High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load

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GS EIecbIC Silicon l'l.bba-(frl-l16) eo> "" 20-;'20 02-2 2~8 ";10 /16 /20 /32 .:,aiSO 04 4 B8 M8 X 1.25 '$'32 ,,~ listO Pad Dia.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50, 63 80, 100 125 GKM10-20 GKM12-24 GKM16-32 GKM20-40 GKM30-54 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 +0.5 +0.15 M10 x 1.25 10 40 10 10 52 20 20 12 12 62 M12 x 1.25 12 48 24 24 16 16 83 M16 x 1.5 16 64 32 32 M20 x 1.5 20 80 20 20 105 40 40 M27 x 2 30 110 30 30 148 54 55 Piston Rod Ball Joint KJ (ISO 8139) l l3 d6 (Max.) l d3 b1 h12 h d1 H9 l3 Part no.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Rod clevis: GKM (ISO 8140) l1 [mm] Bore size [mm] Part no. e b d f h11 (Shaft) f H9 (Hole) l1 c (Min.) a (Max.) 32 GKM10-20 M10 x 1.25 10+0.5 +0.15 40 10 10 52 20 20 40 GKM12-24 M12 x 1.25 12+0.5 +0.15 48 12 12 62 24 24 50, 63 GKM16-32 M16 x 1.5 16+0.5 +0.15 64 16 16 83 32 32 80, 100 GKM20-40 M20 x 1.5 20+0.5 +0.15 80 20 20 105 40 40 125 GKM30-54 M27 x 2 30+0.5 +0.15 110 30 30 148 54 55

Digital Flow Switch (Integrated display type)

NPN (1 output) + Analogue (1 to 5 V) type PF2A7H--28NPN (1 output) + Analogue (4 to 20 mA) type PF2A7H--29Max. 30 V, 80 mA Internal voltage drop: 1 V or less 28: Analogue output: 1 to 5 V Output impedance: 1 k 29: Analogue output: 4 to 20 mA Max.

ZQ

Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction

Compact Vacuum Ejector Series ZQ

0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) ZQ110 Exhaust characteristics ZQ110 Flow characteristics Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15

JA/JAH/JB/JS

Nominal thread size Applicable cylinder nominal thread size M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M22 x 2.5 M24 x 3 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

JA/JAH/JB/JS

Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22

LEF-OM007xx

LEFS25S LEFS32S LEFS32 Speed 500mm/sec 0 [/min] LEFS40 Speed 500mm/sec 0 [/min] 10,000,000 20 [/min] 20 [/min] 10,000,000 30 [/min] 40 [/min] ISO4 50 [/min] ISO CLASS4 ISO5 ISO CLASS5 ISO6 1,000,000 ISO CLASS6 1,000,000 Particle concentration [particles/m3] Particle concentration [particles/m3] 100,000 100,000 10,000 10,000 1,000 1,000 100 100 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle

Fieldbus system EtherCAT compatible SI Unit

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Roun1d head screw (M3 x 8), 4 pcs. (2) End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tithe screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

. 30 10, 20, 30, 40, 50, 75, 100 40 10, 20, 30, 40, 50, 75, 100 Bore size Strokes are available in 1 mm increments by installing spacers in standard stroke cylinders. 10 16 20 25 30 40 10 mm 16 mm 20 mm 25 mm 30 mm 40 mm Port thread type M thread Rc NPT G 10 to 20 Nil 25 to 40 TN TF Series MQQ is not auto switch capable.

0.4

or less VQ1200 13 or less 10 or less 0.70 0.15 0.16 0.72 0.25 0.18 Metal seal 13 or less Double VQ1201 20 or less 15 or less 0.85 0.20 0.21 1.0 0.30 0.25 Rubber seal 20 or less VQ1300 40 or less 20 or less 0.68 0.15 0.16 0.72 0.25 0.18 Metal seal 26 or less Closed center VQ1301 47 or less 25 or less 0.70 0.20 0.16 0.65 0.42 0.18 Rubber seal 33 or less VQ1000 VQ1400 40 or less 20 or less

VDW Series

Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW11 VDW21 22 20 Lead wire l approx. 300 Lead wire l approx. 300 21 27 20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6

Card Motor

F 6.5 Note 1) 4 M3 0.5 depth 2 Rail mounting screw (mm) 7.5 24 Stroke Table dimensions Rail dimensions Home position Model A B C D 10 Note 4) E 60 F 50 G 4 H 10.5 LAT3m-10 49 4 LAT3m-20 20 69 6 25 90 80 14 20.5 Note 2) depth 2 +0.03 0 3 depth 2 +0.05 0 3 3.5 LAT3m-30 30 89 6 25 120 110 24 30.5 Rail dowel pin hole 320.1 16 Note 2) 2 Card Motor Controller Series LATC4 RoHS How to Order LATC4

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW11 VDW21 22 20 Lead wire l approx. 300 Lead wire l approx. 300 21 27 20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6

Angle Seat Valve

Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type N.C. 1/4 to 1 10, 15, 20, 25 10, 15, 20, 25, 35, 40, 50 N.C./N.O. 1/4 to 50A 10 to 12 N.C.

Angle Seat Valve /

, 25 10, 15, 20, 25, 35, 40, 50 N.C.

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.