159 35 32 70 7 11 19 30 17 90 0 25 18 up to 600 11 64 20 15.5 40 10 17 17 58 27 54.8 68.5 M10 X 1.25 M18 X 1.5 170 32 85 35 7 14 19 31 17 98 0 25 18 up to 750 102 13 78 25 18.5 52 14 21 21 71 32 65.8 80.5 M12 X 1.75 M22 X 1.5 116 204 40 37 11 17 23 37 21 0 40 22 up to

MB

18 22 26 With Mounting Bracket Refer to basic mounting (B) for other dimensions and with rod boot.

Compact

Right) MXZ25L(Pilot port location: Left) 2 x M5 x 0.8 (Pilot port) 2 x M5 x 0.8 (Pilot port) 22.2 + Stroke 22.2 + Stroke 9.5 2.5 9.5 (54.9) (54.9) 8 8 2.5 Auto switch Auto switch 10 MXZ Series Model Selection For Transfer (1) Load weight and overhang L1 and L2, should be within the average speed limit in the graphs. (2) For horizontal use, overhang L3 should not exceed the allowable range

PSxx-OMR0001CN

m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

AIR FILTER

HOW TO ORDER AF 30 03 BD 1N A 1 3 4 5 2 1 Symbol Description Body size 10 20 30 40 50 60 Meter thread (M5) Rc N NPT F G Thread type Nil 2 M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Port size 3 Nil Without mounting option B With bracket a Mounting Option 4 Nil Without auto drain C With float type auto drain (N.C.)

7

+0.027 0 Shaft: 18 0.050 0.093 4 x M6 Thread depth 15 28 +0.5 +0.1 129 + Stroke 55 75 110 MK 258 + Stroke 2 x M6 Thread depth 6 Press-fit spring pin 3 x 38 L MK2T CK1 CK1 36 17 Hole: 18 +0.027 0 CLK2 Shaft: 18 0.050 0.093 33 34 CLKG 28 +0.5 +0.1 34 47 CKQ CLKQ CK CLK 24 75 55 CKQ 17 21 71 90 2 x M6 Thread depth 6 Double knuckle joint CKPA80 Built-in strong magnet type/with magnetic field

HRX-OM-X071

Fluid leakage Not present Present/ Humidity Temperature Performed by Date Right after setting up (initial value) HRR Series 9.9 Daily Check 9-17 HRX-OM-X071 Chapter 9 Documents 9.9 Daily Check HRR Series 9-18 HRX-OM-X071 Chapter 10 Product Warranty Chapter 10 Product Warranty 1.

Clamp Cylinder Series CK1

R24 Shaft: 18 0.050 0.093 28 +0.5 +0.1 4 x M6 Thread depth 12 61 129 + Stroke 110 85 259 + Stroke Shaft: 18 Hole: 18 +0.027 0 0.050 0.093 2 x M6 Thread depth 6 Press-fit spring pin 5 x 40 L 38 17 32 37 48 24 28 +0.5 +0.1 85 61 25 70 90 Double knuckle joint CKPA100 Built-in strong magnet type / with magnetic field resistant auto switch (D-P79WSE type) 56 63 56 + Stroke 34 Speed controller

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 Parts included 13 Gasket 1 13 Gasket 1 13 Gasket 1 13 Gasket 1 in seal kit 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 Description Size 70

HRX-OM-Y098

Alarms that allow continuous pump operation are shown in Table 5.4-18 Alarms that allow continuous pump operation (1/2) and Table 5.4-19 Alarms that allow continuous pump operation (2/2).

10

Bore size [mm] B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 Bore size [mm] Z MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 32 160 40 164 50 190 63 190 80 238 100 238 125 279 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64

HRX-OM-R026

PV SV HRSH Series 5.21Communication function 5-73 HRX-OM-R026 Chapter 5 Display and setting of various functions 18. Select BCC (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL.

IZ-OMK0015

Attach the ionizer body and brackets with M5 screws. (5) Adjust the angle of the ionizer body to make the static neutralization effective, and fix with the rotating set screws (M5) of each bracket. (6) Make sure to ground with the ground resistance of 100 ohms or less by connecting DC1(-) lead wire [blue] M5 M5 screws of the power supply cable.